US5304284A
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US
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Methods for etching a less reactive material in the presence of a more reactive material
Assignee: International Business Machines Corp
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Filing: 1991-10-18
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Granted: 1994-04-19
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Expires: 2011-10-18
Abstract
Abstract A method is described for providing a body of first material and a body of second material in a chemical environment wherein the first material contains first constituents having a lower and higher oxidation state and wherein the second material contains constituents having an oxidation state of energy greater than lower oxidation state of the first constituent. The environment is further provided with first cations energetically disposed for receiving electrons from the first constituents but not energetically disposed for receiving electrons from the second constituents. Electrons transfer from the first constituents to the first cations which are transformed thereby into second cations of lower oxidation state resulting in first body releasing into the environment third cations which are cations of the first (lower) oxidation state of the first constituent. The environment is further provided with an agent which consumes the second and third cations thereby permitting release into the environment additional ones of the third cations resulting in the first body being preferably etched with respect to the second body. The method is useful to etch copper in the presence of more highly reactive materials such as chrome, lead, tin, titanium, aluminum, iron, cobalt, and galvanically more active gold and nickel. The method is useful for forming structures containing copper having an overlying layer of the more highly reactive material without the requirement of the use of a resist material.
Inventors
- 👤 Rangarajan Jagannathan
- 👤 Sampath Purushothaman
- 👤 Scott A. Sikorski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 10:48
CPC Classifications
C; C01; C01B; C01B7/00; C01B7/19; C01B7/191; C01B7/195; C01B7/196; C23; C23F; C23F1/00; C23F1/10; H; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
164 words
A method comprising: providing a body of a first material and a body of a second material in a substantially non-aqueous solution; said first material contains first constituents having a lower and a higher oxidation state; said second material contains second constituents having an oxidation state of energy greater than the lower oxidation state of said first constituents; providing in said solution first cations energetically disposed to receiving electrons from said first constituents but not energetically disposed to receiving electrons from said second constituents; electrons transfer from said first constituents to said first cations to form second cations of lower oxidation state, resulting in said first body releasing into said first lower oxidation state and resulting in etching of the first material; and providing in said solution an agent which consumes said second cations and said third cations thereby permitting release into said solution additional ones of said third cations resulting in said first body being preferably etched with respect to said second body.
Claim 2
Independent Claim
164 words
A method comprising: providing a body of a first material and a body of a second material in a substantially non-aqueous solution; said first material contains first constituents having a lower and a higher oxidation state; said second material contains second constituents having an oxidation state of energy greater than the lower oxidation state of said first constituents; providing in said solution first cations energetically disposed to receiving electrons from said first constituents but not energetically disposed to receiving electrons from said second constituents; electrons transfer from said first constituents to said first cations to form second cations of lower oxidation state, resulting in said first body releasing into said first lower oxidation state and resulting in etching of the first material; and providing in said solution an agent which consumes said second cations and said third cations thereby permitting release into said solution additional ones of said third cations resulting in said first body being preferably etched with respect to said second body.
Claim 3
Independent Claim
166 words
A method comprising: providing a body of a first material and a body of a second material in a solution containing a dehydrating agent; said first material contains first constituents having a lower and a higher oxidation state; said second material contains second constituents having an oxidation state of energy greater than the lower oxidation state of said first constituents; providing in said solution first cations energetically disposed to receiving electrons from said first constituents but not energetically disposed to receiving electrons from said second constituents; electrons transfer from said first constituents to said first cations to form second cations of lower oxidation state, resulting in said first body releasing into said first lower oxidation state and resulting in etching of the first material; and providing in said solution an agent which consumes said second cations and said third cations thereby permitting release into said solution additional ones of said third cations resulting in said first body being preferably etched with respect to said second body.
Claim 4
Independent Claim
166 words
A method comprising: providing a body of a first material and a body of a second material in a solution containing a dehydrating agent; said first material contains first constituents having a lower and a higher oxidation state; said second material contains second constituents having an oxidation state of energy greater than the lower oxidation state of said first constituents; providing in said solution first cations energetically disposed to receiving electrons from said first constituents but not energetically disposed to receiving electrons from said second constituents; electrons transfer from said first constituents to said first cations to form second cations of lower oxidation state, resulting in said first body releasing into said first lower oxidation state and resulting in etching of the first material; and providing in said solution an agent which consumes said second cations and said third cations thereby permitting release into said solution additional ones of said third cations resulting in said first body being preferably etched with respect to said second body.
Claim 5
Dependent Claim
14 words
The method of claim 1 or 2, wherein said first material is a metal.
Claim 6
Dependent Claim
14 words
The method of claim 1 or 2, wherein said agent is a complexing agent.
Claim 7
Dependent Claim
13 words
The method of claim 1 or 2, wherein said first material is Cu.
Claim 8
Dependent Claim
28 words
The method of claim 1 or 2, wherein said second material is selected from the group consisting of Pb, Sn, Al, Fe, Au and Co and alloys thereof.
Claim 9
Dependent Claim
22 words
The method of claim 1 or 2, wherein the consumption of said third cations results in the etching of said first body.
Claim 10
Independent Claim
121 words
A method comprising: providing a substrate having a layer of Cu thereon; a patterned layer of material selected from the group consisting of Pd, Cr, Pb, Sn, Ni, Al, Fe, Au and Co and alloys thereof disposed over said Cu layer; contacting said Cu layer with said patterned layer thereon with a solution containing a complexing agent and a dehydrating agent; providing in said solution cupric ions which react with said Cu layer to form cuprous ions in solution which complex with said complexing agent; and said patterned layer being substantially nonreactive with said cupric ions, thereby resulting in the exposed areas of the said Cu layer dissolving into said solution to form a pattern Cu layer below said patterned layer.
Claim 11
Independent Claim
121 words
A method comprising: providing a substrate having a layer of Cu thereon; a patterned layer of material selected from the group consisting of Pd, Cr, Pb, Sn, Ni, Al, Fe, Au and Co and alloys thereof disposed over said Cu layer; contacting said Cu layer with said patterned layer thereon with a solution containing a complexing agent and a dehydrating agent; providing in said solution cupric ions which react with said Cu layer to form cuprous ions in solution which complex with said complexing agent; and said patterned layer being substantially nonreactive with said cupric ions, thereby resulting in the exposed areas of the said Cu layer dissolving into said solution to form a pattern Cu layer below said patterned layer.
Claim 12
Dependent Claim
19 words
The method of claim 1 or 2, wherein said first body is disposed in contact with said second body.
Claim 13
Dependent Claim
22 words
The method of claim 3, wherein said complexing agent is selected from the group consisting of 2-Butene 1,4 diol, cychohexane, 2-Butyn-1-ol, 1-hexyne.
Claim 14
Dependent Claim
29 words
The method of claim 1 or 2, wherein said solution contains a solvent selected from the group consisting of methanol, ethanol, isopropyl alcohol, ethylene glycol, terpeneol and mixtures thereof.
Claim 15
Dependent Claim
19 words
The method of claim 3, wherein said complexing agent is selected from the group consisting of alkenes and alkynes.
Claim 16
Dependent Claim
12 words
The method of claim 1 or 2, wherein said solution is non-oxidizing.
Claim 17
Dependent Claim
40 words
The method of claim 9, wherein said second body forms a pattern on said first body and wherein the consumption of said third cations results in the etching of said first body at regions thereof not covered by said pattern.
Claim 18
Dependent Claim
19 words
The method of claim 1 or 2, wherein said solution is a solution for a chemical mechanical polishing slurry.
Claim 19
Dependent Claim
18 words
The method of claim 14, wherein the thickness of said patterned layer is at least a mono layer.
Claim 20
Dependent Claim
10 words
The method of claim 14, wherein said etching is nonisotropic.
Claim 21
Independent Claim
108 words
A method comprising: providing a substrate having a layer of Cu thereon; a patterned layer of Co disposed on said Cu layer; contacting said Cu layer with said patterned layer thereon with a non-aqueous solution containing a complexing agent selected from the group consisting of alkenes and alkynes, providing in said solution cupric ions which react with said Cu layer to form cuprous ions in solution which complex with said complexing agent; said patterned layer being substantially nonreactive with said cupric ions, thereby resulting in dissolving the exposing areas of the said Cu layer in the said solution to form a patterned Cu layer below said patterned layer.
Claim 22
Independent Claim
108 words
A method comprising: providing a substrate having a layer of Cu thereon; a patterned layer of Co disposed on said Cu layer; contacting said Cu layer with said patterned layer thereon with a non-aqueous solution containing a complexing agent selected from the group consisting of alkenes and alkynes, providing in said solution cupric ions which react with said Cu layer to form cuprous ions in solution which complex with said complexing agent; said patterned layer being substantially nonreactive with said cupric ions, thereby resulting in dissolving the exposing areas of the said Cu layer in the said solution to form a patterned Cu layer below said patterned layer.
Claim 23
Independent Claim
118 words
A method comprising: providing a substrate having a layer of Cu thereon; a patterned layer of a material selected from the group consisting of Pd, Cr, Pb, Sn, Ni, Al, Fe, Au and Co and alloys thereof disposed over said Cu layer; contacting said Cu layer with said patterned layer thereon with a non-aqueous solution containing a complexing agent; providing in said solution cupric ions which react with said Cu layer to form cuprous ions in solution which complex with said complexing agent; said patterned layer being substantially nonreactive with said cupric ions, thereby resulting in the exposed areas of the said Cu layer dissolving into said solution to form a patterned Cu layer below said patterned layer.
Claim 24
Independent Claim
118 words
A method comprising: providing a substrate having a layer of Cu thereon; a patterned layer of a material selected from the group consisting of Pd, Cr, Pb, Sn, Ni, Al, Fe, Au and Co and alloys thereof disposed over said Cu layer; contacting said Cu layer with said patterned layer thereon with a non-aqueous solution containing a complexing agent; providing in said solution cupric ions which react with said Cu layer to form cuprous ions in solution which complex with said complexing agent; said patterned layer being substantially nonreactive with said cupric ions, thereby resulting in the exposed areas of the said Cu layer dissolving into said solution to form a patterned Cu layer below said patterned layer.
Claim 25
Dependent Claim
19 words
The method of claim 19, wherein said complexing agent is selected from the group consisting of alkenes and alkynes.
Claim 26
Dependent Claim
15 words
The method of claim 20, wherein said dissolving of said Cu layer is non isotropic.
Claim 27
Dependent Claim
32 words
The method of claim 19, wherein said cupric ion is provided by providing to the solution of cupric salt selected from the group consisting of: cupric tetrafluoroborate, cupric hexafluorophosphate, cupric methane sulfonate.
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