US5334487A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for forming a patterned layer on a substrate
Assignee: International Business Machines Corp
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Filing: 1992-07-23
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Granted: 1994-08-02
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Expires: 2012-07-23
Abstract
Abstract The present invention provides a method of forming a pattern of conductive material on dielectric material with access openings or vias through said dielectric material and such a structure. A sheet of conductive material, which is to be circuitized, is provided with a layer of a first photoimageable dielectric material on one face thereof. A layer of a second photoimageable material, such as a conventional photoresist material, is provided on the opposite face of the conductive material. The layer of said first photoimageable material is selected such that it will not be developed by the developer that develops the layer of said second material. The two layers of photoimageable material are pattern-wise exposed to radiation. The second layer of material is developed and the revealed underlying conductive material is etched to form the desired circuit pattern. The first layer is then developed to form openings or vias communicating with the circuit pattern, and these are then filled with a conductive material such as solder.
Inventors
- 👤 Thomas E. Kindl
- 👤 Ronald J. Moore
- 👤 Paul G. Rickerl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 14:08
CPC Classifications
H; H05; H05K; H05K1/00; H05K1/02; H05K1/11; H05K1/111; H05K1/112; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/095; G03F7/0957; G03F7/20; G03F7/2022; H05K3/00; H05K3/0011; H05K3/0017; H05K3/0023; H05K1/03; H05K1/0393; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0355; H05K2201/0388; H05K2201/0394; H05K2201/09; H05K2201/09209; H05K2201/09372; H05K2201/09472; H05K2203/00; H05K2203/04; H05K2203/041; H05K3/02; H05K3/06; H05K3/061; H05K3/064; H05K3/30; H05K3/32; H05K3/34; H05K3/3465; H05K3/3478
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
284 words
A method of forming a pattern of conductive material on a dielectric material with a plurality of access openings through said dielectric material communicating with the conductive material comprising the steps of: providing a sheet of conductive material which is to be patterned; providing a layer of a first photoimageable material on one face of said conductive material; providing a layer of a second photoimageable material on the other face of said conductive material; said layer of said first photoimageable material being a dielectric film forming material; the material of said layer of said first photoimageable material being developable by a developer which will not develop said second photoimageable material; imagewise patterning said layers of first and second photoimageable materials, said layer of said second photoimageable material being imaged in the pattern to be formed in said conductive material, said layer of said first photoimageable material being imaged in the pattern of the access openings to be formed in the first photoimageable material which will communicate with the conductive material; thereafter, developing said layer of said second photoimageable material to reveal the underlying conductive material; etching the revealed underlying conductive material to form a selected pattern therein with an etch media that will not substantially alter said layer of said first photoimageable material; developing said layer of said first photoimageable material to form a plurality of openings through said layer of first photoimageable material; whereby a pattern of conducting material is formed on a dielectric material with openings extending through said dielectric material to said patterned conductive material; and thereafter providing electrically conducting material in said access openings to thereby form discrete conductors in said access openings communicating with said pattern of conductive material.
Claim 2
Independent Claim
284 words
A method of forming a pattern of conductive material on a dielectric material with a plurality of access openings through said dielectric material communicating with the conductive material comprising the steps of: providing a sheet of conductive material which is to be patterned; providing a layer of a first photoimageable material on one face of said conductive material; providing a layer of a second photoimageable material on the other face of said conductive material; said layer of said first photoimageable material being a dielectric film forming material; the material of said layer of said first photoimageable material being developable by a developer which will not develop said second photoimageable material; imagewise patterning said layers of first and second photoimageable materials, said layer of said second photoimageable material being imaged in the pattern to be formed in said conductive material, said layer of said first photoimageable material being imaged in the pattern of the access openings to be formed in the first photoimageable material which will communicate with the conductive material; thereafter, developing said layer of said second photoimageable material to reveal the underlying conductive material; etching the revealed underlying conductive material to form a selected pattern therein with an etch media that will not substantially alter said layer of said first photoimageable material; developing said layer of said first photoimageable material to form a plurality of openings through said layer of first photoimageable material; whereby a pattern of conducting material is formed on a dielectric material with openings extending through said dielectric material to said patterned conductive material; and thereafter providing electrically conducting material in said access openings to thereby form discrete conductors in said access openings communicating with said pattern of conductive material.
Claim 3
Dependent Claim
23 words
The method as defined in claim 1 wherein the dielectric material is a solder resistant material, and the electrically conductive material is solder.
Claim 4
Dependent Claim
16 words
The method as defined in claim 1 wherein said layer of dielectric material is an epoxy.
Claim 5
Dependent Claim
17 words
The method as defined in claim 1 wherein said layer of second photoimageable material is a photoresist.
Claim 6
Dependent Claim
21 words
The method as defined in claim 4 wherein said layer of said second photoresist material is applied as a dry film.
Claim 7
Dependent Claim
17 words
The method as defined in claim 3 wherein said dielectric material is an epoxy solder resistant material.
Claim 8
Dependent Claim
28 words
The method as defined in claim 1 further characterized by removing the remainder of the layer of said second photoresist material remaining after etching of the conductive material.
Claim 9
Dependent Claim
17 words
The method as defined in claim 1 wherein the conductive material is copper or a copper alloy.
Claim 10
Independent Claim
296 words
A method of forming a pattern of conductive material on a dielectric material with a plurality of access openings through said dielectric material communicating with the conductive material comprising the steps of: providing a sheet of conductive material which is to be patterned; providing a layer of a first photoimageable material on one face of said conductive material; providing a layer of a second photoimageable material on the other face of said conductive material; said layer of said first photoimageable material being a dielectric film forming material; the material of one of said layers of material being developable by a developer which will not develop the other layer of said material; imagewise patterning said first and second layers of photoimageable material, said layer of said second photoimageable material being imaged in the pattern to be formed in said conductive material, said layer of said first photoimageable material being imaged in the pattern of the through openings to be formed in the first photoimageable material; developing said layer of the second photoimageable material to reveal the underlying conductive material; developing said layer of the first photoimageable material to form openings through said layer of first photoimageable material; said process being further characterized by etching the conductive material revealed upon developing of said layer of said second photoimageable material with an etch media that will not substantially alter said layer of said first photoimageable material, said etching taking place before the layer of first photoimageable material is developed; whereby a pattern of conducting material is formed on a dielectric material with openings extending through said dielectric material to said patterned conductive material; and thereafter providing electrically conducting material in said access openings to thereby form discrete conductors in said access openings communicating with said pattern of conductive material.
Claim 11
Independent Claim
296 words
A method of forming a pattern of conductive material on a dielectric material with a plurality of access openings through said dielectric material communicating with the conductive material comprising the steps of: providing a sheet of conductive material which is to be patterned; providing a layer of a first photoimageable material on one face of said conductive material; providing a layer of a second photoimageable material on the other face of said conductive material; said layer of said first photoimageable material being a dielectric film forming material; the material of one of said layers of material being developable by a developer which will not develop the other layer of said material; imagewise patterning said first and second layers of photoimageable material, said layer of said second photoimageable material being imaged in the pattern to be formed in said conductive material, said layer of said first photoimageable material being imaged in the pattern of the through openings to be formed in the first photoimageable material; developing said layer of the second photoimageable material to reveal the underlying conductive material; developing said layer of the first photoimageable material to form openings through said layer of first photoimageable material; said process being further characterized by etching the conductive material revealed upon developing of said layer of said second photoimageable material with an etch media that will not substantially alter said layer of said first photoimageable material, said etching taking place before the layer of first photoimageable material is developed; whereby a pattern of conducting material is formed on a dielectric material with openings extending through said dielectric material to said patterned conductive material; and thereafter providing electrically conducting material in said access openings to thereby form discrete conductors in said access openings communicating with said pattern of conductive material.
Claim 12
Dependent Claim
16 words
The method as defined in claim 9 wherein said solder resistant dielectric material is an epoxy.
Claim 13
Dependent Claim
22 words
The method as defined in claim 9 wherein said first photoimageable material is solder resistant and said electrical conducting material is solder.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-01 | 1998-01-31 | 1998-08-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-01 | 2002-01-31 | 2002-08-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-01 | 2006-01-31 | 2006-08-02 | $7700.00 | Window Closed / Lapsed |