US5289035A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Tri-layer titanium coating for an aluminum layer of a semiconductor device
Assignee: Intel Corp
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Filing: 1992-07-15
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Granted: 1994-02-22
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Expires: 2012-07-15
Abstract
Abstract A tri-layer titanium coating for an aluminum layer of a semiconductor device. An aluminum layer used for interconnecting individual devices of an integrated circuit is formed on a semiconductor material. A first titanium nitride layer is deposited on the aluminum layer. A titanium layer is deposited on the first titanium nitride layer. A second titanium nitride layer is then deposited on the titanium layer. The tri-layer titanium coating prevents the formation of Al 2 O 3 and AIF 3 during the etching of a via hole in an intermetal dielectric layer deposited above the second titanium nitride layer.
Inventors
- 👤 Melton C. Bost
- 👤 Simon Yang
- 👤 Yeochung Yen
- 👤 Jim Baldo
- 👤 Barbara Greenebaum
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 02:23
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/038; H10W20/071; H10W20/081; H10W20/083; H10W20/40; H10W20/41; H10W20/425; H10W20/44; H10W20/4473; H10W20/0375; Y; Y10; Y10S; Y10S257/00; Y10S257/913; Y10S257/915
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
40 words
A tri-layer titanium coating for an aluminum layer of an interconnection comprising: a first TiN layer deposited on said aluminum layer; a Ti layer deposited on said first TiN layer; and a second TiN layer deposited on said Ti layer.
Claim 2
Dependent Claim
40 words
A tri-layer titanium coating for an aluminum layer of an interconnection comprising: a first TiN layer deposited on said aluminum layer; a Ti layer deposited on said first TiN layer; and a second TiN layer deposited on said Ti layer.
Claim 3
Dependent Claim
91 words
A tri-layer titanium coating for an aluminum layer used in interconnecting semiconductor devices of an integrated circuit comprising: a first TiN layer deposited on said aluminum layer, said first TiN layer thick enough to ensure no interaction between said aluminum layer and a subsequently formed Ti layer; a Ti layer deposited on said first TiN layer, said Ti layer thick enough to act as an etch stop; and a second TiN layer deposited on said Ti layer, said second TiN layer having a thickness optimized to minimize optical reflection during alignment.
Claim 4
Dependent Claim
91 words
A tri-layer titanium coating for an aluminum layer used in interconnecting semiconductor devices of an integrated circuit comprising: a first TiN layer deposited on said aluminum layer, said first TiN layer thick enough to ensure no interaction between said aluminum layer and a subsequently formed Ti layer; a Ti layer deposited on said first TiN layer, said Ti layer thick enough to act as an etch stop; and a second TiN layer deposited on said Ti layer, said second TiN layer having a thickness optimized to minimize optical reflection during alignment.
Claim 5
Dependent Claim
58 words
A tri-layer titanium coating for an aluminum layer used in interconnecting semiconductor devices of an integrated circuit comprising: a first TiN layer of approximately 450 ○ deposited on said aluminum layer; a Ti layer of approximately 1000 Å deposited on said first TiN layer; and a second TiN layer of approximately 450 Å deposited on said Ti layer.
Claim 6
Dependent Claim
58 words
A tri-layer titanium coating for an aluminum layer used in interconnecting semiconductor devices of an integrated circuit comprising: a first TiN layer of approximately 450 ○ deposited on said aluminum layer; a Ti layer of approximately 1000 Å deposited on said first TiN layer; and a second TiN layer of approximately 450 Å deposited on said Ti layer.
References Cited (Backward Citations)
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Cited
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JPH01312852A
Cited
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US5124780A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-21 | 1997-08-23 | 1998-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-21 | 2001-08-23 | 2002-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-21 | 2005-08-23 | 2006-02-22 | $7700.00 | Window Closed / Lapsed |