EP0313466A2
Expired / Lapsed
EP
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Wafer positioning apparatus
Assignee: Fujitsu Ltd
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Filing: 1988-10-20
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Granted: —
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Expires: 2008-10-20
Abstract
Abstract A wafer positioning apparatus includes at least first, second and third optical position detectors (A, B, C) for detecting a circumference portion of a wafer (30). The first to third optical position detectors are arranged on a circumference of a circle (45) having a diameter identical to that of the wafer. A transportation robot (11) is used for holding the wafer and moving the held wafer with respect to the first to third optical position detectors. A control circuit (50 - 58) is used for controlling the transportation robot in accordance with output signals of the first to third optical position detectors so that all of the first to third optical position detectors detect the circumference portion of the wafer at the same time.
Inventors
- 👤 Kazuo Shimane
- 👤 Nobuo Iijima
- 👤 Tatsuro Kawabata
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 22:25
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/53; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
120 words
A wafer positioning apparatus comprising first, second and third optical position detectors (A, B, C) for detecting a circumference portion of a wafer (30); transportation means (11) for holding the wafer and moving the held wafer with respect to the first to third optical position detectors; and control means (50 - 58) for controlling the transportation means in accordance with output signals of the first to third optical position detectors so that all of the first to third optical position detectors detect the circumference portion of the wafer at the same time, characterized in that the first to third optical position detectors are arranged on a circumference of a circle (45) having a diameter identical to that of the wafer.
Claim 2
Dependent Claim
120 words
A wafer positioning apparatus comprising first, second and third optical position detectors (A, B, C) for detecting a circumference portion of a wafer (30); transportation means (11) for holding the wafer and moving the held wafer with respect to the first to third optical position detectors; and control means (50 - 58) for controlling the transportation means in accordance with output signals of the first to third optical position detectors so that all of the first to third optical position detectors detect the circumference portion of the wafer at the same time, characterized in that the first to third optical position detectors are arranged on a circumference of a circle (45) having a diameter identical to that of the wafer.
Claim 3
Dependent Claim
86 words
A wafer positioning apparatus as claimed in claim 1, characterized in that the apparatus further comprises a fourth optical position detector (D) for detecting the circumference of the wafer, and the fourth optical position detector is arranged on the circumference of the circle (45), and in that the control means (50 - 58) controls the first to fourth optical position detectors so that any three optical position detectors out of the four optical position detectors detect the circumference portion of the wafer at the same time.
Claim 4
Dependent Claim
23 words
A wafer positioning apparatus as claimed in claim 2, characterized in that the first to fourth optical position detectors are equally spaced (8).
Claim 5
Dependent Claim
63 words
A wafer positioning apparatus as claimed in claim 3, characterized in that an angle (8) formed by lines connecting a center of the circle and neighboring optical position detectors is greater than an angle (φ) formed by lines connecting a center of the wafer and two ends of an orientation flat portion in which a crystal orientation of the wafer is kept flat.
Claim 6
Dependent Claim
61 words
A wafer positioning apparatus as claimed in claim 1, characterized in that the transportation means comprises a transportation robot (11) having an arm (21, 22, 23) which is extended and contracted and which is turned clockwise (CW) and counterclockwise (CCW), and in that the arm has a suction hole (24) at an end portion thereof for holding the wafer by suction.
References Cited (Backward Citations)
No citation records indexed.
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