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US5322590A
Expired / Lapsed
US
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Plasma-process system with improved end-point detecting scheme
Assignee: Tokyo Electron Ltd
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Filing: 1993-08-16
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Granted: 1994-06-21
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Expires: 2013-08-16
Abstract
Abstract In one aspect of the invention, CHF 3 gas and CF 4 gas (i.e., reactant gases), and argon gas (i.e., plasma-stabilizing gas) are introduced into a vacuum chamber. RF power is then applied between the electrodes within the chamber, thereby generating plasma. The plasma is applied to a substrate placed in the chamber, thus etching the SiO 2 film formed on the substrate. A spectrometer extracts a light beam of a desired wave-length, emitted from the CF 2 radical which contributes to the etching. An end-point detecting section monitors the luminous intensity of the CF 2 radical reacting with SiO 2 during the etching. Once the SiO 2 film has been etched away, the luminous intensity of the CF 2 radical increases. Upon detecting this increase, the section determines that etching has just ended. The selected wavelength ranges from 310 nm to 236 nm, preferably being 219.0 nm, 230.0 nm, 211.2 nm, 232.5 nm, or any one ranging from 224 nm to 229 nm. In another aspect of the invention, the device attached to the observation window of the chamber removes products stuck to the window during the etching. The window thus cleaned, more light than otherwise passes through the window and reaches the spectrometer. This enables the section to detect even a slight change in the luminous intensity of the CF 2 radical, thereby detecting the end point of etching with accuracy.
Inventors
- 👤 Chishio Koshimizu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 17:15
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935; H01J37/32963; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; Y; Y10; Y10S; Y10S156/00; Y10S156/916
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
120 words
A plasma-process method comprising the steps of: placing an object at a predetermined position within a reaction chamber in which to generate plasma, said object having a silicon dioxide film formed on at least a part of a surface thereof; conducting a CF-based gas used as reactant gas and a predetermined additional gas into said reaction chamber; generating plasma in said reaction chamber, thereby to perform etching the silicon dioxide film formed on the object; monitoring luminous intensity of active species present in the CF-based gas, which contributes to the etching and detecting an end point of the etching from a monitored luminous intensity of the active species, without influence of influence of an emission spectrum of the additional gas.
Claim 2
Dependent Claim
120 words
A plasma-process method comprising the steps of: placing an object at a predetermined position within a reaction chamber in which to generate plasma, said object having a silicon dioxide film formed on at least a part of a surface thereof; conducting a CF-based gas used as reactant gas and a predetermined additional gas into said reaction chamber; generating plasma in said reaction chamber, thereby to perform etching the silicon dioxide film formed on the object; monitoring luminous intensity of active species present in the CF-based gas, which contributes to the etching and detecting an end point of the etching from a monitored luminous intensity of the active species, without influence of influence of an emission spectrum of the additional gas.
Claim 3
Dependent Claim
41 words
The method according to claim 1, wherein said CF-based gas includes at least one of CHF 3 and CF 4 , and said active species includes at least one of CF 2 radical, CF ion, CF radical and CF 3 radical.
Claim 4
Dependent Claim
13 words
The method according to claim 1, wherein said additional gas includes argon gas.
Claim 5
Dependent Claim
72 words
The method according to claim 1, further comprising the steps of: monitoring luminous intensity of a reaction product formed in the plasma during the etching; and calculating a ratio of the luminous intensity the active species present in the CF-based gas and contributing to the etching, and the luminous intensity of the reaction product, wherein the end point of the etching is detected from variation of the luminous intensity ratio thus calculated.
Claim 6
Dependent Claim
21 words
The method according to claim 4, wherein said CF-based gas includes CF 2 gas, and said reaction product includes CO gas.
Claim 7
Dependent Claim
46 words
The method according to claim 4, further comprising the step of: calculating a transformation coefficient for coinciding curves representing changes in the luminous intensities of the active species and the reaction product, wherein said luminous intensity ratio is calculated on the basis of the transformation coefficient.
Claim 8
Dependent Claim
41 words
The method according to claim 6, further comprising the step of controlling an over-etching time in accordance with the luminous-intensity ratio, after the end point of the etching has been detected on the basis of changes in the luminous intensity ratio.
Claim 9
Dependent Claim
133 words
A plasma-process method comprising the steps of: placing an object at a predetermined position within a reaction chamber in which to generate plasma, said object having a silicon dioxide film formed on at least a part of a surface thereof; conducting a CF-based gas used as reactant gas and a predetermined additional gas into said reaction chamber; generating plasma in said reaction chamber, thereby to perform etching the silicon dioxide film formed on the object; monitoring an intensity of a light beam emitted from the plasma and having a desired wavelength which falls within a range of 210 to 236 nm; and detecting an end point of the etching from a monitored intensity of the light beam having the desired wavelength, without influence of influence of an emission spectrum of the additional gas.
Claim 10
Dependent Claim
133 words
A plasma-process method comprising the steps of: placing an object at a predetermined position within a reaction chamber in which to generate plasma, said object having a silicon dioxide film formed on at least a part of a surface thereof; conducting a CF-based gas used as reactant gas and a predetermined additional gas into said reaction chamber; generating plasma in said reaction chamber, thereby to perform etching the silicon dioxide film formed on the object; monitoring an intensity of a light beam emitted from the plasma and having a desired wavelength which falls within a range of 210 to 236 nm; and detecting an end point of the etching from a monitored intensity of the light beam having the desired wavelength, without influence of influence of an emission spectrum of the additional gas.
Claim 11
Dependent Claim
32 words
The method according to claim 8, wherein said desired wavelength is at least one of 219.0 nm, 230.0 nm, 211.2 nm, 232.5 nm and any wavelength ranging from 224 to 229 nm.
Claim 12
Dependent Claim
21 words
The method according to claim 8, wherein said CF-based gas includes at least one of CHF 3 and CF 4 .
Claim 13
Dependent Claim
13 words
The method according to claim 8, wherein said additional gas includes argon gas.
Claim 14
Dependent Claim
103 words
A plasma-process method comprising the steps of: placing an object at a predetermined position within a reaction chamber in which to generate plasma, said object having a silicon dioxide film formed on at least a part of a surface thereof; conducting a CF-based gas used as reactant gas into said reaction chamber; generating plasma in said reaction chamber, thereby to perform etching the silicon dioxide film formed on the object; monitoring luminous intensity of active species present in the CF-based gas, which contributes to the etching; and detecting an end point of the etching from a monitored luminous intensity of the active species.
Claim 15
Dependent Claim
103 words
A plasma-process method comprising the steps of: placing an object at a predetermined position within a reaction chamber in which to generate plasma, said object having a silicon dioxide film formed on at least a part of a surface thereof; conducting a CF-based gas used as reactant gas into said reaction chamber; generating plasma in said reaction chamber, thereby to perform etching the silicon dioxide film formed on the object; monitoring luminous intensity of active species present in the CF-based gas, which contributes to the etching; and detecting an end point of the etching from a monitored luminous intensity of the active species.
Claim 16
Dependent Claim
41 words
The method according to claim 12, wherein said CF-based gas includes at least one of CHF 3 and CF 4 , and said active species includes at least one of CF 2 radical, CF ion, CF radical and CF 3 radical.
Claim 17
Dependent Claim
73 words
The method according to claim 12, further comprising the steps of: monitoring luminous intensity of a reaction product formed in the plasma during the etching; and calculating a ratio of the luminous intensity of the active species present in the CF-based gas and contributing to the etching, and the luminous intensity of the reaction product, wherein the end point of the etching is detected from variation of the luminous intensity ratio thus calculated.
Claim 18
Dependent Claim
21 words
The method according to claim 12, wherein said CF-based gas includes CF 2 gas, and said reaction product includes CO gas.
Claim 19
Dependent Claim
46 words
The method according to claim 12, further comprising the step of: calculating a transformation coefficient for coinciding curves representing changes in the luminous intensities of the active species and the reaction product, wherein said luminous intensity ratio is calculated on the basis of the transformation coefficient.
Claim 20
Dependent Claim
41 words
The method according to claim 16, further comprising the step of controlling an over-etching time in accordance with the luminous-intensity ratio, after the end point of the etching has been detected on the basis of changes in the luminous intensity ratio.
Claim 21
Dependent Claim
117 words
A plasma-process method comprising the steps of: placing an object at a predetermined position within a reaction chamber in which to generate plasma, said object having a silicon dioxide film formed on at least a part of a surface thereof; conducting a CF-based gas used as a reactant gas into said reaction chamber; generating plasma in said reaction chamber, thereby to perform etching the silicon dioxide film formed on the object; monitoring an intensity of a light beam emitted from the plasma and having a desired wavelength which falls within a range of 210 to 236 nm; and detecting an end point of the etching from a monitored intensity of the light beam having the desired wavelength.
Claim 22
Dependent Claim
117 words
A plasma-process method comprising the steps of: placing an object at a predetermined position within a reaction chamber in which to generate plasma, said object having a silicon dioxide film formed on at least a part of a surface thereof; conducting a CF-based gas used as a reactant gas into said reaction chamber; generating plasma in said reaction chamber, thereby to perform etching the silicon dioxide film formed on the object; monitoring an intensity of a light beam emitted from the plasma and having a desired wavelength which falls within a range of 210 to 236 nm; and detecting an end point of the etching from a monitored intensity of the light beam having the desired wavelength.
Claim 23
Dependent Claim
32 words
The method according to claim 18, wherein said desired wavelength is at least one of 219.0 nm, 230.0 nm, 211.2 nm, 232.5 nm and any wavelength ranging from 224 to 229 nm.
Claim 24
Dependent Claim
21 words
The method according to claim 18, wherein said CF-based gas includes at least one of CHF 3 and CF 4 .
References Cited (Backward Citations)
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