Patent US5319216A successfully refreshed from Google Patents.
US5319216A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter
Assignee: Tokyo Electron Ltd
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Filing: 1993-08-12
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Granted: 1994-06-07
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Expires: 2013-08-12
Abstract
Abstract A substrate detector device comprises a boat or chuck for holding substrates, a light emitting section having a plurality of light emitting elements, arranged side by side, for respectively applying light beams to the substrates, a light receiving section, facing the light emitting section and having a plurality of light receiving elements, for receiving light beams passed through the substrates, the light receiving elements arranged side by side so as not face the light emitting elements, a polarization filter provided on optical axes of the respective optical beams incident on the light receiving elements, a memory for storing, as reference data, an amount of light received by a receiving element which has been measured in advance when a light beam is applied to a substrate in a state where no other substrate is present on either side of the substrate, and controller for discriminating the presence, the number, and the state of arrangement of the substrates on the holding means based on the reference data and measured data based on the amount of light received by the light receiving elements after a light beam scattered by the substrate to be detected and a light beam wraparound substrates adjacent thereto are removed by the polarization filter.
Inventors
- 👤 Shori Mokuo
- 👤 Yoichi Deguchi
- 👤 Mitsuo Nishi
- 👤 Shinji Tadakuma
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:05
CPC Classifications
G; G01; G01V; G01V8/00; G01V8/10; G01V8/20; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/138
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
131 words
A substrate detector device for detecting the presence and the number of a plurality of substrates arranged face to face, the device comprising: holding means for holding substrates; light emitting means having a plurality of light emitting elements, arranged side by side, for respectively applying light beams to the substrates; light receiving means, facing the light emitting means and having a plurality of light receiving elements, for receiving light beams passed through a space where the substrates are to be placed, the light receiving elements arranged side by side, said light receiving elements and the light emitting elements are arranged in a staggered fashion; and polarization filter means which allow passage of only optical beams emitted from the light emitting element and to be directly incident on the light receiving elements.
Claim 2
Dependent Claim
131 words
A substrate detector device for detecting the presence and the number of a plurality of substrates arranged face to face, the device comprising: holding means for holding substrates; light emitting means having a plurality of light emitting elements, arranged side by side, for respectively applying light beams to the substrates; light receiving means, facing the light emitting means and having a plurality of light receiving elements, for receiving light beams passed through a space where the substrates are to be placed, the light receiving elements arranged side by side, said light receiving elements and the light emitting elements are arranged in a staggered fashion; and polarization filter means which allow passage of only optical beams emitted from the light emitting element and to be directly incident on the light receiving elements.
Claim 3
Dependent Claim
119 words
A substrate detector device according to claim 1, further comprising: storage means for storing, as reference data, an amount of light received by a receiving element which has been measured in advance when a light beam is applied to a substrate in a state where no other substrate is present on either side of the substrate; and discriminating means for discriminating the presence and the number of the substrates on the holding means based on the reference data and measured data based on the amount of light received by the light receiving elements after a light beam scattered by the substrate to be detected and a light beam wrap-around substrates adjacent thereto are removed by the polarization filter means.
Claim 4
Dependent Claim
41 words
A substrate detector device according to claim 1, further comprising determining means for determining that a substrate is not correctly placed at a position or a substrate is not present at the position, when the measured data exceeds the reference data.
Claim 5
Dependent Claim
64 words
A substrate detector device according to claim 1, further comprising correcting means for, when the measured data exceeds the reference data, correcting the amount of light received by a light receiving element by subtracting 20% to 50% of the difference between the measured data and the reference data from the amount of light received by light receiving elements adjacent to the light receiving element.
Claim 6
Dependent Claim
51 words
A substrate detector device according to claim 1, wherein the holding means is constituted by a wafer chuck having a pair of chuck arms for holding semiconductor wafers, one of the chuck arms having the light emitting elements and the other having the light receiving elements and the poralization filter means.
Claim 7
Dependent Claim
40 words
A substrate detector device according to claim 1, further comprising holder members for holding the light emitting elements and the light receiving elements, respectively, wherein poralization filter means is attached to the holder member for holding the light receiving elements.
Claim 8
Dependent Claim
27 words
A substrate detector device according to claim 6, further comprising cases for encasing the holder members to protect the light emitting elements and the light receiving elements.
Claim 9
Dependent Claim
15 words
A substrate detector device according to claim 7, wherein the cases are made of quartz.
Claim 10
Dependent Claim
14 words
A substrate detector device according to claim 7, wherein the cases are cylindrical tubes.
Claim 11
Dependent Claim
26 words
A substrate detector device according to claim 7, wherein the cases are rectangular boxes, and the holder members are placed on the bottoms of the cases.
Claim 12
Dependent Claim
19 words
A substrate detector device according to claim 7, further comprising gas supplying means for supplying gas into the cases.
Claim 13
Dependent Claim
19 words
A substrate detector device according to claim 11, further comprising exhaust means for exhausting the gas from the cases.
Claim 14
Dependent Claim
30 words
A substrate detector device according to claim 7, further comprising elevator means for moving up and down the light emitting elements and the light receiving elements, together with the cases.
References Cited (Backward Citations)
US5151754A
Cited
US5189481A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-06 | 1997-12-06 | 1998-06-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-06 | 2001-12-06 | 2002-06-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-06 | 2005-12-06 | 2006-06-07 | $7700.00 | Window Closed / Lapsed |