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US5328718A
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Production of barium titanate thin films
Assignee: Murata Manufacturing Co Ltd
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Filing: 1992-10-30
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Granted: 1994-07-12
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Expires: 2012-10-30
Abstract
Abstract A thin film of barium titanate is formed on a substrate by immersing the substrate in an aqueous solution containing barium ions and titanium alkoxide. The aqueous solution may contain not more than 20 vol % of one or more alkanolamines expressed by the general formula: HO(CnH2n)mNH3-m where n is not more than 10, and m=1, 2 or 3.
Inventors
- 👤 Yoshio Abe
- 👤 Yukio Hamaji
- 👤 Yukio Sakabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:46
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6938; H10P14/69398; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/077; H10N30/80; H10N30/85; H10N30/853; H10N30/8536; H10P14/63; H10P14/6326; H10P14/6342
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
46 words
A method for producing a thin film of barium titanate on a substrate, comprising the step of immersing a substrate in an aqueous solution containing barium ions and alkanolamine-modified titanium alkoxide under reaction conditions such that heterogeneous nucleation of barium titanate takes place on the substrate.
Claim 2
Independent Claim
46 words
A method for producing a thin film of barium titanate on a substrate, comprising the step of immersing a substrate in an aqueous solution containing barium ions and alkanolamine-modified titanium alkoxide under reaction conditions such that heterogeneous nucleation of barium titanate takes place on the substrate.
Claim 3
Dependent Claim
40 words
The method according to claim 1, wherein said aqueous solution contains not more than 20 vol % of one or more alkanolamines having the general formula: HO(C.sub.n H.sub.2n)mNH.sub.3-m where n is not more than 10, and m=1, 2 or 3.
Claim 4
Dependent Claim
46 words
The method according to claim 1, wherein said aqueous solution contains barium ions and titanium alkoxide in amounts, when respectively converted into molar concentrations of Ba 2+ ions and Ti 4+ ions, falling within the following respective ranges: 0.01 mM/l≦Ba.sup.2+ ≦150 mM/l, 0.01 mM/l≦Ti.sup.4+ ≦500 mM/l.
Claim 5
Dependent Claim
26 words
The method according to claim 1, further comprising the step of maintaining said aqueous solution at a temperature within the range of 50° to 110° C.
Claim 6
Dependent Claim
18 words
The method according to claim 1, wherein said aqueous solution has a pH value not less than 13.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-11 | 1998-01-10 | 1998-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-11 | 2002-01-10 | 2002-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-11 | 2006-01-10 | 2006-07-12 | $7700.00 | Window Closed / Lapsed |