Reflection type photomask and reflection type photolithography method comprising a concavo-convex surface

Claim 2

A photolithography method comprising the steps of: irradiating a light from a light source on a reflection type photomask which has a concavo-convex reflecting surface which includes a first region and a second region which have a relative height difference so that a light reflected from the first region and a light reflected from the second region have a predetermined phase difference caused by a difference in lengths of optical paths of the lights which reflect at the first and second regions; imaging the lights reflected from the first and second regions of the photomask onto a photoresist layer which is formed on a wafer by use of an optical system so as to develop a pattern on the photoresist layer; and developing the pattern on the photoresist layer depending on a light intensity of the light imaged thereon.

Claim 3

The photolithography method as claimed in claim 1, wherein the light from the light source is obtained via a mirror which reflects the light emitted from the light source, and the optical system includes a mirror which reflects and images the lights reflected from the first and second regions of the photomask onto the photoresist layer.

Claim 4

The photolithography method as claimed in claim 1, wherein the photomask includes a substrate which has a concavo-convex substrate surface, and a reflecting layer which is formed on the substrate surface and has a surface which forms the reflecting surface.

Claim 5

The photolithography method as claimed in claim 3, wherein the substrate is made of a material which is transparent with respect to the light which is irradiated on the reflecting surface.

Claim 6

The photolithography method as claimed in claim 4, wherein the first region includes a concave part formed in the substrate, and the reflecting layer is formed on the substrate surface excluding a central part of the concave part.

Claim 7

The photolithography method as claimed in claim 4, wherein the second region includes a convex part formed on the substrate, and the reflecting layer is formed on the substrate surface excluding a central part of the convex part.

Claim 8

The photolithography method as claimed in claim 1, wherein at least one of the first and second regions has such a width that an interference pattern generated by a light reflected at one end of the first and/or second region approximately overlaps an interference pattern generated by a light reflected at the other end of the first and/or second region on the photoresist layer.

Claim 9

The photolithography method as claimed in claim 1, wherein the photomask includes a substrate which has a concavo-convex substrate surface, a reflection preventing layer which is formed on the substrate surface and a reflecting layer which is formed on at least a part of the reflection preventing layer and has a surface which forms the reflecting surface.

Claim 10

The photolithography method as claimed in claim 8, wherein the substrate is made of a material which is transparent with respect to the light which is irradiated on said reflecting surface.

Claim 11

The photolithography method as claimed in claim 9, wherein the first region includes a concave part formed in the substrate, and the reflecting layer is formed on the reflection preventing layer excluding a central part of the concave part.

Claim 12

The photolithography method as claimed in claim 9, wherein the second region includes a convex part formed on the substrate, and the reflecting layer is formed on the reflection preventing layer excluding a central part of the convex part.

Claim 13

The photolithography method as claimed in claim 1, wherein the photomask further includes a third region formed in a central part of one of the first and second regions, said first and second regions having a large reflectivity compared to a reflectivity of said third region.

Claim 14

The photolithography method as claimed in claim 1, wherein the photomask includes a substrate which is made of a metal and has a concavo-convex substrate surface, and said reflecting surface is the substrate surface.

Claim 15

A photolithography method comprising the steps of: irradiating a light from a light source on a reflection type photomask which has a substrate having a concavo-convex substrate surface and a reflecting surface formed on at least part of the concavo-convex substrate surface and having a concavo-convex reflecting surface which includes a first region and a second region which have a relative height difference so that a light reflected from the first region and a light reflected from the second region have a predetermined phase difference caused by a difference in lengths of optical paths of the lights which reflect at the first and second regions; imaging the lights reflected from the first and second regions of the photomask onto a photoresist layer which is formed on a wafer by use of an optical system so as to develop a pattern on the photoresist layer; and developing the pattern on the photoresist layer depending on a light intensity of the light imaged thereon.

Claim 16

A photolithography method comprising the steps of: irradiating a light from a light source on a reflection type photomask which has a substrate having a concavo-convex substrate surface and a reflecting surface formed on at least part of the concavo-convex substrate surface and having a concavo-convex reflecting surface which includes a first region and a second region which have a relative height difference so that a light reflected from the first region and a light reflected from the second region have a predetermined phase difference caused by a difference in lengths of optical paths of the lights which reflect at the first and second regions; imaging the lights reflected from the first and second regions of the photomask onto a photoresist layer which is formed on a wafer by use of an optical system so as to develop a pattern on the photoresist layer; and developing the pattern on the photoresist layer depending on a light intensity of the light imaged thereon.