US5319570A
Expired / Lapsed
US
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Control of large scale topography on silicon wafers
Assignee: International Business Machines Corp
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Filing: 1991-10-09
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Granted: 1994-06-07
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Expires: 2011-10-09
Abstract
Abstract A method for the characterization of large scale wafer topography is applied to improving yields in the manufacture large scale integrated (LSI) devices. First, the heights at the center, the edge and an intermediate point are measured on eight equally spaced radii. This provides eight values each for Y s and Y e which are averaged. Then the shape angle α is computed using the following equation: ##EQU1## The shape magnitude M is also computed using the following equation: ##EQU2## The thus computed values of α and M are correlated with individual wafer characteristics as to device performance and yield. Based on these results, the wafer processing is controlled to provide optimal wafer yield and isolation characteristics.
Inventors
- 👤 Joanne M. Davidson
- 👤 George Hrebin, Jr.
- 👤 Robert K. Lewis
- 👤 Carl H. Orner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 13:47
CPC Classifications
G; G01; G01B; G01B21/00; G01B21/30; G01B11/00; G01B11/30; G01B11/306; G01B7/00; G01B7/34; G01B7/345
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
152 words
A method of characterization of large scale wafer topography in the manufacture of large scale integrated semiconductor devices comprising the steps of: measuring the heights at the center, the edge and an intermediate point on a plurality of radii on the wafer to obtain a plurality of values each for Y s , the height of the intermediate point relative to the center, and Y e , the height of the edge relative to the center; averaging the plurality of values Y s and Y e ; computing a shape angle α using the following equation: ##EQU13## computing a shape magnitude M using the following equation: ##EQU14## correlating the computed values of α and M with individual wafer characteristics as to device performance and yield at intermediate steps in the process; and controlling wafer processing by correlating α and M with individual wafer characteristics to provide optimal wafer yield and leakage characteristics.
Claim 2
Independent Claim
152 words
A method of characterization of large scale wafer topography in the manufacture of large scale integrated semiconductor devices comprising the steps of: measuring the heights at the center, the edge and an intermediate point on a plurality of radii on the wafer to obtain a plurality of values each for Y s , the height of the intermediate point relative to the center, and Y e , the height of the edge relative to the center; averaging the plurality of values Y s and Y e ; computing a shape angle α using the following equation: ##EQU13## computing a shape magnitude M using the following equation: ##EQU14## correlating the computed values of α and M with individual wafer characteristics as to device performance and yield at intermediate steps in the process; and controlling wafer processing by correlating α and M with individual wafer characteristics to provide optimal wafer yield and leakage characteristics.
Claim 3
Dependent Claim
23 words
The method recited in claim 1 wherein measurements are taken along at least four equally spaced radii over the surface of the wafer.
Claim 4
Independent Claim
85 words
A method of correlating semiconductor wafer large scale topography to wafer yield and device characteristics comprising the steps of: measuring, for a selected surface of the wafer, wafer height at selected radial points on the wafer; developing at least two measurement indicative of the wafer large scale topography as a function of measured heights; and correlating these at least two measurements indicative of wafer large scale topography to the yield at intermediate steps in the process and/or operating characteristics of devices formed on the wafer.
Claim 5
Independent Claim
85 words
A method of correlating semiconductor wafer large scale topography to wafer yield and device characteristics comprising the steps of: measuring, for a selected surface of the wafer, wafer height at selected radial points on the wafer; developing at least two measurement indicative of the wafer large scale topography as a function of measured heights; and correlating these at least two measurements indicative of wafer large scale topography to the yield at intermediate steps in the process and/or operating characteristics of devices formed on the wafer.
Claim 6
Dependent Claim
38 words
The method recited in claim 3 further including the step of controlling the large scale topography using the correlated measurements of subsequently formed wafers to provide the large scale topographic measurements which optimize selected device parameters and/or yield.
Claim 7
Dependent Claim
41 words
The method recited in claim 4 wherein said radial points include an edge point and an intermediate point on a plurality of radial lines, heights at said edge points and said intermediate points being relative to the center of the wafer.
Claim 8
Dependent Claim
81 words
The method recited in claim 5 wherein said step of developing at least two measurements comprise the steps of: averaging the measured edge point heights and the measured intermediate point heights; determining an angle, α, the arctangent of which is the ratio of the average edge point height to the average intermediate point height; and determining a shape magnitude, M, as the squareroot of the sum of the squares of the average edge point height and the average intermediate point height.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-06 | 1997-12-06 | 1998-06-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-06 | 2001-12-06 | 2002-06-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-06 | 2005-12-06 | 2006-06-07 | $7700.00 | Window Closed / Lapsed |