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US5300803A Expired / Lapsed US ⏱️ 0.0 years remaining

Source side injection non-volatile memory cell

Assignee: Texas Instruments Inc
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Filing: 1992-12-14
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Granted: 1994-04-05
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Expires: 2012-12-14
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Abstract

Abstract A source side injection non-volatile memory cell is provided that comprises a floating gate and control gate stack (12) disposed outwardly from a channel region (26) formed on an (n-)-substrate (10). Drain region (32) and source region (30) are formed on opposite sides of stack structure (12). Source side injection of hot electrons occurs between source region (30) and floating gate (18) when relatively low voltages are placed on gate conductor (22).

Inventors

  • 👤 David K. Liu

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 02:17
CPC Classifications
H; H10; H10B; H10B41/00; H10B41/30; H10B69/00; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0411; H10D30/60; H10D30/68; H10D30/681; H10D30/684; H10D30/685; Y; Y10; Y10S; Y10S257/00; Y10S257/90

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 148 words
A memory cell formed on an outer surface of a semiconductor layer of a predetermined conductivity type, comprising: a floating gate insulatively disposed adjacent the surface; a control gate insulatively disposed adjacent said floating gate, said floating gate disposed between the surface and said control gate such that said floating gate and control gate form a control stack insulatively disposed on the surface; a source region disposed in the layer proximate a first edge of said control stack, said source region comprising a conductivity type the same as said predetermined conductivity type; a well region formed in said semiconductor layer partially underlying said control stack, said well region comprising a conductivity type opposite said predetrmined conductivity type; and a drain region disposed in said well region proximate a second edge of said control stack, said drain region comprising a conductivity type the same as said predetermined conductivity type.
Claim 2
Dependent Claim 148 words
A memory cell formed on an outer surface of a semiconductor layer of a predetermined conductivity type, comprising: a floating gate insulatively disposed adjacent the surface; a control gate insulatively disposed adjacent said floating gate, said floating gate disposed between the surface and said control gate such that said floating gate and control gate form a control stack insulatively disposed on the surface; a source region disposed in the layer proximate a first edge of said control stack, said source region comprising a conductivity type the same as said predetermined conductivity type; a well region formed in said semiconductor layer partially underlying said control stack, said well region comprising a conductivity type opposite said predetrmined conductivity type; and a drain region disposed in said well region proximate a second edge of said control stack, said drain region comprising a conductivity type the same as said predetermined conductivity type.
Claim 3
Dependent Claim 36 words
The memory cell of claim 1 wherein said control stack further comprises: a gate insulator disposed between the surface and said floating gate; and an interlevel insulator disposed between said floating gate and said control gate.
Claim 4
Dependent Claim 34 words
The memory cell of claim 1 and further comprising: a sidewall spacer body disposed adjacent said first edge of said control stack, said source region disposed in the layer adjacent said sidewall insulator body.
Claim 5
Dependent Claim 45 words
The memory cell of claim 1 and further comprising: a diffused region of said predetermined conductivity type disposed between said drain region and said channel region, said diffused region comprising a lower concentration of impurities than the concentration of impurities associated with said drain region.
Claim 6
Dependent Claim 26 words
The memory cell of claim 1 wherein said substrate comprises silicon, said predetermined conductivity type comprises n-type conductivity and said opposite conductivity type comprises p-type conductivity.
Claim 7
Dependent Claim 26 words
The memory cell of claim 1 wherein said substrate comprises silicon, said predetermined conductivity type comprises p-type conductivity and said opposite conductivity type comprises n-type conductivity.
Claim 8
Dependent Claim 29 words
The memory cell of claim 1 wherein said channel region comprises a portion of a well region disposed proximate the surface and the second edge of said control stack.
Claim 9
Dependent Claim 139 words
A memory cell formed on an outer surface of a silicon layer of a predetermined conductivity type comprising: a floating gate; a control gate; an insulator disposed between said floating gate and the surface and an interlevel insulator disposed between said floating gate and said control gate, said floating gate and said control gate forming a control stack insulatively disposed on the surface; a source region disposed in the layer proximate a first edge of said control stack; a channel well disposed in the layer proximate a second edge of said control stack and extending partially under said control stack, said well comprising a conductivity type opposite said predetermined conductivity type; and a drain region disposed in said well proximate the second edge of said control stack, said drain having the same conductivity type as said predetermined conductivity type.
Claim 10
Dependent Claim 139 words
A memory cell formed on an outer surface of a silicon layer of a predetermined conductivity type comprising: a floating gate; a control gate; an insulator disposed between said floating gate and the surface and an interlevel insulator disposed between said floating gate and said control gate, said floating gate and said control gate forming a control stack insulatively disposed on the surface; a source region disposed in the layer proximate a first edge of said control stack; a channel well disposed in the layer proximate a second edge of said control stack and extending partially under said control stack, said well comprising a conductivity type opposite said predetermined conductivity type; and a drain region disposed in said well proximate the second edge of said control stack, said drain having the same conductivity type as said predetermined conductivity type.
Claim 11
Dependent Claim 34 words
The memory cell of claim 8 and further comprising: a sidewall spacer body disposed adjacent said first edge of said control stack, said source region disposed in the layer adjacent said sidewall insulator body.
Claim 12
Dependent Claim 45 words
The memory cell of claim 8 and further comprising: a diffused region of said predetermined conductivity type disposed between said drain region and said channel region, said diffused region comprising a lower concentration of impurities than the concentration of impurities associated with said drain region.
Claim 13
Dependent Claim 26 words
The memory cell of claim 8 wherein said substrate comprises silicon, said predetermined conductivity type comprises n-type conductivity and said opposite conductivity type comprises p-type conductivity.
Claim 14
Dependent Claim 26 words
The memory cell of claim 8 wherein said substrate comprises silicon, said predetermined conductivity type comprises n-type conductivity and said opposite conductivity type comprises p-type conductivity.

References Cited (Backward Citations)

JPS5433636A Cited
JPS5718369A Cited
US4652897A Cited
JPS6271277A Cited
US4972371A Cited
US5032881A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-04-04 1997-10-04 1998-04-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-04-04 2001-10-04 2002-04-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-04-04 2005-10-04 2006-04-05 $7700.00 Window Closed / Lapsed

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