US5318923A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for forming a metal wiring layer in a semiconductor device
Assignee: Samsung Electronics Co Ltd
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Filing: 1992-06-11
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Granted: 1994-06-07
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Expires: 2012-06-11
Abstract
Abstract A method for forming a metal layer in a semiconductor device is disclosed. The method includes a first process for depositing a metal at an optional temperature after forming the pattern of a contact hole on the semiconductor substrate on which the stepped portion is formed, and a second process for annealing the deposited metal in a sputtering reaction chamber to fill up the contact hole with said metal. According to the invention, it is possible to completely fill up a contact hole having a high aspect ratio.
Inventors
- 👤 Chang-soo Park
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:19
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/16; C23C14/165; C23C14/04; C23C14/046; C23C14/58; C23C14/5806; C23C14/584; H; H10; H10P; H10P95/00; H10P95/04; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/056; H10W20/059; H10W20/40; H10W20/41; H10W20/42; H10W20/425
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
174 words
A method for forming a metal wiring layer, whose upper surface is smoothly planarized, on an insulating layer including at least one contact hole having a predetermined diameter and formed on a semiconductor substrate, comprising the steps of: depositing a first metal material of substantially uniform thickness on the surface of said insulating layer, on the inside wall of the contact hole, and on the surface of said semiconductor substrate exposed by the contact hole, said first metal material having a thickness from about 1/16 to 3/8 that of the diameter of said contact hole, said first metal material deposited by physical vapor deposition at a low temperature in a vacuum chamber so that atoms on the surface of said first metal material have a high surface moving distance; and post-heating said deposited first metal material in a vacuum at a temperature ranging from 80% of the melting point temperature of the deposited first metal material to the melting point temperature, for an appropriate time, by an in-situ processing method, after said deposition step.
Claim 2
Independent Claim
174 words
A method for forming a metal wiring layer, whose upper surface is smoothly planarized, on an insulating layer including at least one contact hole having a predetermined diameter and formed on a semiconductor substrate, comprising the steps of: depositing a first metal material of substantially uniform thickness on the surface of said insulating layer, on the inside wall of the contact hole, and on the surface of said semiconductor substrate exposed by the contact hole, said first metal material having a thickness from about 1/16 to 3/8 that of the diameter of said contact hole, said first metal material deposited by physical vapor deposition at a low temperature in a vacuum chamber so that atoms on the surface of said first metal material have a high surface moving distance; and post-heating said deposited first metal material in a vacuum at a temperature ranging from 80% of the melting point temperature of the deposited first metal material to the melting point temperature, for an appropriate time, by an in-situ processing method, after said deposition step.
Claim 3
Dependent Claim
61 words
A method as claimed in claim 1, further comprising the step of depositing a second metal material on said first metal material at room temperature by physical vapor deposition, said second material having a thickness corresponding to a subtraction of the thickness of said first metal material from a predetermined total thickness of said metal wiring layer, after said post-heating step.
Claim 4
Dependent Claim
21 words
A method as claimed in claim 1, wherein said metal deposition in said first process is carried out by a sputtering
Claim 5
Dependent Claim
19 words
A method as claimed in claim 1, wherein said metal in said first process is aluminum or aluminum alloy.
Claim 6
Dependent Claim
32 words
A method as claimed in claim 1, wherein said first metal material is aluminum alloy which is formed by mixing silicon of 1% and copper of 0.5% by weight with the aluminum.
Claim 7
Dependent Claim
15 words
A method as claimed in claim 5, wherein the said aluminum is 500Å to 3000Å.
Claim 8
Independent Claim
142 words
A method for forming a metal wiring layer, whose upper surface is smoothly planarized, on an insulating layer including at least one contact hole having a submicron diameter and formed on a semiconductor substrate, comprising the steps of: depositing an aluminum alloy film of substantially uniform thickness on the surface of said insulating layer, on the inside wall of the contact hole, and on the surface of said semiconductor substrate exposed by the contact hole, said aluminum alloy film having a thickness from about 1/16 to 3/8 that of the diameter of said contact hole, said first metal deposited by a physical vapor deposition at a temperature below 100° C. in a vacuum chamber; and post-heating said deposited aluminum alloy film in a vacuum at a temperature of 550° C. for three minutes by an in-situ processing method, after said deposition step.
Claim 9
Independent Claim
142 words
A method for forming a metal wiring layer, whose upper surface is smoothly planarized, on an insulating layer including at least one contact hole having a submicron diameter and formed on a semiconductor substrate, comprising the steps of: depositing an aluminum alloy film of substantially uniform thickness on the surface of said insulating layer, on the inside wall of the contact hole, and on the surface of said semiconductor substrate exposed by the contact hole, said aluminum alloy film having a thickness from about 1/16 to 3/8 that of the diameter of said contact hole, said first metal deposited by a physical vapor deposition at a temperature below 100° C. in a vacuum chamber; and post-heating said deposited aluminum alloy film in a vacuum at a temperature of 550° C. for three minutes by an in-situ processing method, after said deposition step.
Claim 10
Independent Claim
105 words
A method for forming a metal wiring layer, comprising the steps of: providing a semiconductor wafer with an insulating layer having an opening formed therein; depositing a first metal to form a first metal layer on said insulating layer and on the inner surface of said opening in a vacuum chamber so as to have a high surface free energy; and heat-treating said deposited first metal layer in a vacuum at a temperature sufficient to cause migration of said first metal, for an appropriate time, by an in-situ processing method after said deposition step, thereby completely filling said opening with said deposited first metal material.
Claim 11
Independent Claim
105 words
A method for forming a metal wiring layer, comprising the steps of: providing a semiconductor wafer with an insulating layer having an opening formed therein; depositing a first metal to form a first metal layer on said insulating layer and on the inner surface of said opening in a vacuum chamber so as to have a high surface free energy; and heat-treating said deposited first metal layer in a vacuum at a temperature sufficient to cause migration of said first metal, for an appropriate time, by an in-situ processing method after said deposition step, thereby completely filling said opening with said deposited first metal material.
Claim 12
Dependent Claim
20 words
A method as claimed in claim 8, wherein said first metal layer is deposited at a temperature below 100° C.
Claim 13
Dependent Claim
21 words
A method as claimed in claim 8, wherein said first metal deposited to a thickness of about 500Å to about 3000Å.
Claim 14
Dependent Claim
17 words
A method as claimed in claim 8, wherein said first metal is aluminum or an aluminum alloy.
Claim 15
Dependent Claim
42 words
A method as claimed in claim 8, further comprising the step of depositing a second metal to form a second metal layer so that the total thickness of said first metal layer and said second metal layer ranges within a predetermined thickness.
Claim 16
Dependent Claim
21 words
A method as claimed in claim 12, wherein said second metal layer is deposited while heat-treating said deposited first metal layer.
Claim 17
Dependent Claim
26 words
A method as claimed in claim 12, wherein said second metal layer is deposited after heat-treating said deposited first metal layer to completely fill said opening.
Claim 18
Dependent Claim
20 words
A method as claimed in claim 14, wherein said second metal layer is deposited at a temperature below 350° C.
Claim 19
Dependent Claim
22 words
A method as claimed in claim 11, wherein said aluminum alloy is an Al-Si alloy, Al-Cu alloy, Al-Cu-Si alloy, or Al-Ti alloy.
Claim 20
Dependent Claim
22 words
A method as claimed in claim 8, wherein said opening is a contact hole having an aspect ratio greater than about 1.0.
Claim 21
Dependent Claim
18 words
A method as claimed in claim 17, wherein said contact hole has a diameter less than 1 μm.
Claim 22
Dependent Claim
24 words
A method as claimed in claim 8, wherein said heat-treating step of said deposited first metal layer is performed for more than 1 minute.
Claim 23
Independent Claim
130 words
A method for forming a metal wiring layer, comprising the steps of: providing a semiconductor wafer with an insulating layer having an opening formed therein; depositing a first metal to form a first metal layer on said insulating layer and on the inner surface of said opening at a low temperature in a vacuum chamber so as to have a high surface free energy; and heat-treating said deposited first metal layer in a vacuum at a temperature sufficient to cause migration of said first metal, for an appropriate time by an in-situ processing method after said deposition step, thereby completely filling said opening with said deposited first metal material; and depositing a second metal to form a second metal layer so that a metal layer has a required total thickness.
Claim 24
Independent Claim
130 words
A method for forming a metal wiring layer, comprising the steps of: providing a semiconductor wafer with an insulating layer having an opening formed therein; depositing a first metal to form a first metal layer on said insulating layer and on the inner surface of said opening at a low temperature in a vacuum chamber so as to have a high surface free energy; and heat-treating said deposited first metal layer in a vacuum at a temperature sufficient to cause migration of said first metal, for an appropriate time by an in-situ processing method after said deposition step, thereby completely filling said opening with said deposited first metal material; and depositing a second metal to form a second metal layer so that a metal layer has a required total thickness.
Claim 25
Independent Claim
81 words
A method for forming a metal wiring layer, comprising the steps of: depositing a first metal in a vacuum chamber to form a first metal layer on an insulating layer so as to have a high surface free energy; and heat-treating said deposited first metal layer in a vacuum at a temperature sufficient to cause migration of said first metal, for an appropriate time, by an in-situ processing method after said deposition step, thereby causing said deposited first metal to migrate.
Claim 26
Independent Claim
81 words
A method for forming a metal wiring layer, comprising the steps of: depositing a first metal in a vacuum chamber to form a first metal layer on an insulating layer so as to have a high surface free energy; and heat-treating said deposited first metal layer in a vacuum at a temperature sufficient to cause migration of said first metal, for an appropriate time, by an in-situ processing method after said deposition step, thereby causing said deposited first metal to migrate.
References Cited (Backward Citations)
EP0097848A1
Cited
EP0202572A2
Cited
JPS62293739A
Cited
US5071791A
Cited
US4970176A
Cited
US5147819A
Cited
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| 3.5 Years (Year 4) | 1997-06-06 | 1997-12-06 | 1998-06-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-06 | 2001-12-06 | 2002-06-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-06 | 2005-12-06 | 2006-06-07 | $7700.00 | Window Closed / Lapsed |