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US5336335A
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US
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Columnar-grained polycrystalline solar cell and process of manufacture
Assignee: Heritage Power LLC
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Filing: 1992-10-09
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Granted: 1994-08-09
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Expires: 2012-10-09
Abstract
Abstract The invention relates to techniques for manufacturing columnar-grained polycrystalline sheets which have particular utility as substrates or wafers for solar cells. The sheet is made by applying granular silicon to a setter material which supports the granular material. The setter material and granular silicon are subjected to a thermal profile all of which promote columnar growth by melting the silicon from the top downwardly. The thermal profile sequentially creates a melt region at the top of the granular silicon and then a growth region where both liquid and a growing polycrystalline sheet layer coexist. An annealing region is created where the temperature of the grown polycrystalline silicon sheet layer is controllably reduced to effect stress relief.
Inventors
- 👤 Robert B. Hall
- 👤 Allen M. Barnett
- 👤 Jacob E. Brown
- 👤 Joseph C. Checchi
- 👤 David H. Ford
- 👤 Christopher L. Kendall
- 👤 William P. Mulligan
- 👤 James A. Rand
- 👤 Todd R. Ruffins
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:36
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/128; H10F71/121; H10F71/1221; H10F77/00; H10F77/10; H10F77/16; H10F77/162; H10F77/164; H10F77/1642; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/546; Y02E10/547; Y02P; Y02P70/00; Y02P70/50; Y10; Y10S; Y10S148/00; Y10S148/122; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
265 words
A process of making an improved columnar-grained polycrystalline sheet for functioning as a substrate for a solar cell, comprising (a) applying granular silicon to a setter material having a release coating at its upper surface and which supports the granular silicon, (b) preheating the setter material and granular silicon in a preheat zone, (c) subjecting the setter material and granular silicon to a thermal profile which causes melting of the granular silicon from the top downwardly, wherein 25 to 90% of the granular silicon depth is melted and the partially melted silicon below the melted material functions as a net to stabilize the melt and to minimize molten silicon contact with the underlying setter material and release coating and to nucleate subsequent crystal growth, (d) transporting the melt pool on the silicon net into a growth zone wherein a thermal profile is created to promote columnar growth of a columnar grain size greater than 80 microns from the partially melted silicon net upward in a direction approximately perpendicular to the plane of the setter material and where both liquid and a growing polycrystalline layer coexist and impurities are segregated to the top surface of the sheet as well as gettered to the partially melted back surface, (e) transporting the grown sheet into an anneal zone wherein a linear temperature gradient along the direction of setter material motion is provided to promote low stress cooling of the sheet, (f) removing the polycrystalline sheet from the setter material, facilitated by a release agent, and (g) reusing the setter material for the making of further columnar-grained polycrystalline sheets.
Claim 2
Dependent Claim
265 words
A process of making an improved columnar-grained polycrystalline sheet for functioning as a substrate for a solar cell, comprising (a) applying granular silicon to a setter material having a release coating at its upper surface and which supports the granular silicon, (b) preheating the setter material and granular silicon in a preheat zone, (c) subjecting the setter material and granular silicon to a thermal profile which causes melting of the granular silicon from the top downwardly, wherein 25 to 90% of the granular silicon depth is melted and the partially melted silicon below the melted material functions as a net to stabilize the melt and to minimize molten silicon contact with the underlying setter material and release coating and to nucleate subsequent crystal growth, (d) transporting the melt pool on the silicon net into a growth zone wherein a thermal profile is created to promote columnar growth of a columnar grain size greater than 80 microns from the partially melted silicon net upward in a direction approximately perpendicular to the plane of the setter material and where both liquid and a growing polycrystalline layer coexist and impurities are segregated to the top surface of the sheet as well as gettered to the partially melted back surface, (e) transporting the grown sheet into an anneal zone wherein a linear temperature gradient along the direction of setter material motion is provided to promote low stress cooling of the sheet, (f) removing the polycrystalline sheet from the setter material, facilitated by a release agent, and (g) reusing the setter material for the making of further columnar-grained polycrystalline sheets.
Claim 3
Dependent Claim
31 words
The process of claim 1 including achievement of any or all of the preheat, melting, growth, and anneal thermal profiles for the granular silicon and resultant sheet by focused light energy.
Claim 4
Dependent Claim
30 words
The process of claim 1 including creating an electrical resistivity in the sheet layer in the range of 0.1 to 10 ohm-cm by adding separate constituents to the granular silicon.
Claim 5
Dependent Claim
28 words
The process of claim 1 including the use of granular silicon sized between 100 to 1000 micrometers, which has a purity between metallurgical grade and electronic grade silicon.
Claim 6
Dependent Claim
27 words
The process of claim 1 including stabilizing the outer edges of the melt zone by thermal shunts, or reduced energy intensity at the edge of the melt.
Claim 7
Dependent Claim
41 words
The process of claim 1 including forming nucleation sites in the setter material to commence growth by locally placing thermal shunts in the setter material to provide a thermal conduction path between the top and the bottom of the setter material.
Claim 8
Dependent Claim
32 words
The process of claim 1 wherein multi-grained or single crystal granular silicon is used to nucleate columnar grains having an average grain size of 0.2 to 1 mm in the subsequent sheet.
Claim 9
Dependent Claim
22 words
The process of claim 1 wherein the setter material is selected from the group consisting of quartz, silica, alumina, graphite, and SiC.
Claim 10
Dependent Claim
37 words
The process of claim 1 wherein the setter material is replaced by a thin belt material which supports the sheet during formation and thermal processing, and does not chemically interact with, or adhere to, the silicon material.
Claim 11
Dependent Claim
34 words
The process of claim 1 wherein the resulting silicon sheet has the characteristics of flatness, a smooth surface, minority carrier diffusion length greater than 40 microns, low residual stress, and relatively inactive grain boundaries.
Claim 12
Dependent Claim
26 words
The process of claim 1 including utilizing the sheet as a substrate for a solar cell by forming the additional solar cell layers on the substrate.
Claim 13
Dependent Claim
10 words
A solar cell made by the process of claim 11.
Claim 14
Dependent Claim
9 words
A substrate made by the process of claim 1.
Claim 15
Dependent Claim
49 words
The process of claim 1 wherein the partially melted silicon net and is replaced by a non-melting, non-reusable, thermal coefficient-matched substrate which is wetted by and stabilizes the molten silicon over-layer, nucleates subsequent growth, and serves as a supporting substrate during subsequent solar cell processing of the grown sheet.
Claim 16
Dependent Claim
26 words
The process of claim 14 including utilizing the sheet as a substrate for a solar cell by forming the additional solar cell layers on the substrate.
Claim 17
Dependent Claim
9 words
A substrate made by the process of claim 14.
Claim 18
Dependent Claim
10 words
A solar cell made by the process of claim 15.
Claim 19
Dependent Claim
12 words
The process of claim 14 wherein graphite is used as the substrate.
Claim 20
Dependent Claim
32 words
The process of claim 1 including achievement of any or all of the preheat, melting, growth, and anneal thermal profiles for the granular silicon and resultant sheet by graphite based heater technology.
Claim 21
Dependent Claim
281 words
A process of making an improved columnar-grained polycrystalline sheet for functioning as a substrate for a solar cell, comprising (a) applying a net to a setter material, (b) applying granular silicon to the setter material and the net whereby to support the granular silicon, (c) preheating the setter material and the net and the granular silicon in a preheat zone, (d) subjecting the setter material and the net and the granular silicon to a thermal profile which causes melting of the granular silicon from the top downwardly, wherein 25 to 90% of the granular silicon depth is melted and the partially melted silicon below the melted material functions as a nucleation site to nucleate subsequent crystal growth and the net functions to stabilize the melt and to minimize molten silicon contact with underlying setter and the net functions as a release coating, (e) transporting the melt pool on the net into a growth zone wherein a thermal profile is created to promote columnar growth of a columnar grain size greater than 80 microns from the partially melted silicon upward in a direction approximately perpendicular to the plane of the setter material and where both liquid and a growing polycrystalline layer coexist and impurities are segregated to the top surface of the sheet as well as gettered to the partially melted back surface, (f) transporting the grown sheet into an anneal zone wherein a linear temperature gradient along the direction of setter material motion is provided to promote low stress cooling of the sheet, (g) removing the polycrystalline sheet from the setter material, facilitated by a release agent, and (h) reusing the setter material for the making of further columnar-grained polycrystalline sheets.
Claim 22
Dependent Claim
281 words
A process of making an improved columnar-grained polycrystalline sheet for functioning as a substrate for a solar cell, comprising (a) applying a net to a setter material, (b) applying granular silicon to the setter material and the net whereby to support the granular silicon, (c) preheating the setter material and the net and the granular silicon in a preheat zone, (d) subjecting the setter material and the net and the granular silicon to a thermal profile which causes melting of the granular silicon from the top downwardly, wherein 25 to 90% of the granular silicon depth is melted and the partially melted silicon below the melted material functions as a nucleation site to nucleate subsequent crystal growth and the net functions to stabilize the melt and to minimize molten silicon contact with underlying setter and the net functions as a release coating, (e) transporting the melt pool on the net into a growth zone wherein a thermal profile is created to promote columnar growth of a columnar grain size greater than 80 microns from the partially melted silicon upward in a direction approximately perpendicular to the plane of the setter material and where both liquid and a growing polycrystalline layer coexist and impurities are segregated to the top surface of the sheet as well as gettered to the partially melted back surface, (f) transporting the grown sheet into an anneal zone wherein a linear temperature gradient along the direction of setter material motion is provided to promote low stress cooling of the sheet, (g) removing the polycrystalline sheet from the setter material, facilitated by a release agent, and (h) reusing the setter material for the making of further columnar-grained polycrystalline sheets.
Claim 23
Dependent Claim
14 words
The process of claim 20 wherein the net is made from a graphite material.
Claim 24
Dependent Claim
32 words
The process of claim 21 including achievement of any or all of the preheat, melting, growth, and anneal thermal profiles for the granular silicon and resultant sheet by graphite based heater technology.
Claim 25
Dependent Claim
13 words
The process of claim 20 wherein the net is made from silicon carbide.
Claim 26
Dependent Claim
32 words
The process of claim 20 including achievement of any or all of the preheat, melting, growth, and anneal thermal profiles for the granular silicon and resultant sheet by graphite based heater technology.
Claim 27
Dependent Claim
26 words
The process of claim 20 including utilizing the sheet as a substrate for a solar cell by forming the additional solar cell layers on the substrate.
Claim 28
Dependent Claim
10 words
A solar cell made by the process of claim 25.
Claim 29
Dependent Claim
9 words
A substrate made by the process of claim 20.
Claim 30
Dependent Claim
252 words
A process of making an improved columnar-grained polycrystalline sheet for functioning as a substrate for a solar cell, comprising (a) providing a layer of graphite material, (b) applying granular silicon to the graphite material whereby to support the granular silicon, (c) preheating the graphite material and the granular silicon in a preheat zone, (d) subjecting the graphite material and the granular silicon to a thermal profile which causes melting of the granular silicon from the top downwardly, wherein 25 to 90% of the granular silicon depth is melted and the partially melted silicon below the melted material functions as a nucleation site to nucleate subsequent crystal growth and the graphite material functions as a release coating, (e) transporting the melt pool on the graphite material into a growth zone wherein a thermal profile is created to promote columnar growth of a columnar grain size greater than 80 microns from the partially melted silicon upward in a direction approximately perpendicular to the plane of the graphite material and where both liquid and a growing polycrystalline layer coexist and impurities are segregated to the top surface of the sheet as well as gettered to the partially melted back surface, (f) transporting the grown sheet into an anneal zone wherein a linear temperature gradient along the direction of graphite material motion is provided achieved to promote low stress cooling of the sheet, (g) removing the polycrystalline sheet from the graphite material, and (h) reusing the graphite material for the making of further columnar-grained polycrystalline sheets.
Claim 31
Dependent Claim
252 words
A process of making an improved columnar-grained polycrystalline sheet for functioning as a substrate for a solar cell, comprising (a) providing a layer of graphite material, (b) applying granular silicon to the graphite material whereby to support the granular silicon, (c) preheating the graphite material and the granular silicon in a preheat zone, (d) subjecting the graphite material and the granular silicon to a thermal profile which causes melting of the granular silicon from the top downwardly, wherein 25 to 90% of the granular silicon depth is melted and the partially melted silicon below the melted material functions as a nucleation site to nucleate subsequent crystal growth and the graphite material functions as a release coating, (e) transporting the melt pool on the graphite material into a growth zone wherein a thermal profile is created to promote columnar growth of a columnar grain size greater than 80 microns from the partially melted silicon upward in a direction approximately perpendicular to the plane of the graphite material and where both liquid and a growing polycrystalline layer coexist and impurities are segregated to the top surface of the sheet as well as gettered to the partially melted back surface, (f) transporting the grown sheet into an anneal zone wherein a linear temperature gradient along the direction of graphite material motion is provided achieved to promote low stress cooling of the sheet, (g) removing the polycrystalline sheet from the graphite material, and (h) reusing the graphite material for the making of further columnar-grained polycrystalline sheets.
Claim 32
Dependent Claim
26 words
The process of claim 28 including utilizing the sheet as a substrate for a solar cell by forming the additional solar cell layers on the substrate.
Claim 33
Dependent Claim
10 words
A solar cell made by the process of claim 29.
Claim 34
Dependent Claim
9 words
A substrate made by the process of claim 28.
References Cited (Backward Citations)
US3953876A
Cited
DE3536743A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-08 | 1998-02-07 | 1998-08-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-08 | 2002-02-07 | 2002-08-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-08 | 2006-02-07 | 2006-08-09 | $7700.00 | Window Closed / Lapsed |