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US5300735A Expired / Lapsed US ⏱️ 0.0 years remaining

Interconnected multilayer boards and fabrication processes thereof

Assignee: Hitachi Ltd
•
Filing: 1993-03-22
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Granted: 1994-04-05
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Expires: 2013-03-22
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Abstract

Abstract Described herein are interconnected mutilayer boards and their fabrication processes. Multilayer conductor lines of a skeleton structure are formed by conducting multilayer metallization while including all resist layers and metallic under-conductive layers and then removing the resist layers and metallic under-conductive layers at once. Spaces between the multilayer conductor lines of the skeleton structure are then filled with a solventless varnish so that insulating layers are formed. Modules making use of such interconnected multilayer boards and computers having such modules are also described.

Inventors

  • 👤 Hitoshi Yokono
  • 👤 Hideo Arima
  • 👤 Takashi Inoue
  • 👤 Naoya Kitamura
  • 👤 Haruhiko Matsuyama
  • 👤 Hitoshi Oka
  • 👤 Fumio Kataoka
  • 👤 Fusaji Shoji
  • 👤 Hideyasu Murooka
  • 👤 Masayuki Kyooi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 23:05
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H05; H05K; H05K3/00; H05K3/46; H05K3/4644; H05K3/4647; H05K2203/00; H05K2203/07; H05K2203/0703; H05K2203/0733; H05K2203/0756; H05K2203/0769; H05K3/10; H05K3/108; H05K3/22; H05K3/24; H05K3/243; H10W72/00; H10W72/01; H10W72/012; H10W72/01251; H10W72/01255; H10W72/071; H10W72/072; H10W72/07251; H10W72/20; H10W72/851; H10W72/874; H10W72/877; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49126; Y10T29/49155; Y10T29/49165

Claims Analysis

Total Claims: 28
Claim 1
Independent Claim 80 words
An interconnected multilayer board comprising a group of parallel conductor lines at least one of which overlies a base substrate, and another group of via conductors connected to the conductor lines and arranged perpendicular to the parallel conductor lines to provide a skeleton structure defining spaces between said conductors, the spaces defined by said conductor lines and said via conductors having been filled with a heat-resistant varnish in a solventless form and said varnish then being cured with said spaces.
Claim 2
Dependent Claim 80 words
An interconnected multilayer board comprising a group of parallel conductor lines at least one of which overlies a base substrate, and another group of via conductors connected to the conductor lines and arranged perpendicular to the parallel conductor lines to provide a skeleton structure defining spaces between said conductors, the spaces defined by said conductor lines and said via conductors having been filled with a heat-resistant varnish in a solventless form and said varnish then being cured with said spaces.
Claim 3
Dependent Claim 30 words
The board of claim 1, wherein prior to filling of the spaces with the heat-resistant varnish, the conductor lines and the via conductors are coated with a solvent-based, heat-resistant varnish.
Claim 4
Dependent Claim 26 words
The board of claim 1, wherein the varnish comprises an epoxy resin, an isocyanurate-oxazolidone resin, a cyanate ester resin, or a hat-resistant polymer containing cyclobutene rings.
Claim 5
Dependent Claim 29 words
The board of claim 1, wherein the varnish in solventless form comprises an epoxy resin, an isocyanurate-oxazolidone resin, a cyanate ester resin, or a heat-resistant polymer containing cyclobutene rings.
Claim 6
Dependent Claim 159 words
An interconnected multilayer board comprising: a base substrate; a group of conductor lines; a group of a plurality of via conductors each being connected to a predetermined conductor line to form a skeleton structure having spaces defined therein; and an insulating material located in said spaces for insulating said conductor lines from one another, and for supporting said conductor lines; said conductor lines being arranged at different levels of layers, and said conductor lines arranged at the respective layers being substantially parallel to said base substrate, each of said plurality of via conductors being fabricated in the form of a pillar, extending in a direction substantially perpendicular to said base substrate, and arranged in a position for supporting a conductive line to be connected by the terminal of the via conductor, said insulating material comprising a cured resin selected from the group consisting of a polymer of benzocyclobutene, an epoxy resin, a cyanate ester resin and a polyimide resin.
Claim 7
Dependent Claim 159 words
An interconnected multilayer board comprising: a base substrate; a group of conductor lines; a group of a plurality of via conductors each being connected to a predetermined conductor line to form a skeleton structure having spaces defined therein; and an insulating material located in said spaces for insulating said conductor lines from one another, and for supporting said conductor lines; said conductor lines being arranged at different levels of layers, and said conductor lines arranged at the respective layers being substantially parallel to said base substrate, each of said plurality of via conductors being fabricated in the form of a pillar, extending in a direction substantially perpendicular to said base substrate, and arranged in a position for supporting a conductive line to be connected by the terminal of the via conductor, said insulating material comprising a cured resin selected from the group consisting of a polymer of benzocyclobutene, an epoxy resin, a cyanate ester resin and a polyimide resin.
Claim 8
Dependent Claim 34 words
The interconnected multilayer board according to claim 5, wherein surfaces of the groups of conductive lines and via conductors are coated with a polymer whose permitivity is lower than that of said insulating material.
Claim 9
Dependent Claim 15 words
The interconnected multilayer board according to claim 5, wherein the conductive lines are straight lines.
Claim 10
Dependent Claim 16 words
The interconnected multilayer board according to claim 1, wherein said insulating material contains a reinforcing material.
Claim 11
Dependent Claim 23 words
The interconnected multilayer board according to claim 8, wherein said reinforcing material is at least one of a fibrous material or polyimide powder.
Claim 12
Dependent Claim 15 words
The interconnected multilayer board according to claim 9, wherein said fibrous material is Aramid fibers.
Claim 13
Dependent Claim 16 words
The interconnected multilayer board according to claim 6, wherein said insulating material contains a reinforcing material.
Claim 14
Dependent Claim 23 words
The interconnected multilayer board according to claim 11, wherein said reinforcing material is at least one of a fibrous material or polyimide powder.
Claim 15
Dependent Claim 15 words
The interconnected multilayer board according to claim 12, wherein said fibrous material is Aramid fibers.
Claim 16
Dependent Claim 15 words
The interconnected multilayer board according to claim 6, wherein the conductive lines are straight lines.
Claim 17
Dependent Claim 16 words
The interconnected multilayer board according to claim 7, wherein said insulating material contains a reinforcing material.
Claim 18
Dependent Claim 23 words
The interconnected multilayer board according to claim 15, wherein said reinforcing material is at least one of a fibrous material or polyimide powder.
Claim 19
Dependent Claim 15 words
The interconnected multilayer board according to claim 16, wherein said fibrous material is Aramid fibers.
Claim 20
Dependent Claim 19 words
The interconnected multilayer board according to claim 6, wherein said polymer is either one of fluorine polymer or polyimide.
Claim 21
Dependent Claim 28 words
The interconnected multilayer board according to claim 5, wherein the epoxy resin contains at least one type of rings selected from naphthalene rings, biphenyl rings, and terphenyl rings.
Claim 22
Dependent Claim 16 words
The interconnected multilayer board according to 19, wherein said epoxy resin is a tetrafunctional epoxy resin.
Claim 23
Dependent Claim 16 words
The interconnected multilayer board according to 19, wherein said epoxy resin is a tetrafunctional epoxy resin.
Claim 24
Dependent Claim 34 words
The interconnected multilayer board according to claim 5, wherein the epoxy resin contains at least one type of ring selected from naphthalene rings, biphenyl rings, and terphenyl rings, and is a tetrafunctional epoxy resin.
Claim 25
Dependent Claim 20 words
The interconnected multilayer board according to claim 5, wherein the epoxy resin contains an aromatic diamine as the curing agent.
Claim 26
Dependent Claim 31 words
The interconnected multilayer board according to claim 22, wherein the ring of the aromatic diamine contains at least one type of ring selected from naphthalene rings, biphenyl rings, and terphenyl rings.
Claim 27
Dependent Claim 33 words
The interconnected multilayer board according to claim 23, wherein surfaces of the groups of conductive lines and vias are coated with a polymer whose permitivity is lower than that of said insulating material.
Claim 28
Dependent Claim 22 words
The interconnected multilayer board according to claim 5, wherein said polymer of benzocyclobutene is a copolymer of a benzocyclobutene and a bismaleimide.

References Cited (Backward Citations)

JPS5750489A Cited
JPS5750491A Cited
JPS5750490A Cited
US4999449A Cited
US4790912A Cited
US4946734A Cited
US5055321A Cited
JPH0438157A Cited
JPH0438158A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-04-04 1997-10-04 1998-04-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-04-04 2001-10-04 2002-04-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-04-04 2005-10-04 2006-04-05 $7700.00 Window Closed / Lapsed

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