US5291012A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High resolution optical microscope and irradiation spot beam-forming mask
Assignee: JAPAN SYSNTHETIC RUBBER Co Ltd
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Filing: 1992-04-23
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Granted: 1994-03-01
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Expires: 2012-04-23
Abstract
Abstract A high resolution optical microscope consists of an irradiation spot beam-forming mask which is disposed in a dark or a bright field, whereby a diameter of each of a plurality of irradiation spot beams onto an object to be measured is made smaller than a size of the object, beyond Rayleigh's resolution limit. In the irradiation spot beam-forming mask, a phase array is regularly disposed in a two-dimensional direction so that neighboring portions of each of the irradiation spot beams are optically phase-shifted from one another at 180°. Thus, a wide observation surface and a prompt measurement can be performed with a high resolution of 0.1 μm or less, far beyond Rayleigh's resolution limit.
Inventors
- 👤 Isao Shimizu
- 👤 Seiji Aotani
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:54
CPC Classifications
G; G02; G02B; G02B21/00; G02B21/06; G02B21/08; G02B21/12; G02B21/125
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
105 words
A high resolution optical microscope comprising: means for forming an irradiation spot beam in such a way that a phase arrangement is regularly arranged in the two-dimensional direction so that each of neighboring portions of a plurality of coherent irradiation spot beams for irradiating onto an object to be measured is optically phase-shifted from one another at 180°; and means for converging said plurality of coherent irradiation spot beams so that a diameter of each of said plurality of coherent irradiation spot beams is made smaller than a size of said object and for illuminating said object by said plurality of converged irradiation spot beams.
Claim 2
Dependent Claim
105 words
A high resolution optical microscope comprising: means for forming an irradiation spot beam in such a way that a phase arrangement is regularly arranged in the two-dimensional direction so that each of neighboring portions of a plurality of coherent irradiation spot beams for irradiating onto an object to be measured is optically phase-shifted from one another at 180°; and means for converging said plurality of coherent irradiation spot beams so that a diameter of each of said plurality of coherent irradiation spot beams is made smaller than a size of said object and for illuminating said object by said plurality of converged irradiation spot beams.
Claim 3
Dependent Claim
81 words
A high resolution optical microscope as claimed in claim 1, wherein said means for forming an irradiation spot beam comprises: a light source for generating a coherent light beam; and an irradiation spot beam-forming mask which forms said plurality of irradiation spot beams by transmitting or reflecting said coherent light beam and is regularly arranged in the two-dimensional direction so that each of neighboring portions of said plurality of coherent irradiation spot beams is optically phase-shifted from one another at 180°.
Claim 4
Dependent Claim
49 words
A high resolution optical microscope as claimed in claim 2, wherein said irradiation spot beam-forming mask is disposed either in a bright field position in which one or more beams pass only once or in a dark field position in which the same one or more beams pass twice.
Claim 5
Dependent Claim
68 words
A high resolution optical microscope as claimed in claim 2, wherein said irradiation spot beam-forming mask is disposed either in a upstream or in a downstream of a half mirror or a beam splitter being placed on an optical path, with respect to said light source, and said object is mounted on a stage which can travel for scanning in the two-dimensional direction or in the three-dimensional direction.
Claim 6
Dependent Claim
20 words
A high resolution optical microscope as claimed in claim 1, wherein said converging and illuminating means is a lens system.
Claim 7
Dependent Claim
34 words
A high resolution optical microscope as claimed in claim 5, further comprising minimum shifting means for slightly moving or vibrating said lens system in a direction of the optical axis of said lens system.
Claim 8
Dependent Claim
52 words
A high resolution optical microscope as claimed in claim 6, further comprising: photoelectric transducing means for transducing reflected light beams from said object via said lens system into image signals; and surface foreign matter checking means for processing said image signals and for checking one or more foreign matters on said object.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-28 | 1997-08-30 | 1998-03-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-28 | 2001-08-30 | 2002-03-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-28 | 2005-08-30 | 2006-03-01 | $7700.00 | Window Closed / Lapsed |