High temperature ceramic nut

Claim 1

In combination, a ceramic nut, a flared tube and a configured male threaded member secured together for high temperature fluid applications in semiconductor processing applications, comprising: a. a flared tube with a portion having a first diameter and a flared axially extending portion having a second diameter larger than said first diameter; b. a male fitting including a cylindrical portion of the diameter of said flared second diameter portion of said flared tube and a threaded portion and an end terminating said cylindrical portion; c. a ceramic nut including a body, a top surface and a bottom surface; d. a generally inner threaded lower interior portion of said nut threadedly receiving said threaded portion; e. a hole in said top surface of said nut; and, f. a geometrically configured inner upper portion of said nut having a cylindrical inner surface extending from adjacent said hole to said inner threaded portion and of a diameter slightly smaller than said inner threaded lower interior portion and of a diameter larger than said hole receiving said flared axially extending cylindrical portion and engaging said flared tube over said cylindrical shaped portion of said male threaded member and said first diameter portion sealingly against said end.