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US5300320A
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Chemical vapor deposition from single organometallic precursors
Assignee: United States, NATIONAL AERONAUTICS AND SPACE ADMINISTRAION, Administrator of
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Filing: 1992-06-23
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Granted: 1994-04-05
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Expires: 2012-06-23
Abstract
Abstract A method is disclosed for forming a passivating/buffer film on a substrate. The method includes heating the substrate to a temperature which is sufficient to cause a volatilized organometallic precursor to pyrolyze and thereby form a passivating/buffer film on a substrate. The organometallic precursor is volatilized at a precursor source. A carrier gas is directed from a carrier gas source across the precursor source to conduct the volatilized precursor from the precursor source to the substrate. The volatilized precursor pyrolyzes and is deposited onto the substrate, thereby forming the passivating/buffer film on the substrate. The passivating/buffer film can be a cubic-phase passivating/buffer film. An oxide layer can also be formed on the passivating/buffer film to thereby form a composite of the substrate, the passivating/buffer film and the oxide layer. Cubic-phase passivating/buffer films formed by the method of the invention can be lattice-matched with the substrate. Electronic or electro-optical circuits or circuit elements can be formed which include passivating/buffer films formed by the method of the invention.
Inventors
- 👤 Andrew R. Barron
- 👤 Michael B. Power
- 👤 Andrew N. MacInnes
- 👤 Aloysius F. Hepp
- 👤 Phillip P. Jenkins
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:33
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/34; H10P14/3402; H10P14/3436; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/305; H10P14/24; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2909; H10P14/2911
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
100 words
A method of forming a passivating/buffer film on a substrate, comprising the steps of: a) heating the substrate to a temperature sufficient to cause a precursor to pyrolyze and be deposited on the substrate; b) volatilizing the precursor, which consists essentially of a single cubane or cubane-forming organometallic compound, at a precursor source; and c) directing a carrier gas from a carrier gas source across the precursor source to conduct the volatilized precursor from the precursor source to the substrate, whereby the volatilized precursor is pyrolyzed and is deposited onto the substrate, thereby forming the passivating/buffer film on said substrate.
Claim 2
Independent Claim
100 words
A method of forming a passivating/buffer film on a substrate, comprising the steps of: a) heating the substrate to a temperature sufficient to cause a precursor to pyrolyze and be deposited on the substrate; b) volatilizing the precursor, which consists essentially of a single cubane or cubane-forming organometallic compound, at a precursor source; and c) directing a carrier gas from a carrier gas source across the precursor source to conduct the volatilized precursor from the precursor source to the substrate, whereby the volatilized precursor is pyrolyzed and is deposited onto the substrate, thereby forming the passivating/buffer film on said substrate.
Claim 3
Dependent Claim
14 words
The method of claim 1 wherein the organometallic compound is a cubane organometallic compound.
Claim 4
Dependent Claim
14 words
The method of claim 2 wherein the precursor is (( t Bu)GaS) 4 .
Claim 5
Dependent Claim
14 words
The method of claim 2 wherein the precursor is (( t Bu)AlS) 4 .
Claim 6
Dependent Claim
14 words
The method of claim 2 wherein the precursor is (( t Bu)GaSe) 4 .
Claim 7
Dependent Claim
14 words
The method of claim 2 wherein the precursor is (( t Bu)GaTe) 4 .
Claim 8
Dependent Claim
14 words
The method of claim 1 wherein the organometallic compound is a cubane-forming organometallic compound.
Claim 9
Dependent Claim
16 words
The method of claim 7 wherein the cubane-forming organometallic compound is (( t Bu)GaS) 4 .
Claim 10
Dependent Claim
10 words
The method of claim 1 wherein the precursor includes selenium.
Claim 11
Dependent Claim
10 words
The method of claim 1 wherein the precursor includes tellurium.
Claim 12
Dependent Claim
10 words
The method of claim 1 wherein the precursor includes gallium.
Claim 13
Dependent Claim
10 words
The method of claim 1 wherein the precursor includes aluminum.
Claim 14
Dependent Claim
16 words
The method of claim 1 wherein the precursor further includes at least one tertiary butyl group.
Claim 15
Dependent Claim
11 words
The method of claim 13 wherein the substrate includes gallium arsenide.
Claim 16
Dependent Claim
11 words
The method of claim 13 wherein the substrate further includes aluminum.
Claim 17
Dependent Claim
15 words
The method of claim 15 wherein the aluminum is a component of an aluminum-containing compound.
Claim 18
Dependent Claim
26 words
The method of claim 1 wherein the precursor is (( n Bu)InSe) x and wherein x is in the range of between about four and eight.
Claim 19
Dependent Claim
14 words
The method of claim 1 wherein the precursor is (( t Bu)GaS) 7 .
Claim 20
Dependent Claim
26 words
The method of claim 1 wherein the precursor is (( n Bu)InS) x and wherein x is in the range of between about four and eight.
Claim 21
Dependent Claim
18 words
The method of claim 1 wherein the precursor is (( t Bu) 2 In(S t Bu)) 2 .
Claim 22
Dependent Claim
18 words
The method of claim 1 wherein the precursor is (( n Bu) 2 In(S t Bu)) 3 .
Claim 23
Dependent Claim
18 words
The method of claim 1 wherein the precursor is (( t Bu) 2 Ga(S t Bu)) 2 .
Claim 24
Dependent Claim
14 words
The method of claim 1 wherein the film formed is lattice-matched with the substrate.
References Cited (Backward Citations)
US4477311A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-04-04 | 1997-10-04 | 1998-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-04-04 | 2001-10-04 | 2002-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-04-04 | 2005-10-04 | 2006-04-05 | $7700.00 | Window Closed / Lapsed |