US5326035A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High purity cleaning system
Assignee: Foundation for Advancement of International Science
•
Filing: 1991-01-07
•
Granted: 1994-07-05
•
Expires: 2011-01-07
Abstract
Abstract A method of cleaning under high temperature and high pressure and cleaning equipment to be used in a cleaning process now being employed in such industrial fields as the electronics industry centering around the semiconductor industry and the optical machine industry. The high temperature/high pressure cleaning equipment has at least a compressing pump, a heating device, a nozzle, and piping, and, in the cleaning equipment to inject high temperature/high pressure water from a nozzle to the matter to be cleaned, functions to inject high temperature/high pressure ultrapure water from the nozzle to the matter to be cleaned. Cleaning is carried out by injecting ultrapure water having a relative resistance of 17.0 M/l-cm or more when converted at 25° C. to a matter to be cleaned.
Inventors
- 👤 Tadahiro Ohmi
- 👤 Michiya Kawakami
- 👤 Yasuyuki Yagi
- 👤 Makoto Ohwada
- 👤 Kiyoshi Takahara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 23:21
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/15; B; B08; B08B; B08B3/00; B08B3/02; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0414; H10P72/0448; Y; Y10; Y10S; Y10S134/00; Y10S134/902; Y10S239/00; Y10S239/19
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
148 words
A cleaning system for delivering a flow of ultrapure water to the surface of an object, comprising: a source of ultrapure water; a nozzle for delivering a flow of ultrapure water toward the surface of an object; a conduit connecting said ultrapure water source to said nozzle in fluid communication with one another; a heater attached to said conduit for heating the ultrapure water as it flows through said conduit; and a pump in fluid communication with said conduit for effecting a flow of ultrapure water from said source to said nozzle; wherein each surface of the cleaning system over which the ultrapure water flows from said ultrapure water source to said nozzle comprises one of a metal and a metal alloy having a passivated film formed thereon, said film being formed by heating said surface in an ultrapure atmosphere and finishing said surface to a mirror-like state.
Claim 2
Dependent Claim
148 words
A cleaning system for delivering a flow of ultrapure water to the surface of an object, comprising: a source of ultrapure water; a nozzle for delivering a flow of ultrapure water toward the surface of an object; a conduit connecting said ultrapure water source to said nozzle in fluid communication with one another; a heater attached to said conduit for heating the ultrapure water as it flows through said conduit; and a pump in fluid communication with said conduit for effecting a flow of ultrapure water from said source to said nozzle; wherein each surface of the cleaning system over which the ultrapure water flows from said ultrapure water source to said nozzle comprises one of a metal and a metal alloy having a passivated film formed thereon, said film being formed by heating said surface in an ultrapure atmosphere and finishing said surface to a mirror-like state.
Claim 3
Dependent Claim
25 words
The cleaning system according to claim 1, wherein the ultrapure water has a relative resistance of 17.0 MΩ-cm or more when converted at 25° C.
Claim 4
Dependent Claim
24 words
The cleaning system according to claim 1, wherein said pump is designed to discard water-containing dusts generated from a sliding section of said pump.
Claim 5
Dependent Claim
20 words
The cleaning system according to claim 1, wherein said pump is adapted to freely change the flow rate pressure thereof.
Claim 6
Dependent Claim
21 words
The cleaning system according to claim 1, wherein said pump, heater, nozzle, and conduit are all disposed in a clean room.
Claim 7
Dependent Claim
24 words
The cleaning system according to claim 1, wherein said heater is adapted to freely adjust the temperature of the water to a given temperature.
Claim 8
Dependent Claim
21 words
The cleaning device according to claim 1, wherein said heater comprises one of a lamp heating furnace and an electric heater.
Claim 9
Dependent Claim
15 words
The cleaning system according to claim 1, wherein a plurality of nozzles are arranged therein.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-04 | 1998-01-03 | 1998-07-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-04 | 2002-01-03 | 2002-07-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-04 | 2006-01-03 | 2006-07-05 | $7700.00 | Window Closed / Lapsed |