Patent US5290400A successfully refreshed from Google Patents.
US5290400A
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Fabrication method for microelectromechanical transducer
Assignee: RTI International
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Filing: 1992-12-17
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Granted: 1994-03-01
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Expires: 2012-12-17
Abstract
Abstract A microelectromechanical transducer including a plurality of strips arranged in an array and maintained in a closely spaced relation by a plurality of spacers. An electrically conductive layer on portions of the strips and spacers distributes electrical signal within the transducer to cause adjacent portions of the strips to move together. The strips and spacers may be formed from a common dielectric layer using microelectronic fabrication techniques. Two transducers may be coupled at an angle offset from parallel for two-dimensional micropositioning. A photodetector and Fresnel lens may be combined with the micropositioner using the transducers for optical scanning microscopy.
Inventors
- 👤 Stephen M. Bobbio
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:34
CPC Classifications
H; H02; H02N; H02N1/00; H02N1/002; H02N1/006; H02N1/008; B; B06; B06B; B06B1/00; B06B1/02; B06B1/0292; H04; H04R; H04R19/00
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
54 words
A method for making an electromechanical transducer comprising the steps of: forming on a substrate a dielectric layer having a plurality of strips maintained in a closely spaced relation by a plurality of spacers; applying a conductive layer to predetermined portions of the strips and spacers; and separating the dielectric layer from the substrate.
Claim 2
Independent Claim
54 words
A method for making an electromechanical transducer comprising the steps of: forming on a substrate a dielectric layer having a plurality of strips maintained in a closely spaced relation by a plurality of spacers; applying a conductive layer to predetermined portions of the strips and spacers; and separating the dielectric layer from the substrate.
Claim 3
Dependent Claim
54 words
The method of claim 1 wherein said forming a dielectric layer step comprises the steps of: forming on the substrate a dielectric support layer; and etching predetermined portions of the dielectric support layer to form the dielectric layer having the plurality of strips maintained in the closely spaced relation by the plurality of spacers.
Claim 4
Dependent Claim
44 words
The method of claim 1 wherein the step of forming the dielectric layer is preceded by the step of forming on the substrate a buffer layer, and wherein the step of separating the multilevel support structure comprises the step of etching the buffer layer.
Claim 5
Independent Claim
59 words
A method of making an electromechanical transducer comprising the steps of: forming on a substrate a multilevel support structure having predetermined raked portions; depositing a metal on the multilevel support structure at an angle from normal thereto so that the raked portions shade predetermined portions of the multilevel support structure; and separating the multilevel support structure from the substrate.
Claim 6
Independent Claim
59 words
A method of making an electromechanical transducer comprising the steps of: forming on a substrate a multilevel support structure having predetermined raked portions; depositing a metal on the multilevel support structure at an angle from normal thereto so that the raked portions shade predetermined portions of the multilevel support structure; and separating the multilevel support structure from the substrate.
Claim 7
Dependent Claim
56 words
The method of claim 4 wherein said forming a multilevel support structure step comprises the steps of: forming on the substrate a dielectric support layer; and etching predetermined portions of the dielectric support layer to form the multilevel support structure having a plurality of strips maintained in a closely spaced relation by a plurality of spacers.
Claim 8
Dependent Claim
46 words
The method of claim 5 wherein the step of forming the dielectric support structure layer is preceded by the step of forming on the substrate a buffer layer, and wherein the step of separating the multilevel support structure comprises the step of etching the buffer layer.
Claim 9
Independent Claim
69 words
A method of making an electromechanical transducer comprising the steps of: forming on a substrate a dielectric layer; forming a multilevel mask on predetermined portions of the dielectric layer; etching predetermined portions of the mask and dielectric layer to form a multilevel support structure having a plurality of strips maintained in a closely spaced relation by a plurality of spacers; and separating the multilevel support structure from the substrate.
Claim 10
Independent Claim
69 words
A method of making an electromechanical transducer comprising the steps of: forming on a substrate a dielectric layer; forming a multilevel mask on predetermined portions of the dielectric layer; etching predetermined portions of the mask and dielectric layer to form a multilevel support structure having a plurality of strips maintained in a closely spaced relation by a plurality of spacers; and separating the multilevel support structure from the substrate.
Claim 11
Dependent Claim
22 words
The method of claim 7 further comprising the step of applying a conductive layer to predetermined portions of the strips and spacers.
Claim 12
Dependent Claim
44 words
The method of claim 7 wherein the step of forming the dielectric layer is preceded by the step of forming on the substrate a buffer layer, and wherein the step of separating the multilevel support structure comprises the step of etching the buffer layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-02-28 | 1997-08-30 | 1998-03-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-28 | 2001-08-30 | 2002-03-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-28 | 2005-08-30 | 2006-03-01 | $7700.00 | Window Closed / Lapsed |