US5331236A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microdynamic devices fabricated on silicon-on-sapphire substrates
Assignee: United States Department of the Navy
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Filing: 1992-08-19
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Granted: 1994-07-19
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Expires: 2012-08-19
Abstract
Abstract Silicon-on-sapphire substrates are provided for the fabrication of micromechanical devices, such as micromotors. The high voltage stand-off characteristics of silicon-on-sapphire thereby provides for the construction of superior electrostatically driven devices and sensors capable of being driven at significantly higher applied potentials since silicon-on-sapphire has demonstrated a capability for building in the range of hundreds of Angstroms, or thick, in the range of microns very high speed, low power, very densely packed integrated circuits using standard silicon processing techniques. As a consequence, the electrostatically driven devices, micromotors, can be incorporated in the integrated circuits and yet be powered at elevated voltages to increase their work potential.
Inventors
- 👤 Douglas A. Sexton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 22:41
CPC Classifications
H; H02; H02N; H02N1/00; H02N1/002; H02N1/004; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49009; Y10T29/49012
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
32 words
An improved micromotor capable of being driven at increased driving potentials comprising: a silicon-on-sapphire substrate; and micromotor constituents fabricated on said silicon-on-sapphire substrate to assure said being driven at increased driving potentials.
Claim 2
Dependent Claim
32 words
An improved micromotor capable of being driven at increased driving potentials comprising: a silicon-on-sapphire substrate; and micromotor constituents fabricated on said silicon-on-sapphire substrate to assure said being driven at increased driving potentials.
Claim 3
Dependent Claim
32 words
An improved micromotor according to claim 1 in which said silicon-on-sapphire substrate is provided in a thickness in the range of hundreds of Angstroms, and, optionally, thicker, in the range of microns.
Claim 4
Dependent Claim
26 words
An improved micromotor according to claim 1 in which said micromotor constituents on said silicon-on-sapphire substrate can be driven at potentials of at least 3000 volts.
Claim 5
Independent Claim
37 words
A method of fabricated an improved micromotor to provide a capability for being driven at higher potentials that silicon substrate components comprising: providing a silicon-on-sapphire substrate; and fabricating the constituents of a micromotor on said silicon-on-sapphire substrate.
Claim 6
Independent Claim
37 words
A method of fabricated an improved micromotor to provide a capability for being driven at higher potentials that silicon substrate components comprising: providing a silicon-on-sapphire substrate; and fabricating the constituents of a micromotor on said silicon-on-sapphire substrate.
Claim 7
Dependent Claim
38 words
A method of fabricated an improved micromotor according to claim 4 in which said providing of said silicon-on-sapphire substrate is in a thickness in the range of hundreds of Angstroms, and, optionally, thicker, in the range of microns.
Claim 8
Dependent Claim
26 words
A method according to claim 5 in which said providing of said silicon-on-sapphire substrate permits driving said improved micromotor at potentials in excess of 1000 volts.
Claim 9
Dependent Claim
26 words
A method according to claim 5 in which said providing of said silicon-on-sapphire substrate permits driving said improved micromotor at potentials of at least 3000 volts.
References Cited (Backward Citations)
US4579750A
Cited
US4754185A
Cited
US4895500A
Cited
US4893509A
Cited
US5095401A
Cited
US5101256A
Cited
US5072288A
Cited
US5013954A
Cited
US5043043A
Cited
US5093594A
Cited
US5177595A
Cited
US5206983A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-18 | 1998-01-17 | 1998-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-18 | 2002-01-17 | 2002-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-18 | 2006-01-17 | 2006-07-19 | $7700.00 | Window Closed / Lapsed |