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US5288568A
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Optical spacer method for preventing null formation in phase shifted photomasks
Assignee: Micron Technology Inc
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Filing: 1992-01-30
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Granted: 1994-02-22
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Expires: 2012-01-30
Abstract
Abstract A method of preventing null formation is performed on a phase shifted photomask including a clear quartz substrate, dark chrome feature features, and alternating clear phase shifters raised from the substrate. The phase shifter features are terminated in a transmissive, optically clear edge. To prevent null formation and consequent formation of stringers on the surface of the integrated circuit, the substantially vertical edge of the optically clear end of the phase shifter is tapered. The slope at any point along the tapered edge between the photomask substrate and the phase shifter is set to an angle, typically less than forty-five degrees, shallow enough that the point spread function does not produce an image. The point spread function of the imaging system spreads out the null, which is therefore not printed into the photoresist layer on the integrated circuit. The tapered edge of the phase shifter is created by either discrete or continuous etching methods. Both methods create the phase shifter and tapered edges simultaneously and are compatible with photomasks having either additive or subtractive type phase shifters.
Inventors
- 👤 David A. Cathey, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 05:32
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/26; G03F1/30
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
168 words
A method of preventing null formation in a photoresist layer on an integrated circuit substrate caused by optically clear edges in a phase shifted photomask, the method comprising the steps of: providing a photomask having a clear substrate and a plurality of dark features; providing a plurality of clear phase shifting features raised from a surface of the substrate; terminating an end of at least one of the phase shifting features in an optically clear edge; covering the entire surface of the photomask with an optical spacer layer; etching the optical spacer layer sufficiently until the surface of the clear substrate and a surface of the optically clear phase shifting feature are exposed and an optical spacer remains adjacent the optically clear edge of the phase shifting feature; and exposing the photoresist layer through phase shifted photomask; the optical spacer having a smoothly curved convex profile such that a null formed by the optically clear edge is spread out and is therefore not printed into the photoresist layer.
Claim 2
Independent Claim
168 words
A method of preventing null formation in a photoresist layer on an integrated circuit substrate caused by optically clear edges in a phase shifted photomask, the method comprising the steps of: providing a photomask having a clear substrate and a plurality of dark features; providing a plurality of clear phase shifting features raised from a surface of the substrate; terminating an end of at least one of the phase shifting features in an optically clear edge; covering the entire surface of the photomask with an optical spacer layer; etching the optical spacer layer sufficiently until the surface of the clear substrate and a surface of the optically clear phase shifting feature are exposed and an optical spacer remains adjacent the optically clear edge of the phase shifting feature; and exposing the photoresist layer through phase shifted photomask; the optical spacer having a smoothly curved convex profile such that a null formed by the optically clear edge is spread out and is therefore not printed into the photoresist layer.
Claim 3
Dependent Claim
51 words
The method of claim 1 in which the adding step comprises the steps of: covering the entire surface of the photomask with an optical spacer layer; isotropically etching the optical spacer layer sufficiently to expose the surface of the clear substrate and the surface of the optically clear phase shifting feature.
Claim 4
Dependent Claim
26 words
The method of claim 1 in which the step of providing a photomask comprises providing an optically clear quartz substrate and a plurality of dark features.
Claim 5
Dependent Claim
39 words
The method of claim 3 in which the step of covering the entire surface of the photomask with an optical spacer layer comprises covering the entire surface of the photomask with a layer of Si 3 N 4 .
Claim 6
Dependent Claim
45 words
The method of claim 3 in which the step of covering the entire surface of the photomask with an optical spacer layer comprises covering the entire surface of the photomask with a layer of Si 3 N 4 between about 1500 and 2000 Angstroms thick.
Claim 7
Dependent Claim
29 words
The method of claim 1 in which the step of providing a photomask comprises providing an optically clear Si 3 N 4 substrate and a plurality of dark features.
Claim 8
Dependent Claim
37 words
The method of claim 6 in which the step of covering the entire surface of the photomask with an optical spacer layer comprises covering the entire surface of the photomask with a layer of SiO 2 .
Claim 9
Dependent Claim
43 words
The method of claim 6 in which the step of covering the entire surface of the photomask with an optical spacer layer comprises covering the entire surface of the photomask with a layer of SiO 2 between about 1500 and 2000 Angstroms thick.
Claim 10
Dependent Claim
27 words
The method of claim 1 in which the step of providing phase shifting features comprises adding material to the substrate to create the raised phase shifting features.
Claim 11
Dependent Claim
53 words
A phase shifted photomask comprising: a photomask having a clear substrate and a plurality of dark features; a plurality of clear phase shifting features raised from the substrate having at least one optically clear edge; and a smoothly curved convex optical spacer adjacent to the optically clear edge of the phase shifting feature.
Claim 12
Dependent Claim
53 words
A phase shifted photomask comprising: a photomask having a clear substrate and a plurality of dark features; a plurality of clear phase shifting features raised from the substrate having at least one optically clear edge; and a smoothly curved convex optical spacer adjacent to the optically clear edge of the phase shifting feature.
References Cited (Backward Citations)
US5045417A
Cited
US4912022A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-21 | 1997-08-23 | 1998-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-21 | 2001-08-23 | 2002-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-21 | 2005-08-23 | 2006-02-22 | $7700.00 | Window Closed / Lapsed |