US5332911A — Semiconductor component with adiabatic transport …

Claim 1

Independent Claim 93 words

Semiconductor radiation detector having a layered construction and comprising a conductive region having a two-dimensional or quasi one-dimensional electron or hole gas in which an adiabatic transport takes place at least regionally in edge channels, and with at least two contacts to the conductive region, wherein the transport in the edge channels is disturbed by interaction with the electromagnetic radiation to be detected so that an increase of the scattering rate between the edge channels is caused to change the resistance measurable between the contacts, and means for detecting the change in resistance.

Claim 2

Dependent Claim 93 words

Semiconductor radiation detector having a layered construction and comprising a conductive region having a two-dimensional or quasi one-dimensional electron or hole gas in which an adiabatic transport takes place at least regionally in edge channels, and with at least two contacts to the conductive region, wherein the transport in the edge channels is disturbed by interaction with the electromagnetic radiation to be detected so that an increase of the scattering rate between the edge channels is caused to change the resistance measurable between the contacts, and means for detecting the change in resistance.

Claim 3

Dependent Claim 58 words

Semiconductor radiation detector in accordance with claim 1, including means for generating a magnetic field which has at least one component which can be applied perpendicular to the electron or hole gas, i.e. to the layers, wherein the magnetic field brings about a reduction of the scattering between the edge channels in the non-irradiated state of the detector.

Claim 4

Dependent Claim 33 words

Semiconductor radiation detector in accordance with claim 2, wherein the component of the magnetic field has a predetermined strength in the range of up to approximately 15 Tesla, in particular approximately 3 Tesla.

Claim 5

Dependent Claim 18 words

Semiconductor radiation detector in accordance with claim 2, including means for changing the strength of the magnetic field.

Claim 6

Dependent Claim 19 words

Semiconductor radiation detector in accordance with claim 2, wherein the means for generating the magnetic field is a coil.

Claim 7

Dependent Claim 64 words

Semiconductor radiation detector in accordance with claim 1, wherein said contacts are formed by first and second contacts which are provided spaced apart from one another at respective ends of the conductive region, and wherein at least one gate electrode is provided which is arranged between the first and the second contact and which covers the conductive region over a part of its length.

Claim 8

Dependent Claim 43 words

Semiconductor radiation detector in accordance with claim 6, wherein a second gate electrode is provided which, at a spacing from a first gate electrode, covers the conductive region over a further part of its length, the adiabatic transport being realized between the gates.

Claim 9

Dependent Claim 17 words

Semiconductor radiation detector in accordance with claim 7, wherein at least one further gate electrode is provided.

Claim 10

Dependent Claim 34 words

Semiconductor radiation detector in accordance with claim 8, wherein the gate electrodes form a periodically applied gate structure which serves as a grid coupler and brings about a change of resistance through magnetoplasmon coupling.

Claim 11

Dependent Claim 30 words

Semiconductor radiation detector in accordance with claim 1, wherein an additional gate electrode is provided on a lower side of the detector to which a variable potential can be applied.

Claim 12

Dependent Claim 19 words

Semiconductor radiation detector in accordance with claim 6, including means for applying a predeterminable potential to the gate electrode.

Claim 13

Dependent Claim 28 words

Semiconductor radiation detector in accordance with claim 1, wherein two further contacts are provided for carrying out a known 4-point measurement of the resistance of the conductive region.

Claim 14

Dependent Claim 29 words

Semiconductor radiation detector in accordance with claim 1, including a layout adapted for the execution of a Hall measurement for the determination of the resistance of the conductive region.

Claim 15

Dependent Claim 16 words

Semiconductor radiation detector in accordance with claim 1, wherein several detectors are provided on a chip.

Claim 16

Dependent Claim 93 words

Semiconductor radiation detector in accordance with claim 1, wherein a plurality of gate electrodes are provided at intervals over said conductive region to form a gate structure, wherein a plurality of radiation detectors are provided on a chip, and wherein individual detectors are laid out for detecting radiations of different wavelength, for example through the use of at least one of gate structures with different dimensions, gate structures with different periodicity, by the application of different gate potentials, by the application of different magnetic fields and through the use of non-homogeneous magnetic fields.

Claim 17

Dependent Claim 22 words

Semiconductor radiation detector in accordance with claim 14, wherein the means for carrying out the resistance measurement is integrated on the chip.

Claim 18

Dependent Claim 22 words

Semiconductor radiation detector in accordance with claim 14, wherein a coil for generating a magnetic field is also integrated on the chip.

Claim 19

Dependent Claim 23 words

Semiconductor radiation detector in accordance with claim 1, wherein it is housed in a cryostat which maintains the working temperature below 4° K.

Claim 20

Dependent Claim 24 words

Semiconductor radiation detector in accordance with claim 1, including a window which permits access for the radiation to be measured to the conductive region.

Claim 21

Dependent Claim 164 words

Semiconductor radiation detector in accordance with claim 1, comprising the following layer build-up: a buffer layer arrangement and an intrinsic GaAs layer with a thickness in the μm-range are first grown on a GaAs substrate by epitaxy, an undoped Al x Ga 1-x As-spacer with a layer thickness in the 100Å- range is grown onto the intrinsic undoped GaAs layer, followed by a further layer of the same material but with an impurity doping having a three-dimensional concentration of 2-7×10 18 cm -3 , in the form of one of a homogeneous doping and a delta doping, wherein a cover layer of undoped GaAs is grown onto this doped layer, and contacts to the two-dimensional electron gas and also to gate electrodes are produced following photolithographic delimitation of the conductive region, in which the undesired regions are removed to a level beneath the two-dimensional electron gas which forms in the boundary region between the undoped GaAs layer and the Al x Ga 1-x As-spacer.

Claim 22

Dependent Claim 30 words

Semiconductor radiation detector in accordance with claim 1, including a conductive region having a quasi one-dimensional electron or hole gas, with the detector being operated without an applied magnetic field.

Claim 23

Dependent Claim 25 words

Semiconductor radiation detector in accordance with claim 6, wherein a single, centrally arranged gate electrode is provided and is executed as a semi-transparent gate electrode.

Claim 24

Dependent Claim 176 words

Semiconductor radiation detector in accordance with claim 22, wherein a gate electrode is made impermeable to light; wherein the semiconductor is etched away in the central part of a conductive region of the semiconductor in order to provide an aperture in the two-dimensional electron or hole gas; wherein a third contact is provided in addition to the first and second contacts, with the third contact being executed to the central region of the two-dimensional electron or hole gas and preferably partly extending around a part of the periphery of the said aperture; and wherein the gate electrode has a keyhole, the dimensions of which are larger than the dimensions of the third contact, with this gate electrode overlapping an end part of the first said aperture so that the aperture extends from the third contact through a free space between this third contact and the keyhole up to and beneath the gate electrode, with the transverse dimensions of the third contact transverse to the conductive region being smaller than the transverse dimensions of the conductive region.

Claim 25

Dependent Claim 63 words

Semiconductor radiation detector in accordance with claim 12, wherein the first contact and the second contact are arranged at opposite ends of a strip-like conductive region from which two limbs branch off which lead to third and fourth contacts, with a gate electrode being provided which partly overlaps the conductive region and the two limbs and is realized as a semi-transparent top gate.

Claim 26

Dependent Claim 92 words

Semiconductor radiation detector in accordance with claim 12, wherein the first contact and the second contact are arranged at opposite ends of a strip-like conductive region from which two limbs branch off which lead to third and fourth contacts, with a gate electrode being provided which partly overlaps the conductive region and the two limbs; and wherein the gate electrode is realized as a back gate, for example in that the semiconductor is ground away from the substrate side and is bonded by means of a conductive silver onto a gold layer.

Claim 27

Dependent Claim 70 words

Semiconductor component for detecting electromagnetic radiation, comprising: a charge carrier layer configured to permit adiabatic transport in edge channels in the absence of electromagnetic radiation, wherein electromagnetic radiation incident on said charge carrier layer disturbs said adiabatic transport and causes an increased rate of scattering between said edge channels; and means for detecting said increased rate of scattering and hence said electromagnetic radiation by the resulting change in electrical resistance.

Claim 28

Dependent Claim 70 words

Semiconductor component for detecting electromagnetic radiation, comprising: a charge carrier layer configured to permit adiabatic transport in edge channels in the absence of electromagnetic radiation, wherein electromagnetic radiation incident on said charge carrier layer disturbs said adiabatic transport and causes an increased rate of scattering between said edge channels; and means for detecting said increased rate of scattering and hence said electromagnetic radiation by the resulting change in electrical resistance.

Claim 29

Dependent Claim 64 words

Semiconductor component for detecting electromagnetic radiation, comprising: a charge carrier layer configured to permit adiabatic transport in edge channels in the absence of electromagnetic radiation, wherein electromagnetic radiation incident on said charge carrier layer disturbs said adiabatic transport and causes an increased rate of scattering between said edge channels; and means for electrically detecting said increased rate of scattering and hence said electromagnetic radiation.

Claim 30

Dependent Claim 64 words

Semiconductor component for detecting electromagnetic radiation, comprising: a charge carrier layer configured to permit adiabatic transport in edge channels in the absence of electromagnetic radiation, wherein electromagnetic radiation incident on said charge carrier layer disturbs said adiabatic transport and causes an increased rate of scattering between said edge channels; and means for electrically detecting said increased rate of scattering and hence said electromagnetic radiation.

Claim 31

Dependent Claim 23 words

Semiconductor radiation detector in accordance with claim 1, wherein it is housed in a cryostat which maintains the working temperature below 2° K.

Claim 32

Dependent Claim 22 words

Semiconductor radiation detector according to claim 28 wherein it is housed in a cryostat which maintains the working temperature at 1.3° K.

Claim 33

Dependent Claim 21 words

Semiconductor radiation detector in accordance with claim 2, including means for changing the strength of said component of said magnetic field.

Claim 34

Dependent Claim 37 words

Semiconductor radiation detector in accordance with claim 2, wherein the conductive region of the detector lies transverse to the axis of said coil in a direct vicinity of said coil, and thus in a homogeneous magnetic field.

Claim 35

Dependent Claim 15 words

Semiconductor radiation detector in accordance with claim 5, wherein said coil is a superconducting coil.

Claim 36

Dependent Claim 24 words

Semiconductor radiation detector in accordance with claim 8, including several further gate electrodes arranged at regular intervals over the length of said conductive region.

Claim 37

Dependent Claim 17 words

Semiconductor radiation detector in accordance with claim 33, wherein said further gate electrodes have the same potential.

Claim 38

Dependent Claim 23 words

Semiconductor radiation detector in accordance with claim 33, including means for applying a predeterminable potential to at least one of said gate electrodes.

Claim 39

Dependent Claim 19 words

Semiconductor radiation detector in accordance with claim 9, including means for applying a predeterminable potential to said gate structure.

Claim 40

Dependent Claim 19 words

Semiconductor radiation detector in accordance with claim 14, wherein means for applying control potentials is integrated on said chip.

Claim 41

Dependent Claim 19 words

Semiconductor radiation detector in accordance with claim 17, wherein said coil is in the form of a superconducting loop.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1997-07-25	1998-01-24	1998-07-26	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2001-07-25	2002-01-24	2002-07-26	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2005-07-25	2006-01-24	2006-07-26	$7700.00	Window Closed / Lapsed

Semiconductor component with adiabatic transport in edge channels

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