US5330793A
Expired / Lapsed
US
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Metallo-organic precursors to titanium nitride
Assignee: Visteon Global Technologies Inc
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Filing: 1992-11-05
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Granted: 1994-07-19
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Expires: 2012-11-05
Abstract
Abstract A titanium tetrahalide is reacted with a primary alkyl or aryl amine to prepare a metallo-organic precursor, which thereafter may be volatilized to form a gaseous chemical vapor deposition precursor to titanium nitride, or may be pyrolyzed to form bulk titanium nitride.
Inventors
- 👤 Charles H. Winter
- 👤 Tilak S. Lewkebandara
- 👤 James W. Proscia
- 👤 Philip H. Sheridan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:28
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/22; C03C17/225; C01; C01B; C01B21/00; C01B21/06; C01B21/076; C01B21/0763; C07; C07F; C07F7/00; C07F7/003; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34; C03C2217/00; C03C2217/20; C03C2217/28; C03C2217/281; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/152
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
75 words
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of: A) heating a metallo-organic precursor of the formula: (Cl.sub.2 TiNR).sub.2, wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms, to prepare a gaseous precursor; and B) directing the gaseous precursor against the surface of the substrate at a temperature sufficient to deposit a coating of titanium nitride thereon.
Claim 2
Dependent Claim
75 words
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of: A) heating a metallo-organic precursor of the formula: (Cl.sub.2 TiNR).sub.2, wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms, to prepare a gaseous precursor; and B) directing the gaseous precursor against the surface of the substrate at a temperature sufficient to deposit a coating of titanium nitride thereon.
Claim 3
Dependent Claim
23 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 1, wherein R is t-butyl.
Claim 4
Dependent Claim
36 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 1, wherein the metallo-organic precursor is heated to a temperature from about 25° C. to about 500° C.
Claim 5
Dependent Claim
38 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 1, wherein step A is conducted at a pressure from about 10 -9 mm Hg to about 760 mm Hg.
Claim 6
Dependent Claim
42 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 1, wherein the gaseous precursor is directed against the surface of the substrate at a temperature from about 100° C. to about 2,000° C.
Claim 7
Dependent Claim
106 words
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of: A) heating a metallo-organic precursor of the formula: (Cl.sub.2 TiNR).sub.2, wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms, to a temperature from about 100° C. to about 3000° C., at a pressure from about 0.01 mm Hg to about 0.1 mm Hg, to prepare a gaseous precursor; and B) directing the gaseous precursor against the surface of the substrate at a temperature from about 300° C. to about 600° C. to deposit a coating of titanium nitride thereon.
Claim 8
Dependent Claim
106 words
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of: A) heating a metallo-organic precursor of the formula: (Cl.sub.2 TiNR).sub.2, wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms, to a temperature from about 100° C. to about 3000° C., at a pressure from about 0.01 mm Hg to about 0.1 mm Hg, to prepare a gaseous precursor; and B) directing the gaseous precursor against the surface of the substrate at a temperature from about 300° C. to about 600° C. to deposit a coating of titanium nitride thereon.
Claim 9
Dependent Claim
23 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 6, wherein R is t-butyl.
Claim 10
Dependent Claim
114 words
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of: A) contacting a titanium tetrahalide with a primary alkyl or aryl amine, to prepare an intermediate metallo-organic compound; B) heating the intermediate metallo-organic compound to a temperature and for a period of time sufficient to prepare a metallo-organic precursor of the formula: (Cl.sub.2 TiNR).sub.2, wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms; C) heating the metallo-organic precursor to prepare a gaseous precursor; and D) directing the gaseous precursor against the surface of the substrate at a temperature sufficient to deposit a coating of titanium nitride thereon.
Claim 11
Dependent Claim
114 words
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of: A) contacting a titanium tetrahalide with a primary alkyl or aryl amine, to prepare an intermediate metallo-organic compound; B) heating the intermediate metallo-organic compound to a temperature and for a period of time sufficient to prepare a metallo-organic precursor of the formula: (Cl.sub.2 TiNR).sub.2, wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms; C) heating the metallo-organic precursor to prepare a gaseous precursor; and D) directing the gaseous precursor against the surface of the substrate at a temperature sufficient to deposit a coating of titanium nitride thereon.
Claim 12
Dependent Claim
26 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein the titanium tetrahalide is titanium tetrachloride.
Claim 13
Dependent Claim
25 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein the primary amine is t-butylamine.
Claim 14
Dependent Claim
30 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein step A is conducted in the presence of a solvent.
Claim 15
Dependent Claim
36 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein the titanium tetrahalide is contacted with at least about 6 stoichiometric equivalents of the primary amine.
Claim 16
Dependent Claim
40 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein the titanium tetrahalide is contacted with the primary amine at a temperature from about -100° C. to about 200° C.
Claim 17
Dependent Claim
37 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein the intermediate metallo-organic compound is heated to a temperature from about 100° C. to about 500° C.
Claim 18
Dependent Claim
39 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein step B is carried out at a pressure from about 10 -9 mm Hg to about 760 mm Hg.
Claim 19
Dependent Claim
23 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein R is t-butyl.
Claim 20
Dependent Claim
36 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein the metallo-organic precursor is heated to a temperature from about 25° C. to about 500° C.
Claim 21
Dependent Claim
38 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein step C is conducted at a pressure from about 10 -9 mm Hg to about 760 mm Hg.
Claim 22
Dependent Claim
42 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 8, wherein the gaseous precursor is directed against the surface of the substrate at a temperature from about 100° C. to about 2,000° C.
Claim 23
Dependent Claim
190 words
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of: A) contacting a titanium tetrahalide with at least about 6 stoichiometric equivalents of a primary alkyl or aryl amine, optionally in the presence of a solvent, at a temperature from about -80° C. to about 25° C. to prepare an intermediate metallo-organic compound; B) heating the intermediate metallo-organic compound to a temperature from about 180° C. to about 300° C., at a pressure from about 0.01 mm Hg to about 0.1 mm Hg, for a period of time sufficient to prepare a metallo-organic precursor of the formula: [Cl.sub.2 TiNR].sub.2, wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms; C) heating the metallo-organic precursor to a temperature from about 100° C. to about 300° C., at a pressure from about 0.01 mm Hg to about 0.1 mm Hg, to prepare a gaseous precursor; and D) directing the gaseous precursor against the surface of the substrate at a temperature from about 300° C. to about 600° C. to deposit a coating of titanium nitride thereon.
Claim 24
Dependent Claim
190 words
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of: A) contacting a titanium tetrahalide with at least about 6 stoichiometric equivalents of a primary alkyl or aryl amine, optionally in the presence of a solvent, at a temperature from about -80° C. to about 25° C. to prepare an intermediate metallo-organic compound; B) heating the intermediate metallo-organic compound to a temperature from about 180° C. to about 300° C., at a pressure from about 0.01 mm Hg to about 0.1 mm Hg, for a period of time sufficient to prepare a metallo-organic precursor of the formula: [Cl.sub.2 TiNR].sub.2, wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms; C) heating the metallo-organic precursor to a temperature from about 100° C. to about 300° C., at a pressure from about 0.01 mm Hg to about 0.1 mm Hg, to prepare a gaseous precursor; and D) directing the gaseous precursor against the surface of the substrate at a temperature from about 300° C. to about 600° C. to deposit a coating of titanium nitride thereon.
Claim 25
Dependent Claim
26 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 20, wherein the titanium tetrahalide is titanium tetrachloride.
Claim 26
Dependent Claim
25 words
The process for depositing a coating of titanium nitride on a surface of a substrate according to claim 20, wherein the primary amine is t-butylamine.
References Cited (Backward Citations)
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