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US5343489A Expired / Lapsed US ⏱️ 0.0 years remaining

Arrangement for shaping a laser beam and for reducing the coherence thereof

Assignee: Carl Zeiss SMT GmbH
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Filing: 1992-07-13
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Granted: 1994-08-30
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Expires: 2012-07-13
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Abstract

Abstract The invention is directed to an arrangement for shaping a laser beam and for reducing the coherence thereof. The arrangement has at least two approximately parallel mirrors arranged approximately perpendicular to the laser beam. One of the mirrors is fully reflective whereas the other mirror is partially reflective so that the exiting light beam comprises several mutually adjacent or partially overlapping component beams which are reflected a different number of times. The spacing of the mirrors is greater than half the coherence length of the laser. An advantageous embodiment provides the arrangement on a plane-parallel glass plate with the degree of reflection of the partially-reflective mirror being reduced in a stepwise manner and with a partial overlapping of the exiting component beams.

Inventors

  • 👤 Johannes Wangler

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 12:09
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/09; G02B27/0938; G02B27/0977; G02B27/0911; G02B27/10; G02B27/106; G02B27/14; G02B27/144; G02B27/145; G02B27/48; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70208; G03F7/70483; G03F7/7055; G03F7/70583; H; H01; H01S; H01S3/00; H01S3/005; Y; Y10; Y10S; Y10S372/00; Y10S372/70

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 233 words
An arrangement for shaping a laser beam having a predetermined coherence length and for reducing the coherence thereof, the laser beam having a first cross section and the arrangement comprising: a transparent carrier block having two mutually opposite planar surfaces approximately parallel to each other and at an angle to the laser beam and said planar surfaces being disposed at a distance from each other which is greater than half of said coherence length; first and second mirrors being applied to corresponding ones of said planar surfaces to reflect said laser beam therebetween; said first mirror being fully reflective and said second mirror being partially reflective and partially transmissive so as to multiply reflect said laser beam between said first and second mirrors and to transmit a component beam through said second mirror with each reflection with no gap between mutually adjacent component beams transmitted through said second mirror and which are reflected a different number of times in said arrangement accompanied by a corresponding intensity change for each reflection; said component beams conjointly defining a composite beam of reduced coherence exiting from said second mirror and having a second cross section greater than said first cross section; and, said second mirror being reflectively coated in varying amounts over the width thereof to compensate for said intensity change with each reflection thereby making said composite beam more homogeneous across said second cross section.
Claim 2
Dependent Claim 233 words
An arrangement for shaping a laser beam having a predetermined coherence length and for reducing the coherence thereof, the laser beam having a first cross section and the arrangement comprising: a transparent carrier block having two mutually opposite planar surfaces approximately parallel to each other and at an angle to the laser beam and said planar surfaces being disposed at a distance from each other which is greater than half of said coherence length; first and second mirrors being applied to corresponding ones of said planar surfaces to reflect said laser beam therebetween; said first mirror being fully reflective and said second mirror being partially reflective and partially transmissive so as to multiply reflect said laser beam between said first and second mirrors and to transmit a component beam through said second mirror with each reflection with no gap between mutually adjacent component beams transmitted through said second mirror and which are reflected a different number of times in said arrangement accompanied by a corresponding intensity change for each reflection; said component beams conjointly defining a composite beam of reduced coherence exiting from said second mirror and having a second cross section greater than said first cross section; and, said second mirror being reflectively coated in varying amounts over the width thereof to compensate for said intensity change with each reflection thereby making said composite beam more homogeneous across said second cross section.
Claim 3
Dependent Claim 17 words
The arrangement of claim 1, wherein said laser beam enters said block next to said first mirror.
Claim 4
Dependent Claim 16 words
The arrangement of claim 1, wherein said laser beam enters said block through said second mirror.
Claim 5
Dependent Claim 24 words
The arrangement of claim 1, wherein said second mirror is reflectively coated to have a reflection factor which becomes less in a stepwise manner.
Claim 6
Dependent Claim 20 words
The arrangement of claim 1, wherein said second mirror is reflectively coated to have a reflection factor which varies continuously.
Claim 7
Dependent Claim 25 words
The arrangement of claim 5, wherein said varying reflection factor at least partially compensates the non-homogeneity of the laser beam over the beam cross section.
Claim 8
Dependent Claim 51 words
The arrangement of claim 1, wherein said laser beam has a predetermined width and said component beams exit from between said first and second mirrors; and, said angle and said spacing being so selected for said predetermined width that the exiting component beams are directly joined one next to the other.
Claim 9
Dependent Claim 25 words
The arrangement of claim 1, wherein said component beams exit from between said first and second mirrors and the exiting component beams being partially overlapping,
Claim 10
Dependent Claim 41 words
The arrangement of claim 1, wherein said laser beam enters said block between said first and second mirrors and said composite beam exits from between said first and second mirrors; and, the exiting composite beams having an approximately quadratic cross section.
Claim 11
Dependent Claim 19 words
The arrangement of claim 1, wherein the number of reflections at said first mirror lies between 5 and 20.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-08-29 1998-02-28 1998-08-30 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-08-29 2002-02-28 2002-08-30 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-08-29 2006-02-28 2006-08-30 $7700.00 Window Closed / Lapsed

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