US5317006A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cylindrical magnetron sputtering system
Assignee: Microelectronics and Computer Technology Corp
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Filing: 1991-10-04
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Granted: 1994-05-31
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Expires: 2011-10-04
Abstract
Abstract An improved cathode for a sputtering system includes a metal cylinder and strips of material bonded to the inside of the metal cylinder and/or material sprayed onto the inside of the metal cylinder. The strips may have various specified compositions and/or configurations and/or other characteristics which enhance the ability of the sputtering system to deposit films of high temperature superconductor material on substrates.
Inventors
- 👤 Nalin Kumar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 05:56
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/56; H01J37/32431; H01J37/32733; H01J37/32752; H01J37/32761; H01J37/3277; H01J37/3411; H01J37/3414; H01J37/342; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0408; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/731; Y10S505/786; Y10S505/80; Y10S505/815; Y10S505/816
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
66 words
A cathode for inclusion in a sputtering system, said cathode comprising: a metallic outer cylinder and lengthwise arrayed target material disposed within said metallic outer cylindrical in a closed polygonal cross-sectional shape within said metallic outer cylinder, said lengthwise arrayed target material able to be sputtered and to thereby form a film of high temperature superconducting material on a substrate positioned within said closed polygonal shape.
Claim 2
Dependent Claim
66 words
A cathode for inclusion in a sputtering system, said cathode comprising: a metallic outer cylinder and lengthwise arrayed target material disposed within said metallic outer cylindrical in a closed polygonal cross-sectional shape within said metallic outer cylinder, said lengthwise arrayed target material able to be sputtered and to thereby form a film of high temperature superconducting material on a substrate positioned within said closed polygonal shape.
Claim 3
Dependent Claim
18 words
A cathode as recited in claim 1, wherein said lengthwise arrayed superconducting target material comprises strips of material.
Claim 4
Dependent Claim
22 words
A cathode as recited in claim 2, wherein said strips of material are arranged so as to form said polygonal cross-sectional shape.
Claim 5
Dependent Claim
21 words
A cathode as recited in claim 3, wherein said strips of material are arranged so as to have an octagonal cross-section.
Claim 6
Dependent Claim
21 words
A cathode as recited in claim 3, wherein said strips of material are arranged so as to have a hexagonal cross-section.
Claim 7
Dependent Claim
16 words
A cathode as recited in claim 2, wherein said strips of material comprise strips of alloys.
Claim 8
Dependent Claim
17 words
A cathode as recited in claim 2, wherein said strips of material comprise strips of pure elements.
Claim 9
Dependent Claim
17 words
A cathode as recited in claim 2, wherein said strips of material comprise strips of binary alloys.
Claim 10
Dependent Claim
21 words
A cathode as recited in claim 2, wherein said strips of material comprise strips of alloys and strips of pure elements.
Claim 11
Independent Claim
65 words
A system for depositing a superconducting film on at least one substrate, said system comprising: a sputtering system including a cathode comprising a metallic outer cylinder and lengthwise arrayed target material disposed within said metallic outer cylinder so as to form a closed, polygonal cross-sectional shape within said metallic outer cylinder; and means for causing at least one substrate to move through said sputtering system.
Claim 12
Independent Claim
65 words
A system for depositing a superconducting film on at least one substrate, said system comprising: a sputtering system including a cathode comprising a metallic outer cylinder and lengthwise arrayed target material disposed within said metallic outer cylinder so as to form a closed, polygonal cross-sectional shape within said metallic outer cylinder; and means for causing at least one substrate to move through said sputtering system.
Claim 13
Dependent Claim
25 words
A system as recited in claim 10, wherein said lengthwise arrayed target material disposed within said outer cylinder of said cathode comprises strips of material.
Claim 14
Dependent Claim
22 words
A system as recited in claim 11, wherein said strips of material are arranged so as to form said polygonal cross-sectional shape.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-30 | 1997-11-29 | 1998-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-30 | 2001-11-29 | 2002-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-30 | 2005-11-29 | 2006-05-31 | $7700.00 | Window Closed / Lapsed |