US5321634A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Automatic thin-film measuring apparatus
Assignee: Mitsubishi Electric Corp
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Filing: 1992-03-12
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Granted: 1994-06-14
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Expires: 2012-03-12
Abstract
Abstract In an automatic thin-film measuring apparatus, the zero point of a precision balance is corrected according to directions from a data processing unit before and after the weight of a semiconductor substrate is measured, the surface temperature of the semiconductor substrate laid on a pan of the precision balance is measured, and the weight of the semiconductor substrate is measured when the surface temperature reaches a predetermined value. Furthermore, the cycle of variations in the zero point is found when the zero point is corrected, and the weight measurement of the semiconductor substrate is conducted during an integer multiple of the change cycle. Therefore, it is possible to enhance the precision of the weight measurement and its reproducibility and to shorten the measurement time without being influenced by low-frequency vibrations.
Inventors
- 👤 Masanori Obata
- 👤 Jyunichi Arima
- 👤 Yoshihiro Hirata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 15:34
CPC Classifications
G; G01; G01G; G01G1/00; G01G1/18; G01G1/24; G01G9/00; Y; Y10; Y10S; Y10S414/00; Y10S414/135
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
122 words
An automatic thin-film measuring apparatus comprising: a cassette for containing a plurality of semiconductor substrates; a precision balance for measuring the weight of semiconductor substrates; a handling robot for transferring a semiconductor substrate between said cassette and said precision balance; and a data processing unit for controlling the weight measurement by said precision balance and said handling robot, for calculating the thickness of a layer on said semiconductor substrate based on the weight measured by said precision balance, for correcting a zero point of said precision balance, and for sensing a period of cyclic variations of the zero point and controlling said precision balance to weigh semiconductor substrates at intervals equal to an integer multiple of the period of the cyclic variations.
Claim 2
Dependent Claim
122 words
An automatic thin-film measuring apparatus comprising: a cassette for containing a plurality of semiconductor substrates; a precision balance for measuring the weight of semiconductor substrates; a handling robot for transferring a semiconductor substrate between said cassette and said precision balance; and a data processing unit for controlling the weight measurement by said precision balance and said handling robot, for calculating the thickness of a layer on said semiconductor substrate based on the weight measured by said precision balance, for correcting a zero point of said precision balance, and for sensing a period of cyclic variations of the zero point and controlling said precision balance to weigh semiconductor substrates at intervals equal to an integer multiple of the period of the cyclic variations.
Claim 3
Dependent Claim
33 words
The automatic thin-film measuring apparatus according to claim 1 wherein said data processing unit corrects the zero point of said precision balance before and after the weight of a semiconductor substrate is measured.
Claim 4
Dependent Claim
27 words
The automatic thin-film measuring apparatus according to claim 1 wherein said data processing unit calibrates said precision balance before the weight of a semiconductor substrate is measured.
Claim 5
Dependent Claim
17 words
The automatic thin-film measuring apparatus according to claim 1 wherein said precision balance includes a built-in weight.
Claim 6
Dependent Claim
26 words
The automatic thin-film measuring apparatus according to claim 1 wherein said data processing unit calculates the thickness of a thin film deposited on a semiconductor substrate.
Claim 7
Dependent Claim
27 words
The automatic thin-film measuring apparatus according to claim 1 wherein said data process unit calculates the thickness of a layer removed from a semiconductor substrate by etching.
Claim 8
Dependent Claim
56 words
The automatic thin-film measuring apparatus according to claim 1 comprising a temperature sensor for sensing a surface temperature of a semiconductor substrate disposed on said precision balance wherein said data processing unit controls said precision balance in response to said temperature sensor to weigh semiconductor substrates only when the sensed surface temperature is a prescribed value.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-13 | 1997-12-13 | 1998-06-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-13 | 2001-12-13 | 2002-06-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-13 | 2005-12-13 | 2006-06-14 | $7700.00 | Window Closed / Lapsed |