Patent US5316794A successfully refreshed from Google Patents.
US5316794A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for servicing vacuum chamber using non-reactive gas-filled maintenance enclosure
Assignee: Applied Materials Inc
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Filing: 1992-12-11
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Granted: 1994-05-31
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Expires: 2012-12-11
Abstract
Abstract A process and apparatus is disclosed for providing access to the interior of a vacuum deposition chamber in a vacuum deposition apparatus without exposing residues, such as chlorosilane residues, within the chamber to moisture and/or oxygen-containing gases. The process comprises first placing over the upper surface of the vacuum deposition apparatus an enclosure which has a bottom opening large enough to completely cover the top opening to the chamber, and which is capable of being filled with one or more non-reactive gases. One or more non-reactive gases are then flowed into the enclosure to purge moisture and/or oxygen-containing gases from the enclosure. After the enclosure has been mounted on the apparatus and purged by the flow of non-reactive gases therein, the vacuum deposition chamber may be opened, while continuing the flow of non-reactive gases into the enclosure. After servicing, the vacuum deposition chamber may be resealed, the flow of non-reactive gases shut off, and the enclosure then removed from the apparatus. In a preferred embodiment, the flow of non-reactive gases into the enclosure is positioned to flow down from the top of the enclosure at a right angle to openings in the sidewall of the enclosure provided for accessing the vacuum deposition chamber, to thereby provide a gas curtain of non-reactive gas flow across the openings to inhibit ingress of moisture and/or oxygen-containing gases, as well as particulate impurities, into the enclosure.
Inventors
- 👤 David K. Carlson
- 👤 Norma B. Riley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:31
CPC Classifications
H; H10; H10P; H10P95/00; H10P72/00; H10P72/04; H10P72/0402; C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; Y; Y10; Y10S; Y10S118/00; Y10S118/07
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
176 words
A process for providing access to the interior of a vacuum deposition chamber in a vacuum deposition apparatus through a cover on said chamber without exposing residues within said chamber to moisture and/or oxygen-containing gases which comprises: a) placing over the upper surface of said vacuum deposition apparatus containing said vacuum deposition chamber an enclosure which has a bottom opening large enough to completely cover said cover on said chamber, and which is capable of being filled with one or more non-reactive gases; b) flowing one or more non-reactive gases into said enclosure to purge moisture and/or oxygen-containing gases from said enclosure; c) then removing said cover through one or more openings in one or more sidewalls of said enclosure to thereby open said vacuum deposition chamber while continuing to flow said one or more non-reactive gases into said enclosure; d) servicing the interior of said vacuum deposition chamber; e) closing said vacuum deposition chamber; f) then shutting off said flow of non-reactive gases into said enclosure; and g) then removing said enclosure from said apparatus.
Claim 2
Dependent Claim
176 words
A process for providing access to the interior of a vacuum deposition chamber in a vacuum deposition apparatus through a cover on said chamber without exposing residues within said chamber to moisture and/or oxygen-containing gases which comprises: a) placing over the upper surface of said vacuum deposition apparatus containing said vacuum deposition chamber an enclosure which has a bottom opening large enough to completely cover said cover on said chamber, and which is capable of being filled with one or more non-reactive gases; b) flowing one or more non-reactive gases into said enclosure to purge moisture and/or oxygen-containing gases from said enclosure; c) then removing said cover through one or more openings in one or more sidewalls of said enclosure to thereby open said vacuum deposition chamber while continuing to flow said one or more non-reactive gases into said enclosure; d) servicing the interior of said vacuum deposition chamber; e) closing said vacuum deposition chamber; f) then shutting off said flow of non-reactive gases into said enclosure; and g) then removing said enclosure from said apparatus.
Claim 3
Dependent Claim
86 words
The process of claim 1 including the further step of flowing said one or more non-reactive gases into said enclosure downwardly from the top of the enclosure adjacent said one or more sidewalls having one or more openings therein for accessing said vacuum chamber, to thereby provide a gas curtain of non-reactive gas flow across said one or more openings to inhibit ingress of moisture and/or oxygen-containing gases, as well as particle impurities, into the interior of said vacuum deposition chamber when said cover is removed.
Claim 4
Dependent Claim
40 words
The process of claim 1 wherein said step of flowing said one or more non-reactive gases into said enclosure further comprises flowing one or more non-reactive gases selected from the group consisting of neon, argon, helium, nitrogen, and combinations thereof.
Claim 5
Dependent Claim
52 words
The process of claim 1 wherein said step of flowing said one or more non-reactive gases into said enclosure further comprises flowing said one or more non-reactive gases into said enclosure at a flow rate of from about 20 slm to about 40 slm per cubic foot of volume of said enclosure.
Claim 6
Dependent Claim
79 words
The process of claim 1 including the further steps of placing one or more components within said vacuum deposition chamber having said residues on the surface thereof, into a gas-tight container and removing said container containing said one or more residue-coated components from said chamber and said enclosure, to thereby avoid exposure of said residues on the surfaces of said component to moisture and/or oxygen-containing gases while said component is being removed from said chamber and from said enclosure.
Claim 7
Dependent Claim
47 words
The process of claim 1 including the further step of securing a bottom surface of said enclosure to said upper surface of said vacuum deposition apparatus to inhibit said enclosure from moving off said upper surface of said vacuum deposition apparatus while said chamber is being serviced.
Claim 8
Dependent Claim
30 words
The process of claim 1 wherein said flow of said one or more non-reactive gases into said enclosure is maintained sufficient to provide a slight positive pressure inside said enclosure.
Claim 9
Dependent Claim
233 words
A process which permits the interior of a vacuum chamber to be serviced without exposing the interior of said chamber, including residues therein to be removed, to moisture and/or oxygen-containing gases, using a portable enclosure which may be removably fitted over said vacuum chamber which comprises: a) placing over an upper surface of said vacuum chamber, adjacent a cover on said chamber, an enclosure which has a bottom opening large enough to completely cover said cover on said chamber, and which is capable of being filled with one or more non-reactive gases; b) flowing one or more non-reactive gases into said enclosure to purge moisture and/or oxygen-containing gases from said enclosure; c) then removing said cover from said vacuum chamber through one or more openings in one or more sidewalls of said enclosure to thereby provide access to the interior of said vacuum chamber to permit said interior of said vacuum chamber to be serviced, while continuing to flow said one or more non-reactive gases into said enclosure; d) servicing the interior of said vacuum chamber through said one or more openings in said one or more sidewalls of said enclosure; e) then closing said vacuum chamber through said one or more openings in said one or more sidewalls of said enclosure; f) then shutting off said flow of non-reactive gases into said enclosure; and g) then removing said enclosure from said apparatus
Claim 10
Dependent Claim
233 words
A process which permits the interior of a vacuum chamber to be serviced without exposing the interior of said chamber, including residues therein to be removed, to moisture and/or oxygen-containing gases, using a portable enclosure which may be removably fitted over said vacuum chamber which comprises: a) placing over an upper surface of said vacuum chamber, adjacent a cover on said chamber, an enclosure which has a bottom opening large enough to completely cover said cover on said chamber, and which is capable of being filled with one or more non-reactive gases; b) flowing one or more non-reactive gases into said enclosure to purge moisture and/or oxygen-containing gases from said enclosure; c) then removing said cover from said vacuum chamber through one or more openings in one or more sidewalls of said enclosure to thereby provide access to the interior of said vacuum chamber to permit said interior of said vacuum chamber to be serviced, while continuing to flow said one or more non-reactive gases into said enclosure; d) servicing the interior of said vacuum chamber through said one or more openings in said one or more sidewalls of said enclosure; e) then closing said vacuum chamber through said one or more openings in said one or more sidewalls of said enclosure; f) then shutting off said flow of non-reactive gases into said enclosure; and g) then removing said enclosure from said apparatus
Claim 11
Dependent Claim
30 words
The process of claim 8 wherein said flow of said one or more non-reactive gases into said enclosure is maintained sufficient to provide a slight positive pressure inside said enclosure.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-30 | 1997-11-29 | 1998-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-30 | 2001-11-29 | 2002-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-30 | 2005-11-29 | 2006-05-31 | $7700.00 | Window Closed / Lapsed |