US5324674A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fabrication method for a self-aligned thin film transistor having reduced end leakage and device formed thereby
Assignee: General Electric Co
•
Filing: 1993-04-05
•
Granted: 1994-06-28
•
Expires: 2013-04-05
Abstract
Abstract A thin film transistor (TFT) having reduced end leakage is fabricated by: forming a gate electrode on a substrate; forming a TFT body disposed over the gate electrode, the TFT body comprising an intrinsic semiconductor material layer, a channel plug disposed on the intrinsic semiconductor material layer over the gate electrode, a doped semiconductor material layer on the intrinsic semiconductor material and the sidewalls of the channel plug, and a source/drain metallization layer; selectively etching the source/drain metallization layer to form an address connection line and a pixel connection line to a respective source electrode tip and drain electrode tip, selectively etching the channel plug to remove the portion of the sidewalls not adjoining the source and electrode tips that had been in contact with the doped semiconductor layer; removing the doped semiconductor layer portion not underlying the address connection line, the pixel connection line, and the source and drain electrode tips; and removing the now-exposed portion of the intrinsic semiconductor layer material that had been in contact with the doped semiconductor material.
Inventors
- 👤 George E. Possin
- 👤 Ching-Yeu Wei
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 10:57
CPC Classifications
H; H10; H10D; H10D86/00; H10D86/01; H10D86/021; H10D30/00; H10D30/01; H10D30/021; H10D30/031; H10D30/0312; H10D30/0316; H10D30/0321; H10D30/60; H10D30/67; H10D30/674; H10D30/6757; H10D86/40; H10D86/60; Y; Y10; Y10S; Y10S438/00; Y10S438/978
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
339 words
A method of forming a low end leakage thin film transistor, comprising the steps of: forming a gate electrode on a substrate, said electrode comprising a gate electrode finger extending along a longitudinal axis and terminating in a gate electrode tip; forming a thin film transistor (TFT) body disposed over said gate electrode finger, said TFT body including: a first insulation material layer, an intrinsic semiconductor material layer disposed on said first insulation layer, a channel plug comprising an insulation material situated on said intrinsic semiconductor material layer and disposed over at least a portion of said gate electrode finger, said channel plug having opposing first and second electrode sidewalls, each electrode sidewall being aligned substantially parallel with the gate electrode finger longitudinal axis, and further having opposing first and second channel plug end sidewalls, each plug end sidewall being substantially perpendicular to the gate electrode finger longitudinal axis, a doped semiconductor material layer disposed over said intrinsic semiconductor material layer and said channel plug electrode and end sidewalls, and a source/drain metallization layer disposed over said doped semiconductor layer and shaped so as not to cover said channel plug, said source/drain metallization layer including a source electrode tip and a drain electrode tip, each of said tips respectively terminating substantially adjacent to a respective one of said first and second channel plug electrode sidewalls, said doped semiconductor layer being disposed between said source and drain electrode tips and the corresponding one of said first and second channel plug electrode sidewalls; selectively etching said source/drain metallization layer to form a data address connection line and a pixel connection line coupled to a respective one of said source electrode tip and said drain electrode tip; removing substantially all of the insulation material of said first and second channel plug end sidewalls disposed adjacent to said doped semiconductor material; removing said doped semiconductor material layer exposed by the removal of the etched source/drain metallization layer; and removing at least the intrinsic semiconductor material formerly in contact with said doped semiconductor material.
Claim 2
Independent Claim
339 words
A method of forming a low end leakage thin film transistor, comprising the steps of: forming a gate electrode on a substrate, said electrode comprising a gate electrode finger extending along a longitudinal axis and terminating in a gate electrode tip; forming a thin film transistor (TFT) body disposed over said gate electrode finger, said TFT body including: a first insulation material layer, an intrinsic semiconductor material layer disposed on said first insulation layer, a channel plug comprising an insulation material situated on said intrinsic semiconductor material layer and disposed over at least a portion of said gate electrode finger, said channel plug having opposing first and second electrode sidewalls, each electrode sidewall being aligned substantially parallel with the gate electrode finger longitudinal axis, and further having opposing first and second channel plug end sidewalls, each plug end sidewall being substantially perpendicular to the gate electrode finger longitudinal axis, a doped semiconductor material layer disposed over said intrinsic semiconductor material layer and said channel plug electrode and end sidewalls, and a source/drain metallization layer disposed over said doped semiconductor layer and shaped so as not to cover said channel plug, said source/drain metallization layer including a source electrode tip and a drain electrode tip, each of said tips respectively terminating substantially adjacent to a respective one of said first and second channel plug electrode sidewalls, said doped semiconductor layer being disposed between said source and drain electrode tips and the corresponding one of said first and second channel plug electrode sidewalls; selectively etching said source/drain metallization layer to form a data address connection line and a pixel connection line coupled to a respective one of said source electrode tip and said drain electrode tip; removing substantially all of the insulation material of said first and second channel plug end sidewalls disposed adjacent to said doped semiconductor material; removing said doped semiconductor material layer exposed by the removal of the etched source/drain metallization layer; and removing at least the intrinsic semiconductor material formerly in contact with said doped semiconductor material.
Claim 3
Dependent Claim
60 words
The method of claim 1 wherein the step of selectively etching said source/drain metallization layer further comprises the steps of: depositing a mask layer on said source/drain metallization layer; patterning said mask layer to expose selected portions of said source/drain metallization layer; and etching the exposed source/drain metallization layer to form said address connection line and said pixel connection line.
Claim 4
Dependent Claim
69 words
The method of claim 2 wherein the step of removing substantially all of the second insulation material of said first and second channel plug sidewalls further comprises: masking said TFT body such that at least the portion of said channel plug and said doped semiconductor material layer disposed between said source and drain electrode tips is covered by the mask; and etching the exposed portions of said channel plug.
Claim 5
Dependent Claim
21 words
The method of claim 3 wherein the step of removing said doped semiconductor material comprises selectively etching said doped semiconductor material.
Claim 6
Dependent Claim
31 words
The method of claim 4 wherein the step of removing at least the intrinsic semiconductor material formerly in contact with said doped semiconductor material comprises selectively etching said intrinsic semiconductor material.
Claim 7
Dependent Claim
28 words
The method of claim 3 wherein the steps of removing said doped semiconductor material and removing said intrinsic semiconductor material takes place through a single mask in common.
Claim 8
Dependent Claim
22 words
The method of claim 6 wherein said second insulation material is selected from the group consisting of silicon nitride and silicon oxide.
Claim 9
Dependent Claim
33 words
The method of claim 7 wherein the step of selectively etching said channel plug comprises exposing said channel plug to an etchant selected from the group of hydrofluoric acid and buffered hydrofluoric acid.
Claim 10
Dependent Claim
36 words
The method of claim 8 wherein the steps of selectively etching said doped semiconductor material layer exposed by the removal of the source/drain metallization and selectively etching said intrinsic semiconductor material each comprises reactive ion etching.
Claim 11
Dependent Claim
23 words
The method of claim 9 wherein said doped semiconductor material layer comprises amorphous silicon exhibiting n-type conductivity or micro-crystalline silicon exhibiting n-type conductivity.
Claim 12
Dependent Claim
14 words
The method of claim 9 wherein said intrinsic semiconductor material comprises intrinsic amorphous silicon.
Claim 13
Dependent Claim
28 words
The method of claim 1 further comprising the step of depositing a passivation layer over the TFT body following the selective etching of the intrinsic semiconductor material layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-27 | 1997-12-27 | 1998-06-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-27 | 2001-12-27 | 2002-06-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-27 | 2005-12-27 | 2006-06-28 | $7700.00 | Window Closed / Lapsed |