US5300628A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Selected chelate resins and their use to remove multivalent metal impurities from resist components
Assignee: Olin Microelectronic Chemicals Inc
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Filing: 1992-06-29
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Granted: 1994-04-05
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Expires: 2012-06-29
Abstract
Abstract A chemically modified chelate resin comprising the reaction product of a cross-linked polymer bead chelate resin containing amine reaction sites with an aromatic aldehyde selected from the group consisting of 4-Formyl-benzo-15-Crown-5; 4-Formyl-benzo-18-Crown-6; 3,4-dihydroxybenzaldehyde; 3-ethoxy salicylaldehyde; salicylaldehyde; 2-pyridine carboxaldehyde, 3-pyridine carboxaldehyde; 4-pyridine carboxaldehyde; and pyrrole-2-carboxaldehyde.
Inventors
- 👤 Kenji Honda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 04:28
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0048
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
121 words
A method for removing multivalent metal impurities from a resist component, comprising the steps of: (1) dissolving a resist component containing multivalent metal impurities in a solvent; (2) contacting said resist component solution with a chemically modified chelate resin for a sufficient amount of time to attach at least a portion of said metal impurities onto said chelate resin, wherein said chemically modified resin is the reaction product of a cross-linked polymer bead chelate resin containing amine reaction sites with an aromatic aldehyde selected from the group consisting of 4-Formyl-benzo-15-Crown-5; 4-Formyl-benzo-18-Crown-6; 3,4-dihydroxybenzaldehyde; 3-ethoxy salicylaldehyde; salicylaldehyde; 2-pyridine carboxaldehyde; 3-pyridine carboxaldehyde; 4-pyridine carboxaldehyde; and pyrrole-2-carboxaldehyde; and (3) separating said chemically modified chelate resin bearing said multivalent metal impurities from said resist component solution.
Claim 2
Independent Claim
121 words
A method for removing multivalent metal impurities from a resist component, comprising the steps of: (1) dissolving a resist component containing multivalent metal impurities in a solvent; (2) contacting said resist component solution with a chemically modified chelate resin for a sufficient amount of time to attach at least a portion of said metal impurities onto said chelate resin, wherein said chemically modified resin is the reaction product of a cross-linked polymer bead chelate resin containing amine reaction sites with an aromatic aldehyde selected from the group consisting of 4-Formyl-benzo-15-Crown-5; 4-Formyl-benzo-18-Crown-6; 3,4-dihydroxybenzaldehyde; 3-ethoxy salicylaldehyde; salicylaldehyde; 2-pyridine carboxaldehyde; 3-pyridine carboxaldehyde; 4-pyridine carboxaldehyde; and pyrrole-2-carboxaldehyde; and (3) separating said chemically modified chelate resin bearing said multivalent metal impurities from said resist component solution.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein, said aromatic aldehyde is 3,4-dihydroxybenzaldehyde.
Claim 4
Dependent Claim
31 words
The method of claim 1 wherein said cross-linked polymer bead chelate resin has a highly porous structure, is based on polystyrene cross-linked with divinyl benzene, and has polyamine-type functional chelating groups.
Claim 5
Dependent Claim
39 words
The method of claim 1 wherein said contacting (2) comprises adding said chemically modified chelate resin to said resist component solution and said separating (3) comprises decanting or filtering said resist component solution from said chemically modified chelate resin.
Claim 6
Dependent Claim
31 words
The method of claim 1 wherein said contacting and separating steps comprise passing said resist component solution through at least one packed column or bed containing said chemically modified chelate resin.
Claim 7
Dependent Claim
17 words
The method of claim 1 wherein said solvent comprises ethyl lactate, ethyl 3-ethoxy propionate, or mixtures thereof.
Claim 8
Dependent Claim
32 words
The method of claim 1 wherein said contacting step is sufficient to cause said resist component solution to contain less than 50 ppb of each multivalent metal impurity after said separation step.
Claim 9
Dependent Claim
13 words
The method of claim 1 wherein said resist component is a novolak resin.
Claim 10
Dependent Claim
50 words
A chemically modified chelate resin comprising the reaction product in the presence of an acid of a cross-linked polymer bead chelate resin containing amine reaction sites with an aromatic aldehyde selected from the group consisting of 4-Formyl-benzo-15-Crown-5; 4-Formyl-benzo-18-Crown-6; 3,4-dihydroxybenzaldehyde; 3-ethoxy salicylaldehyde; salicylaldehyde; 2-pyridine carboxaldehyde, 3-pyridine carboxaldehyde; 4-pyridine carboxaldehyde; and pyrrole-2-carboxaldehyde.
Claim 11
Dependent Claim
50 words
A chemically modified chelate resin comprising the reaction product in the presence of an acid of a cross-linked polymer bead chelate resin containing amine reaction sites with an aromatic aldehyde selected from the group consisting of 4-Formyl-benzo-15-Crown-5; 4-Formyl-benzo-18-Crown-6; 3,4-dihydroxybenzaldehyde; 3-ethoxy salicylaldehyde; salicylaldehyde; 2-pyridine carboxaldehyde, 3-pyridine carboxaldehyde; 4-pyridine carboxaldehyde; and pyrrole-2-carboxaldehyde.
Claim 12
Dependent Claim
32 words
The chelate resin of claim 9 wherein said cross-linked polymer bead chelate resin has a highly porous structure, is based on polystyrene cross-linked with divinyl benzene, and has polyamine-type functional chelating groups.
Claim 13
Dependent Claim
11 words
The product of claim 9 wherein said aromatic aldehyde is 3,4-dihydroxybenzaldehyde.
References Cited (Backward Citations)
JPS5774370A
Cited
US4446283A
Cited
EP0251187A2
Cited
JPH01228560A
Cited
US4965167A
Cited
US5073622A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-04-04 | 1997-10-04 | 1998-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-04-04 | 2001-10-04 | 2002-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-04-04 | 2005-10-04 | 2006-04-05 | $7700.00 | Window Closed / Lapsed |