US5330628A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Collimated deposition apparatus and method
Assignee: Novellus Systems Inc
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Filing: 1991-10-23
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Granted: 1994-07-19
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Expires: 2011-10-23
Abstract
Abstract Sputtering apparatus and method which are particularly suitable for forming step coatings. A workpiece is supported in a chamber, particles are emitted from a sputter source in a substantially uniform manner throughout an area of greater lateral extent than the workpiece, the pressure within the chamber is maintained at a level which is sufficiently low to prevent substantial scattering of the particles between the source and the workpiece, and the particles are passed through a collimating filter having a plurality of transmissive cells with a length to diameter ratio on the order of 1:1 to 3:1 positioned between the source and the workpiece to limit the angles at which the particles can impinge upon the workpiece.
Inventors
- 👤 R. Ernest Demaray
- 👤 Vance E. Hoffman
- 👤 John C. Helmer
- 👤 Young H. Park
- 👤 Ronald R. Cochran
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 21:56
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3447; C; C23; C23C; C23C14/00; C23C14/04; C23C14/046; C23C14/22; C23C14/34; C23C14/35; H01J37/3402; H01J37/3405; H01J37/3408; H01J37/345; H01J37/3455; H01J37/3488; H01J37/3494; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/332; H01J2237/3322; H01J2237/3327
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
177 words
Sputtering apparatus for depositing a step coating on a workpiece comprising: a chamber, means for supporting the workpiece in the chamber in a stationary position, a sputter source having means for emitting particles substantially uniformly throughout an area of greater lateral extend than the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, a particle collimating filter having a plurality of transmissive cells with a length to diameter ratio defining an aspect ratio in the range of 1:1 to 3:1 positioned between the source and the workpiece for limiting the angles of incidence at which the particles can impinge upon the workpiece, means for maintaining a pressure within the chamber at a level which is sufficiently low to prevent substantial scattering of the particles between the collimating filter and the workpiece, and means for moving the collimating filter in a direction parallel to the source and the workpiece as the coating builds up on the workpiece.
Claim 2
Dependent Claim
177 words
Sputtering apparatus for depositing a step coating on a workpiece comprising: a chamber, means for supporting the workpiece in the chamber in a stationary position, a sputter source having means for emitting particles substantially uniformly throughout an area of greater lateral extend than the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, a particle collimating filter having a plurality of transmissive cells with a length to diameter ratio defining an aspect ratio in the range of 1:1 to 3:1 positioned between the source and the workpiece for limiting the angles of incidence at which the particles can impinge upon the workpiece, means for maintaining a pressure within the chamber at a level which is sufficiently low to prevent substantial scattering of the particles between the collimating filter and the workpiece, and means for moving the collimating filter in a direction parallel to the source and the workpiece as the coating builds up on the workpiece.
Claim 3
Dependent Claim
39 words
The sputtering apparatus of claim 1 wherein the means for moving the collimating filter is adapted to move the filter a distance on the order of one half of the diameter of one of the cells in the filter.
Claim 4
Independent Claim
168 words
A method of depositing a step coating on a workpiece, comprising the steps supporting the workpiece in a stationary position in a chamber, emitting particles from a sputter source substantially uniformly throughout an area of greater lateral extent than the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, passing the particles through a collimating filter having a plurality of transmissive cells with a length to diameter ratio defining an aspect ratio in the range of 1:1 to 3:1 positioned between the source and the workpiece to limit the angles of incidence at which the particles can impinge upon the workpiece, maintaining pressure within the chamber at a level which is sufficiently low to prevent substantial scattering of the particles between the collimating filter and the workpiece, and changing the length to diameter ratio of the collimating filter cells as the coating builds up on the workpiece.
Claim 5
Independent Claim
168 words
A method of depositing a step coating on a workpiece, comprising the steps supporting the workpiece in a stationary position in a chamber, emitting particles from a sputter source substantially uniformly throughout an area of greater lateral extent than the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, passing the particles through a collimating filter having a plurality of transmissive cells with a length to diameter ratio defining an aspect ratio in the range of 1:1 to 3:1 positioned between the source and the workpiece to limit the angles of incidence at which the particles can impinge upon the workpiece, maintaining pressure within the chamber at a level which is sufficiently low to prevent substantial scattering of the particles between the collimating filter and the workpiece, and changing the length to diameter ratio of the collimating filter cells as the coating builds up on the workpiece.
Claim 6
Independent Claim
170 words
A method of depositing a step coating on a workpiece, comprising the steps supporting the workpiece in a stationary position in a chamber, emitting particles from a sputter source substantially uniformly throughout an area of greater lateral extend than the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, passing the particles through a collimating filter having a plurality of transmissive cells with a length to diameter ratio defining an aspect ratio in the range of 1:1 to 3:1 positioned between the source and the workpiece to limit the angles of incidence at which the particles can impinge upon the workpiece, maintaining pressure within the chamber at a level which is sufficiently low to prevent substantial scattering of the particles between the collimating filter and the workpiece, and moving the collimating filter in a direction parallel to the source and the workpiece as the coating builds up the workpiece.
Claim 7
Independent Claim
170 words
A method of depositing a step coating on a workpiece, comprising the steps supporting the workpiece in a stationary position in a chamber, emitting particles from a sputter source substantially uniformly throughout an area of greater lateral extend than the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, passing the particles through a collimating filter having a plurality of transmissive cells with a length to diameter ratio defining an aspect ratio in the range of 1:1 to 3:1 positioned between the source and the workpiece to limit the angles of incidence at which the particles can impinge upon the workpiece, maintaining pressure within the chamber at a level which is sufficiently low to prevent substantial scattering of the particles between the collimating filter and the workpiece, and moving the collimating filter in a direction parallel to the source and the workpiece as the coating builds up the workpiece.
Claim 8
Dependent Claim
30 words
The method of claim 4 wherein the collimating filter is moved a distance on the order of one half of the diameter of one of the cells in the filter.
Claim 9
Independent Claim
121 words
A method of depositing a step coating on a workpiece, comprising the steps of: preheating the workpiece to a first elevated temperature, depositing an initial coating on the workpiece by sputtering at a first rate for a first predetermined period of time, on the workpiece by sputtering at a second rate for a second predetermined period of time, said second predetermined period of time being longer in duration than said first predetermined period of time, and said second rate of sputtering being slower than said first rate, increasing the temperature of the workpiece from the first temperature to a second, higher temperature, and depositing an additional coating on the workpiece by sputtering while the temperature of said workpiece is being increased.
Claim 10
Independent Claim
121 words
A method of depositing a step coating on a workpiece, comprising the steps of: preheating the workpiece to a first elevated temperature, depositing an initial coating on the workpiece by sputtering at a first rate for a first predetermined period of time, on the workpiece by sputtering at a second rate for a second predetermined period of time, said second predetermined period of time being longer in duration than said first predetermined period of time, and said second rate of sputtering being slower than said first rate, increasing the temperature of the workpiece from the first temperature to a second, higher temperature, and depositing an additional coating on the workpiece by sputtering while the temperature of said workpiece is being increased.
Claim 11
Dependent Claim
26 words
The method of claim 6 wherein particles generated by sputtering during the steps of depositing the coatings are passed to the workpiece through a collimating filter.
Claim 12
Dependent Claim
24 words
The method of claim 7 wherein the particles are generated by substantially uniform erosion of a target of greater lateral area than the workpiece.
Claim 13
Independent Claim
138 words
An apparatus for sputter etching and sputter coating a workpiece comprising: a first magnetron having a first cathode plate on which the workpiece is mounted for uniformly etching the workpiece, a sputter source comprising a second magnetron having a second cathode plate upon which a target is positioned in facing relation to the workpiece and having means for emitting particles substantially uniformly throughout an area of greater lateral extend than the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, and a particle collimating filter having a thickness and a plurality of transmissive cells positioned between the sputter source and the workpiece for limiting the angles of incidence at which the particles can impinge upon the workpiece.
Claim 14
Independent Claim
138 words
An apparatus for sputter etching and sputter coating a workpiece comprising: a first magnetron having a first cathode plate on which the workpiece is mounted for uniformly etching the workpiece, a sputter source comprising a second magnetron having a second cathode plate upon which a target is positioned in facing relation to the workpiece and having means for emitting particles substantially uniformly throughout an area of greater lateral extend than the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, and a particle collimating filter having a thickness and a plurality of transmissive cells positioned between the sputter source and the workpiece for limiting the angles of incidence at which the particles can impinge upon the workpiece.
Claim 15
Dependent Claim
39 words
The apparatus of claim 9 further comprising means for maintaining a pressure between the source and the workpiece at a level which is sufficiently low to prevent substantial scattering of the particles between the collimating filter and the workpiece.
Claim 16
Dependent Claim
24 words
The apparatus of claim 9 wherein each of the transmissive cells has a length to diameter ratio on the order of 1:1 to 3:1.
Claim 17
Dependent Claim
30 words
The apparatus of claim 9 wherein the filter is spaced from the cathode plate by a distance which is at least one-half of the length of the particle collimating filter.
Claim 18
Dependent Claim
154 words
Sputtering apparatus for depositing a step coating in an opening in a workpiece, said opening having an aspect ratio comprising: a chamber, means for supporting the workpiece in the chamber, a sputter source for emitting particles for forming the coating on the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, a particle collimating filter having a plurality of transmissive cells positioned between the source and the workpiece for limiting the angles of incidence at which the particles can impinge upon the workpiece, wherein the cells of the collimating filter are formed in two sections which are movable axially relative to each other to change the length to diameter ratio of the cells, and means for adjusting the filter so that the cells have a length to diameter ratio which may be varied.
Claim 19
Dependent Claim
154 words
Sputtering apparatus for depositing a step coating in an opening in a workpiece, said opening having an aspect ratio comprising: a chamber, means for supporting the workpiece in the chamber, a sputter source for emitting particles for forming the coating on the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, a particle collimating filter having a plurality of transmissive cells positioned between the source and the workpiece for limiting the angles of incidence at which the particles can impinge upon the workpiece, wherein the cells of the collimating filter are formed in two sections which are movable axially relative to each other to change the length to diameter ratio of the cells, and means for adjusting the filter so that the cells have a length to diameter ratio which may be varied.
Claim 20
Independent Claim
147 words
A method of depositing a step coating in an opening in a workpiece having an aspect ratio which changes as the coating builds up therein, comprising the steps of: supporting the workpiece in a chamber, emitting particles from a sputter source for forming the coating on the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, passing the particles from the source to the workpiece through a collimating filter having a plurality of transmissive cells positioned between the source and the workpiece to limit the angles of incidence at which the particles impinge upon the workpiece, and adjusting the filter so that the cells have a length to diameter ratio which changes with the aspect ratio of the opening as the coating builds in the opening.
Claim 21
Independent Claim
147 words
A method of depositing a step coating in an opening in a workpiece having an aspect ratio which changes as the coating builds up therein, comprising the steps of: supporting the workpiece in a chamber, emitting particles from a sputter source for forming the coating on the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, passing the particles from the source to the workpiece through a collimating filter having a plurality of transmissive cells positioned between the source and the workpiece to limit the angles of incidence at which the particles impinge upon the workpiece, and adjusting the filter so that the cells have a length to diameter ratio which changes with the aspect ratio of the opening as the coating builds in the opening.
Claim 22
Independent Claim
148 words
A method of depositing a step coating in an opening in a workpiece having an aspect ratio which changes as the coating builds up therein, comprising the steps of: supporting the workpiece in a chamber, establishing a first subatmospheric gas pressure within the chamber, emitting particles from a sputter source for forming the coating on the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, passing the particles from the source to the workpiece through a collimating filter having a plurality of transmissive cells with a length to diameter ratio greater than the aspect ratio of the opening to limit the angles of incidence at which the particles impinge upon the workpiece, and reducing the pressure in the chamber as the coating builds up in the opening.
Claim 23
Independent Claim
148 words
A method of depositing a step coating in an opening in a workpiece having an aspect ratio which changes as the coating builds up therein, comprising the steps of: supporting the workpiece in a chamber, establishing a first subatmospheric gas pressure within the chamber, emitting particles from a sputter source for forming the coating on the workpiece, so that at least some of said particles will be deposited on said workpiece, the individual deposited particles impinging on the surface of the workpiece at angles of incidence, passing the particles from the source to the workpiece through a collimating filter having a plurality of transmissive cells with a length to diameter ratio greater than the aspect ratio of the opening to limit the angles of incidence at which the particles impinge upon the workpiece, and reducing the pressure in the chamber as the coating builds up in the opening.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-18 | 1998-01-17 | 1998-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-18 | 2002-01-17 | 2002-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-18 | 2006-01-17 | 2006-07-19 | $7700.00 | Window Closed / Lapsed |