Patent US5300130A successfully refreshed from Google Patents.
US5300130A
Expired / Lapsed
US
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Polishing material
Assignee: Saint Gobain Ceramics and Plastics Inc
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Filing: 1993-07-26
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Granted: 1994-04-05
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Expires: 2013-07-26
Abstract
Abstract A novel polishing slurry for particularly hard materials such a silicon carbide has been found. The slurry comprises diamond particles with a median particle size of around a micron and alpha alumina particles with a median size of from about 20 to about 200 nanometers.
Inventors
- 👤 David Rostoker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 07:59
CPC Classifications
C; C09; C09K; C09K3/00; C09K3/14; C09G; C09G1/00; C09G1/02
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
59 words
A polishing slurry comprising diamond particles having a particle size less than 5 microns, alpha alumina particles with an average particle size of from 20 to 200 nanometers and an amount of a suspending agent effective to maintain the diamond particles in suspension; the slurry having a diamond to alumina weight ratio of from about 1:30 to about 1:90.
Claim 2
Dependent Claim
59 words
A polishing slurry comprising diamond particles having a particle size less than 5 microns, alpha alumina particles with an average particle size of from 20 to 200 nanometers and an amount of a suspending agent effective to maintain the diamond particles in suspension; the slurry having a diamond to alumina weight ratio of from about 1:30 to about 1:90.
Claim 3
Dependent Claim
25 words
A polishing slurry according to claim 1 in which the diamond particle have a median particle size of from about 0.5 to about 1.5 micron.
Claim 4
Dependent Claim
27 words
A polishing slurry according to claim 1 in which the alpha alumina particles have a median particle size of from about 40 to 5 about 100 nanometers.
Claim 5
Dependent Claim
22 words
A polishing slurry according to claim 1 in which the diamond to alumina weight ratio is from about 1:50 to about 1:80.
Claim 6
Dependent Claim
22 words
A polishing slurry according to claim 1 in which the solids content is from about 40 to about 80 grams per liter.
Claim 7
Dependent Claim
15 words
A polishing slurry according to claim 1 in which the suspending agent is xanthan gum.
Claim 8
Dependent Claim
23 words
A polishing slurry according to claim 6 in which the amount of the xanthan gum is from about 1 to about 5 gm/l.
Claim 9
Dependent Claim
81 words
A polishing slurry comprising from about 1 to 10 carat/liter of diamond particles having a median particle size of from about 0.2 to about 1.0 micron, from about 30 to about 90 grams/liter of alpha alumina particles with an median particle size of from about 40 to about 100 nanometers and an amount of a suspending agent effective to maintain the diamond particles in suspension; the slurry having a diamond to alumina weight ratio of from about 1:40 to about 1:80.
Claim 10
Dependent Claim
81 words
A polishing slurry comprising from about 1 to 10 carat/liter of diamond particles having a median particle size of from about 0.2 to about 1.0 micron, from about 30 to about 90 grams/liter of alpha alumina particles with an median particle size of from about 40 to about 100 nanometers and an amount of a suspending agent effective to maintain the diamond particles in suspension; the slurry having a diamond to alumina weight ratio of from about 1:40 to about 1:80.
Claim 11
Dependent Claim
15 words
A polishing slurry according to claim 8 in which the suspending agent is xanthan gum.
Claim 12
Dependent Claim
23 words
A polishing slurry according to claim 9 which comprises from about 1 to about 5 gm/liter of xanthan gum as the suspending agent.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-04-04 | 1997-10-04 | 1998-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-04-04 | 2001-10-04 | 2002-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-04-04 | 2005-10-04 | 2006-04-05 | $7700.00 | Window Closed / Lapsed |