US5310596A
Expired / Lapsed
US
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Multi-layer superhard film structure
Assignee: Saint Gobain Abrasives Inc
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Filing: 1991-12-18
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Granted: 1994-05-10
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Expires: 2011-12-18
Abstract
Abstract A multi-layer diamond film is grown by d.c. arc assisted plasma deposition. A series of layers are deposited on each other by periodically back-etching the surface and renucleating during deposition. There may also be deposited a thin layer of non-diamond carbon material between the diamond layers, but no other non-carbon material. Renucleation is controlled by varying the proportion of methane to hydrogen in the feed gases, by temperature cycling of the substrate, or by inducing modal changes in the arc.
Inventors
- 👤 Louis K. Bigelow
- 👤 Robert M. Frey
- 👤 Gordon L. Cann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:16
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/272; C23C16/279; C23C30/00; C23C30/005; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265; Y10T428/30
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
72 words
A diamond material film structure consisting essentially of carbon and comprising at least first and second adjacent layers of diamond material, each layer comprising microcrystals of diamond grown in a generally columnar form with the average cross-sectional dimensions of the columnar microcrystals increasing in the growth direction from a first side of each layer to a second side of that layer, the layers having generally similar average column sizes and similar properties.
Claim 2
Dependent Claim
72 words
A diamond material film structure consisting essentially of carbon and comprising at least first and second adjacent layers of diamond material, each layer comprising microcrystals of diamond grown in a generally columnar form with the average cross-sectional dimensions of the columnar microcrystals increasing in the growth direction from a first side of each layer to a second side of that layer, the layers having generally similar average column sizes and similar properties.
Claim 3
Dependent Claim
23 words
The structure according to claim 1, wherein the second side of the first layer is adjacent the first side of the second layer.
Claim 4
Dependent Claim
20 words
The structure according to claim 2, wherein the diamond layers have a thickness of between 1 nanometer and 1 millimeter.
Claim 5
Dependent Claim
18 words
The structure according to claim 3, wherein the diamond layers have between them an interlayer of non-diamond carbon.
Claim 6
Dependent Claim
13 words
The structure according to claim 4, wherein the interlayer consists essentially of graphite.
Claim 7
Dependent Claim
103 words
A cutting tool element of the type having a substrate of a first material with a cutter of a second material bonded to it, wherein the improvement comprises said second material being a multi-layer diamond film consisting essentially of carbon and comprising at least first and second adjacent layers of diamond material, each layer comprising microcrystals of diamond grown in a generally columnar form with the average cross-sectional dimensions of the columnar microcrystals increasing in the growth direction from a first side of each layer to a second side of that layer, the layers having generally similar average column sizes and similar properties.
Claim 8
Dependent Claim
103 words
A cutting tool element of the type having a substrate of a first material with a cutter of a second material bonded to it, wherein the improvement comprises said second material being a multi-layer diamond film consisting essentially of carbon and comprising at least first and second adjacent layers of diamond material, each layer comprising microcrystals of diamond grown in a generally columnar form with the average cross-sectional dimensions of the columnar microcrystals increasing in the growth direction from a first side of each layer to a second side of that layer, the layers having generally similar average column sizes and similar properties.
Claim 9
Dependent Claim
23 words
The structure according to claim 6, wherein successive diamond layers of said second material have between them an interlayer of non-diamond carbon material.
Claim 10
Dependent Claim
22 words
The structure according to claim 7, wherein the successive layers of diamond have a thickness of between 1 nanometer and 1 millimeter.
Claim 11
Dependent Claim
14 words
The structure according to claim 7, wherein the non-diamond interlayer consists essentially of graphite.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-05-09 | 1997-11-08 | 1998-05-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-09 | 2001-11-08 | 2002-05-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-09 | 2005-11-08 | 2006-05-10 | $7700.00 | Window Closed / Lapsed |