Patent US5312487A successfully refreshed from Google Patents.
US5312487A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Coating apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1992-09-18
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Granted: 1994-05-17
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Expires: 2012-09-18
Abstract
Abstract A coating apparatus includes a rotating and holding mechanism which holds and rotates an object to be coated, a container which encloses the rotating and holding mechanism and prevents the dispersion of coating liquid supplied to the object, a washing fitting provided to the rotating and holding mechanism and which supplies washing liquid for washing off coating liquid which has attached to the inside of container. This washing fitting has a collection pool for collecting the washing liquid, and discharge holes through which the washing liquid in the collection pool is discharged by rotation of the rotating and holding mechanism. Thus, it is possible to evenly wash off coating liquid which has attached to the inside of the container in a short time with a small amount of washing liquid.
Inventors
- 👤 Masami Akimoto
- 👤 Akihiro Fujimoto
- 👤 Haruo Iwatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:20
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0448; H10P72/0402; H10P72/70; H10P72/76; H10P72/7604; H10P72/7618
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
126 words
A coating apparatus comprising: rotating and holding means for holding and rotating an object to be coated; a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be coated; a washing liquid supply means provided above said container for supply washing liquid; a washing fitting provided on said rotating and holding means in place of an object to be coated for discharging washing liquid supplied from said washing liquid supply means for washing off coating liquid which has attached inside said container; said washing fitting having a collection pool portion for collecting washing liquid, and discharge holes through which washing liquid in said collection pool portion is discharged by rotation of said rotating and holding means.
Claim 2
Dependent Claim
126 words
A coating apparatus comprising: rotating and holding means for holding and rotating an object to be coated; a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be coated; a washing liquid supply means provided above said container for supply washing liquid; a washing fitting provided on said rotating and holding means in place of an object to be coated for discharging washing liquid supplied from said washing liquid supply means for washing off coating liquid which has attached inside said container; said washing fitting having a collection pool portion for collecting washing liquid, and discharge holes through which washing liquid in said collection pool portion is discharged by rotation of said rotating and holding means.
Claim 3
Dependent Claim
20 words
The coating apparatus of claim 1, comprising a moving mechanism for moving said rotating and holding means up and down.
Claim 4
Dependent Claim
39 words
The coating apparatus of claim 1, wherein said discharge holes are formed in plural in an outer peripheral portion of said washing fitting, and are aligned at an angle with respect to a horizontal plane through said washing fitting.
Claim 5
Dependent Claim
24 words
The coating apparatus of claim 1, wherein a center of a receiving portion of said washing fitting is formed with a conical shaped protrusion.
Claim 6
Dependent Claim
13 words
The coating apparatus of claim 1, wherein said discharge hole is provided singly.
Claim 7
Dependent Claim
28 words
The coating apparatus of claim 1, wherein said pool portion is located at a side of a lower surface of a peripheral edge portion of said washing fitting.
Claim 8
Dependent Claim
16 words
The coating apparatus of claim 1, wherein said rotating and holding means is a spin chuck.
Claim 9
Dependent Claim
105 words
A coating apparatus comprising: rotating and holding means for holding and rotating an object to be coated; and a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be coated; said rotating and holding means being provided with a washing liquid guide portion, a supply nozzle, for supplying washing liquid for washing off coating liquid which has attached to said container, provided adjacently and facing said washing liquid guide portion, whereby washing liquid discharged from said supply nozzle is dispersed inside said container via said washing liquid guide portion of said rotating and holding means.
Claim 10
Dependent Claim
105 words
A coating apparatus comprising: rotating and holding means for holding and rotating an object to be coated; and a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be coated; said rotating and holding means being provided with a washing liquid guide portion, a supply nozzle, for supplying washing liquid for washing off coating liquid which has attached to said container, provided adjacently and facing said washing liquid guide portion, whereby washing liquid discharged from said supply nozzle is dispersed inside said container via said washing liquid guide portion of said rotating and holding means.
Claim 11
Dependent Claim
95 words
A coating apparatus comprising: rotating and holding means for holding and rotating an object to be coated; and a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be coated; said rotating and holding means being provided with a pool portion which pools washing liquid for washing off coating liquid which has attached to said container, and discharge holes for discharging washing liquid from said pool portion in a direction of inside walls of said container due to rotation of said rotating and holding means.
Claim 12
Dependent Claim
95 words
A coating apparatus comprising: rotating and holding means for holding and rotating an object to be coated; and a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be coated; said rotating and holding means being provided with a pool portion which pools washing liquid for washing off coating liquid which has attached to said container, and discharge holes for discharging washing liquid from said pool portion in a direction of inside walls of said container due to rotation of said rotating and holding means.
Claim 13
Dependent Claim
28 words
The coating apparatus of claim 8, wherein said rotating and holding means is formed so as to be reciprocally movable in a direction of an axis of rotation.
Claim 14
Dependent Claim
42 words
The coating apparatus of claim 8, wherein said washing liquid guide portion is located on a side of a lower portion of said rotating and holding means and inclines from one end of a peripheral edge portion thereof to another end thereof.
Claim 15
Dependent Claim
55 words
The coating apparatus of claim 9, wherein said pool portion includes a plurality of washing liquid receiver portions formed in a side of a rear surface of said rotating and holding means, each said washing liquid receiver portion being respectively connected to a freely movable washing liquid supply nozzle and having a corresponding discharge hole.
Claim 16
Dependent Claim
53 words
The coating apparatus of claim 9, wherein a peripheral edge portion of a side of a rear surface of said rotating and holding means is provided with said pool portion, said pool portion being ring shaped and connected to said discharge holes, and wherein said washing liquid supply nozzles oppose said pool portion.
Claim 17
Dependent Claim
48 words
The coating apparatus of claim 9, wherein said rotating and holding means forms said pool portion which has the shape of a circular plate with a hole at its center, and which has a washing liquid guide inlet provided to a center portion of an upper surface thereof.
Claim 18
Dependent Claim
16 words
The coating apparatus of claim 8, wherein: said rotating and holding means is a spin chuck.
Claim 19
Dependent Claim
125 words
A coating apparatus comprising: rotating and holding means for holding and rotating an object to be processed; a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be processed; a washing liquid discharge nozzle which discharges washing liquid in a direction of a rear surface of an object to be processed as such object is held by said holding and rotating means; and control means for gradually changing a rotational speed for said rotating and holding means when a rear surface of an object to be processed is to be washed, whereby washing liquid which has struck a rear surface of such object is dispersed in a direction of a wall surface of said container.
Claim 20
Dependent Claim
125 words
A coating apparatus comprising: rotating and holding means for holding and rotating an object to be processed; a container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to an object to be processed; a washing liquid discharge nozzle which discharges washing liquid in a direction of a rear surface of an object to be processed as such object is held by said holding and rotating means; and control means for gradually changing a rotational speed for said rotating and holding means when a rear surface of an object to be processed is to be washed, whereby washing liquid which has struck a rear surface of such object is dispersed in a direction of a wall surface of said container.
Claim 21
Dependent Claim
35 words
The coating apparatus of claim 16, wherein plural washing liquid discharge nozzles are provided at a required angle of inclination with respect to an axis of rotation of a plurality of rotating and holding means.
Claim 22
Dependent Claim
113 words
A coating apparatus comprising: rotating and holding means for holding and rotating an object to be processed; a first container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to such object to be processed; a second container located coaxially in said first container and underneath said rotating and holding means; a first washing liquid discharge nozzle provided so as to lead, to the entire surface of said first container, washing liquid discharged in a direction of such object; and a second washing liquid discharge nozzle provided so as to lead, to the entire surface of said second container, washing liquid discharged in a direction of such object.
Claim 23
Dependent Claim
113 words
A coating apparatus comprising: rotating and holding means for holding and rotating an object to be processed; a first container which encloses said rotating and holding means and prevents dispersion of coating liquid supplied to such object to be processed; a second container located coaxially in said first container and underneath said rotating and holding means; a first washing liquid discharge nozzle provided so as to lead, to the entire surface of said first container, washing liquid discharged in a direction of such object; and a second washing liquid discharge nozzle provided so as to lead, to the entire surface of said second container, washing liquid discharged in a direction of such object.
Claim 24
Dependent Claim
20 words
The coating apparatus of claim 17, wherein respective angles of inclination of said washing liquid discharge nozzles are the same.
Claim 25
Dependent Claim
19 words
The coating apparatus of claim 17, wherein respective angles of inclination of said washing liquid discharge nozzles are different.
Claim 26
Dependent Claim
28 words
The coating apparatus of claim 9, wherein said rotating and holding means is formed so as to be reciprocally movable in a direction of an axis of rotation.
Claim 27
Dependent Claim
16 words
The coating apparatus of claim 9, wherein: said rotating and holding means is a spin chuck.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-16 | 1997-11-15 | 1998-05-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-16 | 2001-11-15 | 2002-05-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-16 | 2005-11-15 | 2006-05-17 | $7700.00 | Window Closed / Lapsed |