Patent US5342471A successfully refreshed from Google Patents.
US5342471A
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Plasma processing apparatus including condensation preventing means
Assignee: Tokyo Electron Ltd
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Filing: 1992-04-20
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Granted: 1994-08-30
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Expires: 2012-04-20
Abstract
Abstract A plasma processing apparatus having a pair of electrodes which are installed alternately in parallel in a chamber and in which an object to be processed is placed at one electrode thereof, radiofrequency applying device for applying radiofrequency power between the pair of electrodes, cooling device for cooling the object, drying-gas introducing tube for supplying a drying gas into the chamber, and dropwise-condensation preventing member installed at a portion of the chamber so as to be in contact with the outer atmosphere. The apparatus can prevent dropwise condensation at the time of cooling and at the same time prevent the occurrence of radiofrequency leakage.
Inventors
- 👤 Kazuo Fukasawa
- 👤 Masachika Suetsugu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:46
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32458; H01J37/32522; H10; H10P; H10P34/00; C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/564; C23C16/00; C23C16/44; C23C16/4401; H01J2237/00; H01J2237/02; H01J2237/026; H01J2237/0266; H01J2237/20; H01J2237/2001; Y; Y10; Y10S; Y10S156/00; Y10S156/914
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
104 words
A plasma processing apparatus, comprising: a pair of electrodes installed in parallel with each other in a chamber, with an object to be processed being placed on one electrode thereof; radiofrequency applying means for applying radiofrequency power to a space between the pair of electrodes and having a connecting portion; cooling means for cooling the object to be processed; gas introducing means for supplying a drying gas to the chamber; and condensation preventing means installed at a portion of the camber to be in contact with outer atmosphere, wherein said connection portion is located in the condensation preventing means and outside of the chamber.
Claim 2
Dependent Claim
104 words
A plasma processing apparatus, comprising: a pair of electrodes installed in parallel with each other in a chamber, with an object to be processed being placed on one electrode thereof; radiofrequency applying means for applying radiofrequency power to a space between the pair of electrodes and having a connecting portion; cooling means for cooling the object to be processed; gas introducing means for supplying a drying gas to the chamber; and condensation preventing means installed at a portion of the camber to be in contact with outer atmosphere, wherein said connection portion is located in the condensation preventing means and outside of the chamber.
Claim 3
Dependent Claim
21 words
A plasma processing apparatus according to claim 1, wherein said drying gas includes one of dry air and a nitrogen gas.
Claim 4
Dependent Claim
35 words
A plasma processing apparatus according to claim 1, wherein said condensation preventing means is a cover produced by forming a metal layer on an outer surface of a molded member made of a resin material.
Claim 5
Dependent Claim
29 words
A plasma processing apparatus according to claim 3, wherein said resin material is a resin material selected from the group consisting of acrylonitrile-butadiene-styrene resin, polyvinyl chloride and phenol resin.
Claim 6
Dependent Claim
28 words
A plasma processing apparatus according to claim 3, wherein said metal layer is made of a metal selected from the group consisting of nickel, copper, silver, and aluminum.
Claim 7
Dependent Claim
40 words
A plasma processing apparatus according to claim 3, wherein the metal layer is formed on the molded member by a process selected from the group consisting of plating, adhesion of a thin film made of metal, and plasma flame spray.
Claim 8
Dependent Claim
44 words
A plasma processing apparatus according to claim 1, wherein said cooling means circulates a refrigerant by means of two refrigerant tubes, refrigerant paths formed in the electrode, and a chiller, and wherein at least one portion of the refrigerant tubes is made of ceramic.
Claim 9
Dependent Claim
34 words
A plasma processing apparatus according to claim 7, wherein said ceramic is a ceramic selected from the group consisting of Al 2 O 3 , Si 3 N 4 , and ZnO 2 .
Claim 10
Dependent Claim
19 words
A plasma processing apparatus according to claim 1, wherein said cooling means is a cooling jacket containing liquid nitrogen.
Claim 11
Dependent Claim
17 words
A plasma processing apparatus according to claim 1, wherein said condensation preventing means is a heat-insulating member.
Claim 12
Dependent Claim
17 words
A plasma processing apparatus according to claim 10, wherein said heat-insulating member is made of plastic foam.
Claim 13
Dependent Claim
17 words
A plasma processing apparatus according to claim 1, wherein said condensation preventing means is a lagging box.
Claim 14
Dependent Claim
102 words
A plasma processing apparatus, comprising: a pair of electrodes installed in parallel with each other in a chamber, with an object to be processed being placed on one electrode thereof; radiofrequency applying means for applying radiofrequency power to a space between the pair of electrodes; cooling means for cooling the object to be processed; a first gas introducing means for supplying a first drying gas to the chamber; condensation preventing means installed at a portion of the camber to be in contact with outer atmosphere; and a second gas introducing means for supplying a second drying gas to said condensation preventing means.
Claim 15
Dependent Claim
102 words
A plasma processing apparatus, comprising: a pair of electrodes installed in parallel with each other in a chamber, with an object to be processed being placed on one electrode thereof; radiofrequency applying means for applying radiofrequency power to a space between the pair of electrodes; cooling means for cooling the object to be processed; a first gas introducing means for supplying a first drying gas to the chamber; condensation preventing means installed at a portion of the camber to be in contact with outer atmosphere; and a second gas introducing means for supplying a second drying gas to said condensation preventing means.
Claim 16
Dependent Claim
22 words
A plasma processing apparatus according to claim 13, wherein said first drying gas includes one of dry air and a nitrogen gas.
Claim 17
Dependent Claim
17 words
A plasma processing apparatus according to claim 13, wherein said second drying gas is a nitrogen gas.
Claim 18
Dependent Claim
34 words
A plasma processing apparatus according to claim 13, wherein said condensation preventing means is a cover produced by forming a metal layer on an outer surface of a molded member of a resin material.
Claim 19
Dependent Claim
29 words
A plasma processing apparatus according to claim 16, wherein said resin material is a resin material selected from the group consisting of acrylonitrile-butadiene-styrene resin, polyvinyl chloride, and phenol resin.
Claim 20
Dependent Claim
28 words
A plasma processing apparatus according to claim 16, wherein said metal layer is made of a metal selected from the group consisting of nickel, copper, silver, and aluminum.
Claim 21
Dependent Claim
40 words
A plasma processing apparatus according to claim 16, wherein the metal layer is formed on the molded member by a process selected from the group consisting of plating, adhesion of a thin film made of metal, and plasma flame spray.
Claim 22
Dependent Claim
44 words
A plasma processing apparatus according to claim 13, wherein said cooling means circulates a refrigerant by means of two refrigerant tubes, refrigerant paths formed in the electrode, and a chiller, and wherein at least one portion of the refrigerant tubes is made of ceramic.
Claim 23
Dependent Claim
34 words
A plasma processing apparatus according to claim 20, wherein said ceramic is a ceramic selected from the group consisting of Al 2 O 3 , Si 3 N 4 , and ZnO 2 .
Claim 24
Dependent Claim
19 words
A plasma processing apparatus according to claim 13, wherein said cooling means is a cooling jacket containing liquid nitrogen.
Claim 25
Dependent Claim
17 words
A plasma processing apparatus according to claim 13, wherein said condensation preventing means is a heat-insulating member.
Claim 26
Dependent Claim
17 words
A plasma processing apparatus according to claim 23, wherein said heat-insulating member is made of plastic foam.
Claim 27
Dependent Claim
17 words
A plasma processing apparatus according to claim 13, wherein said condensation preventing means is a lagging box.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-29 | 1998-02-28 | 1998-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-29 | 2002-02-28 | 2002-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-29 | 2006-02-28 | 2006-08-30 | $7700.00 | Window Closed / Lapsed |