US5294464A
Expired / Lapsed
US
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Method for producing a reflective surface on a substrate
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1993-02-11
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Granted: 1994-03-15
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Expires: 2013-02-11
Abstract
Abstract A process gas atmosphere consisting essentially of (a) organosiloxanes and inert gas, or (b) pure silane or (c) silane plus inert gas is introduced into a vacuum chamber and exposed to microwaves to produce an electro-cyclotron resonance in a plasma for coating substrates. The process is useful for producing an adherent coating on a plastic substrate, especially an intermediate coating for a reflective coating in an automotive headlamp.
Inventors
- 👤 Michael Geisler
- 👤 Rudolf Koetter-Faulhaber
- 👤 Susanne Wuerz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:00
CPC Classifications
C; C08; C08J; C08J7/00; C08J7/12; C08J7/123; B; B05; B05D; B05D1/00; B05D1/62; C09; C09D; C09D4/00; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
82 words
Method for producing a reflective surface on a substrate, said method comprising the steps of placing a plastic substrate to be coated in a vacuum chamber, evacuating said chamber, introducing into said chamber a process gas atmosphere which consists essentially of one of (a) organosiloxanes plus helium, (b) pure silane, and (c) silane plus helium, generating a plasma from said process gas atmosphere, thereby producing an adhesion promoting layer on said substrate, and applying a reflective layer on said adhesion promoting layer.
Claim 2
Dependent Claim
82 words
Method for producing a reflective surface on a substrate, said method comprising the steps of placing a plastic substrate to be coated in a vacuum chamber, evacuating said chamber, introducing into said chamber a process gas atmosphere which consists essentially of one of (a) organosiloxanes plus helium, (b) pure silane, and (c) silane plus helium, generating a plasma from said process gas atmosphere, thereby producing an adhesion promoting layer on said substrate, and applying a reflective layer on said adhesion promoting layer.
Claim 3
Dependent Claim
16 words
Method as in claim 1 wherein said process gas atmosphere consists essentially of tetramethyldisiloxane and helium.
Claim 4
Dependent Claim
18 words
Method as in claim 1 wherein said process gas is at a pressure between 0.01 and 100 Pa.
Claim 5
Dependent Claim
23 words
Method as in claim 1 wherein said microwaves input electrical power of 1 kW to 50 kW per cubic meter of plasma volume.
Claim 6
Dependent Claim
32 words
Method as in claim 1 wherein said process gas atmosphere is pumped through said vacuum chamber at a mass flow between 50 and 23,000 hPa* l/min per cubic meter of plasma volume.
Claim 7
Dependent Claim
36 words
Method as in claim 5 wherein said process gas is pumped through said chamber and said plasma is maintained until said process gas produces a coating between 60 Å and 120 Å thick on said substrate.
Claim 8
Dependent Claim
13 words
Method as in claim 1 wherein said reflective layer is a metallic layer.
Claim 9
Dependent Claim
11 words
Method as in claim 7 wherein said metallic coating is aluminum.
Claim 10
Dependent Claim
78 words
Method as in claim 1 comprising the additional step of applying a protective layer over said metallic layer, said protective layer being applied by the steps of introducing into said chamber a process gas atmosphere which consists essentially of one of (a) organosiloxanes plus inert gas, (b) pure silane, and (c) silane plus inert gas, and exposing said process gas atmosphere to microwaves in order to generate a plasma, thereby producing a protective layer on said metallic layer.
Claim 11
Dependent Claim
37 words
Method as in claim 9 wherein said protective layer is applied by introducing into said chamber a process gas atmosphere consisting essentially of one of (a) organosiloxanes plus helium, (b) pure silane, and (c) silane plus helium.
Claim 12
Dependent Claim
26 words
Method as in claim 10 wherein said protective layer is applied by introducing into said chamber a process gas atmosphere consisting essentially of tetramethyldisiloxane and helium.
Claim 13
Dependent Claim
15 words
Method as in claim 1 wherein said process gas atmosphere consists essentially of pure silane.
Claim 14
Dependent Claim
16 words
Method as in claim 1 wherein said process gas atmosphere consists essentially of silane and helium.
Claim 15
Dependent Claim
16 words
Method as in claim 1 wherein said process gas atmosphere consists essentially of organosiloxanes and helium.
Claim 16
Dependent Claim
18 words
Method as in claim 1 wherein said plasma is generated by exposing said process gas atmosphere to microwaves.
Claim 17
Dependent Claim
26 words
Method as in claim 1 wherein said protective layer is applied by introducing into said chamber a process gas atmosphere consisting essentially of organosiloxanes plus helium.
Claim 18
Dependent Claim
10 words
Method as in claim 1 wherein said substrate is plastic.
Claim 19
Dependent Claim
25 words
Method as in claim 1 wherein said protective layer is applied by introducing into said chamber a process gas atmosphere consisting essentially of pure silane.
Claim 20
Dependent Claim
26 words
Method as in claim 1 wherein said protective layer is applied by introducing into said chamber a process gas atmosphere consisting essentially of silane and helium.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-14 | 1997-09-13 | 1998-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-14 | 2001-09-13 | 2002-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-14 | 2005-09-13 | 2006-03-15 | $7700.00 | Window Closed / Lapsed |