US5297910A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Transportation-transfer device for an object of treatment
Assignee: Tokyo Electron Ltd
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Filing: 1992-02-13
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Granted: 1994-03-29
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Expires: 2012-02-13
Abstract
Abstract A device for transporting and transferring objects of treatment arranged in a down flow to a plurality of treatment sections for treating the objects comprises a transportation section movable between the treatment sections, a first drive mechanism for moving the transportation section, a first arm movably attached to the transportation section and used for those objects of treatment which are adjusted to a predetermined temperature in the treatment sections, a second arm movably attached to the transportation section and used for the other objects of treatment than the ones adjusted in temperature, and a second drive mechanism for separately moving the first and second arms.
Inventors
- 👤 Kazutoshi Yoshioka
- 👤 Kenji Yokomizo
- 👤 Masami Akimoto
- 👤 Yuji Yoshimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 01:51
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0456; H10P72/30; H10P72/33; H10P72/3302; H10P72/3311; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
172 words
A device for transporting and transferring objects to be treated arranged in a down flow to a plurality of treatment sections for treating the objects, comprising: a transportation section movable between the treatment sections; first drive means for moving the transportation section; a first arm movably attached to the transportation section and used for those objects to be treated which are adjusted to a predetermined temperature in the treatment sections; a second arm movably attached to the transportation section and used for the other objects to be treated than the ones adjusted in temperature; second drive means for separately moving the first and second arms; and heat insulation means arranged between the first and second arms, the heat insulation means being provided to face the first and second arms for preventing a transmission of radiation heat from an object supported by the second arm to an object supported by the first arm; wherein said first arm is located on the upper-course side of the second arm with respect to the down flow.
Claim 2
Independent Claim
172 words
A device for transporting and transferring objects to be treated arranged in a down flow to a plurality of treatment sections for treating the objects, comprising: a transportation section movable between the treatment sections; first drive means for moving the transportation section; a first arm movably attached to the transportation section and used for those objects to be treated which are adjusted to a predetermined temperature in the treatment sections; a second arm movably attached to the transportation section and used for the other objects to be treated than the ones adjusted in temperature; second drive means for separately moving the first and second arms; and heat insulation means arranged between the first and second arms, the heat insulation means being provided to face the first and second arms for preventing a transmission of radiation heat from an object supported by the second arm to an object supported by the first arm; wherein said first arm is located on the upper-course side of the second arm with respect to the down flow.
Claim 3
Independent Claim
139 words
A device for transporting and transferring objects to be treated arranged in a down flow to a plurality of treatment sections for treating the objects, comprising: a transportation section movable between the treatment sections; first drive means for moving the transportation section; a first arm movably attached to the transportation section and used for those objects to be treated which are adjusted to a predetermined temperature in the treatment sections; a second arm movably attached to the transportation section and used for the other objects to be treated than the ones adjusted in temperature; second drive means for separately moving the first and second arms; and heat insulation means arranged between the first and second arms; wherein said heat insulation means includes a ring-shaped frame and two heat insulator plates attached individually to the opposite surfaces of the frame.
Claim 4
Independent Claim
139 words
A device for transporting and transferring objects to be treated arranged in a down flow to a plurality of treatment sections for treating the objects, comprising: a transportation section movable between the treatment sections; first drive means for moving the transportation section; a first arm movably attached to the transportation section and used for those objects to be treated which are adjusted to a predetermined temperature in the treatment sections; a second arm movably attached to the transportation section and used for the other objects to be treated than the ones adjusted in temperature; second drive means for separately moving the first and second arms; and heat insulation means arranged between the first and second arms; wherein said heat insulation means includes a ring-shaped frame and two heat insulator plates attached individually to the opposite surfaces of the frame.
Claim 5
Independent Claim
129 words
A device for transporting and transferring objects to be treated arranged in a down flow to a plurality of treatment sections for treating the objects, comprising: a transportation section movable between the treatment sections; first drive means for moving the transportation section; a first arm movably attached to the transportation section and used for those objects to be treated which are adjusted to a predetermined temperature in the treatment sections; a second arm movably attached to the transportation section and used for the other objects to be treated than the ones adjusted in temperature; second drive means for separately moving the first and second arms; and heat insulation means arranged between the first and second arms; wherein said heating insulation means has passages through which the down flow passes.
Claim 6
Independent Claim
129 words
A device for transporting and transferring objects to be treated arranged in a down flow to a plurality of treatment sections for treating the objects, comprising: a transportation section movable between the treatment sections; first drive means for moving the transportation section; a first arm movably attached to the transportation section and used for those objects to be treated which are adjusted to a predetermined temperature in the treatment sections; a second arm movably attached to the transportation section and used for the other objects to be treated than the ones adjusted in temperature; second drive means for separately moving the first and second arms; and heat insulation means arranged between the first and second arms; wherein said heating insulation means has passages through which the down flow passes.
Claim 7
Dependent Claim
22 words
A transportation-transfer device according to claim 3, wherein said passages include holes, each having a diameter of 10 mm to 30 mm.
Claim 8
Dependent Claim
19 words
A transportation-transfer device according to claim 1, further comprising control means for controlling the first and second drive means.
Claim 9
Dependent Claim
44 words
A transportation-transfer device according to claim 5, wherein said control means includes means for varying the acceleration of at least one of the transportation section, first arm, and second arm during at least one of an acceleration and deceleration period for the movement thereof.
Claim 10
Dependent Claim
20 words
A transportation-transfer device according to claim 6, wherein said control means includes means for varying the acceleration in two stages.
Claim 11
Dependent Claim
45 words
A transportation-transfer device according to claim 5, wherein said control means includes means for changing the movement mode of at least one of the transportation unit, first arm, and second arm, depending on whether or not the objects are held by means of the arms.
Claim 12
Dependent Claim
21 words
A transportation-transfer device according to claim 8, wherein said movement mode changing means includes a memory connected to the control means.
Claim 13
Dependent Claim
26 words
A transportation-transfer device according to claim 8, wherein said movement mode changing means includes sensing means for detecting the objects held by means of the arms.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-28 | 1997-09-27 | 1998-03-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-28 | 2001-09-27 | 2002-03-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-28 | 2005-09-27 | 2006-03-29 | $7700.00 | Window Closed / Lapsed |