Load-lock unit and wafer transfer system

Claim 2

A load-lock unit which is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being set in an atmosphere at least substantially similar to the second atmosphere, and opened so as to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere, said wafer having a shape bounded by a circular segment and a linear segment wherein said unit comprises: a load-lock chamber having a wall and a floor; a holding mechanism, disposed in said load-lock chamber, for holding the wafer; a rotating mechanism for rotating the wafer held by said holding mechanism; an exhausting mechanism for evacuating the load-lock chamber; and an error detecting mechanism for detecting a positional error of a center of the wafer and an orientation error of the wafer while evacuating the load-lock chamber, based on data obtained by radiating light on the wafer when the wafer is rotating.

Claim 3

A unit according to claim 1, wherein said error detecting mechanism comprises an optical unit for generating an electrical signal on the basis of the optical data obtained by radiating light on the wafer which is rotating, and an operating mechanism, connected to said optical unit, for calculating the electrical signal.

Claim 4

A unit according to claim 2, wherein said optical unit comprises a light-emitting section for emitting a laser beam, and a light-receiving section for receiving the laser beam emitted from the rotating wafer and converting the laser beam into an electrical signal.

Claim 5

A unit according to claim 2, wherein said light-receiving section receives the laser beam passing through a peripheral portion of the wafer and detects a light amount thereof.

Claim 6

A unit according to claim 2, wherein said light-receiving section receives the laser beam reflected by a peripheral portion of the wafer and detects a light amount thereof.

Claim 7

A unit according to claim 1, wherein said rotating mechanism rotates said holding mechanism.

Claim 8

A unit according to claim 1, wherein said load-lock chamber comprises a wafer inlet port having an open surface which is inclined obliquely downward, and a pivotal member which is pivotal about a horizontal axis for opening and closing the wafer inlet port.

Claim 9

A transfer system comprising a load-lock unit which is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being set in an atmosphere at least substantially similar to the second atmosphere, and opened so as to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere, said wafer having a shape bounded by a circular segment and a linear segment, a transfer mechanism for transferring the wafer in said load-lock unit to a predetermined position in the second atmosphere, and a control mechanism for controlling said transfer mechanism; said load-lock unit comprising a load-lock chamber having a wall and a floor, a holding mechanism, disposed in said load-lock chamber, for holding the wafer; a rotating mechanism for rotating the wafer held by said holding mechanism, an exhausting mechanism for evacuating the load-lock chamber; and an error detecting mechanism for detecting a positional error of a center of the wafer and an orientation error of the wafer while evacuating the load-lock chamber, based on data obtained by radiating light on the wafer when the wafer is rotating such that the rate of treatment of the wafer is improved; and said control mechanism controlling said transfer mechanism so that the wafer is disposed at the predetermined position in the second atmosphere after the positional error of the center thereof and the orientation error thereof are corrected on the basis of the data from said error detecting mechanism.

Claim 10

A transfer system comprising a load-lock unit which is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being set in an atmosphere at least substantially similar to the second atmosphere, and opened so as to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere, said wafer having a shape bounded by a circular segment and a linear segment, a transfer mechanism for transferring the wafer in said load-lock unit to a predetermined position in the second atmosphere, and a control mechanism for controlling said transfer mechanism; said load-lock unit comprising a load-lock chamber having a wall and a floor, a holding mechanism, disposed in said load-lock chamber, for holding the wafer; a rotating mechanism for rotating the wafer held by said holding mechanism, an exhausting mechanism for evacuating the load-lock chamber; and an error detecting mechanism for detecting a positional error of a center of the wafer and an orientation error of the wafer while evacuating the load-lock chamber, based on data obtained by radiating light on the wafer when the wafer is rotating such that the rate of treatment of the wafer is improved; and said control mechanism controlling said transfer mechanism so that the wafer is disposed at the predetermined position in the second atmosphere after the positional error of the center thereof and the orientation error thereof are corrected on the basis of the data from said error detecting mechanism.

Claim 11

A system according to claim 8, wherein said transfer mechanism has a function of correcting the positional error of the center of the wafer and the orientation error of the wafer, and wherein the positional error of the center of the wafer and the orientation error of the wafer are corrected during transfer of the wafer by said transfer mechanism.

Claim 12

A system according to claim 8, wherein a mechanism for correcting the positional error of the center of the wafer and the orientation error of the wafer is arranged in said load-lock chamber, and wherein the positional error of the center of the wafer and the orientation error of the wafer are corrected in said load-lock chamber by said error correcting mechanism.

Claim 13

A system according to claim 8, wherein the orientation error of the wafer is corrected by rotation of the wafer by said rotating mechanism.

Claim 14

A system according to claim 8, wherein the orientation error of the wafer is corrected during evacuation of said load-lock chamber.

Claim 15

A system according to claim 8, wherein said error detecting mechanism comprises an optical unit for generating an electrical signal on the basis of the optical data obtained by radiating light on the wafer which is rotating, and an operating mechanism, connected to said optical unit, for calculating the electrical signal.

Claim 16

A system according to claim 13, wherein said optical unit comprises a light-emitting section for emitting a laser beam, and a light-receiving section for receiving the laser beam emitted from the rotating wafer and converting the laser beam into an electrical signal.

Claim 17

A system according to claim 13, wherein said light-receiving section receives the laser beam passing through a peripheral portion of the wafer and detects a light amount thereof.

Claim 18

A system according to claim 13, wherein said light-receiving section receives the laser beam reflected by a peripheral portion of the wafer and detects a light amount thereof.

Claim 19

A system according to claim 8, wherein said rotating mechanism rotates said holding mechanism.

Claim 20

A system according to claim 8, wherein said load-lock chamber comprises a wafer inlet port having an open surface which is inclined obliquely downward, and a pivotal member which is pivotal about a horizontal axis for opening and closing the wafer inlet port.

Claim 21

A transfer system comprising a first load-lock unit which is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being set in an atmosphere at least substantially similar to the second atmosphere, and opened so as to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere, said wafer having a shape bounded by a circular segment and a linear segment, a second load-lock unit having structure corresponding to that of said first load-lock unit, a transfer mechanism for transferring the wafer in each of said first and second load-lock units to a predetermined position in the second atmosphere, and a control mechanism for controlling said transfer mechanism; each of said first and second load-lock units comprising a load-lock chamber having a wall and a floor, a holding mechanism, disposed in said load-lock chamber, for holding the wafer, a rotating mechanism for rotating the wafer held by said holding mechanism, an exhausting mechanism for evacuating the load-lock chamber, and an error detecting mechanism for detecting a positional error of a center of the wafer and an orientation error of the wafer while evacuating the load-lock chamber based on data obtained by radiating light on the wafer when the wafer is rotating such that the rate of treatment of the wafer is improved; and said control mechanism controlling said transfer mechanism so that the wafer is disposed at the predetermined position in the second atmosphere after the positional error of the center of the wafer and the orientation error of the wafer are corrected based on data from said error detecting mechanism.

Claim 22

A transfer system comprising a first load-lock unit which is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being set in an atmosphere at least substantially similar to the second atmosphere, and opened so as to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere, said wafer having a shape bounded by a circular segment and a linear segment, a second load-lock unit having structure corresponding to that of said first load-lock unit, a transfer mechanism for transferring the wafer in each of said first and second load-lock units to a predetermined position in the second atmosphere, and a control mechanism for controlling said transfer mechanism; each of said first and second load-lock units comprising a load-lock chamber having a wall and a floor, a holding mechanism, disposed in said load-lock chamber, for holding the wafer, a rotating mechanism for rotating the wafer held by said holding mechanism, an exhausting mechanism for evacuating the load-lock chamber, and an error detecting mechanism for detecting a positional error of a center of the wafer and an orientation error of the wafer while evacuating the load-lock chamber based on data obtained by radiating light on the wafer when the wafer is rotating such that the rate of treatment of the wafer is improved; and said control mechanism controlling said transfer mechanism so that the wafer is disposed at the predetermined position in the second atmosphere after the positional error of the center of the wafer and the orientation error of the wafer are corrected based on data from said error detecting mechanism.

Claim 23

A system according to claim 19, wherein the positional error of the center of the wafer and the orientation error of the wafer are detected in said second load-lock unit during transfer from said first load-lock unit to the second atmosphere.