US5287082A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Submicron isolated, released resistor structure
Assignee: Cornell Research Foundation Inc
•
Filing: 1992-07-02
•
Granted: 1994-02-15
•
Expires: 2012-07-02
Abstract
Abstract A submicron resistor having negligible parasitic capacitance includes an isolated released beam carried on a single crystal silicon wafer. The resistor is fabricated by defining a resistor region in the substrate, doping the region to produce the desired resistivity, and etching around the region to produce a resistive island. The island is then isolated from the substrate by oxidation, and is released by removing the oxide to produce an isolated, released resistor beam.
Inventors
- 👤 Susanne C. Arney
- 👤 Noel C. MacDonald
- 👤 Jun J. Yao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:13
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/40; H10D1/47
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
54 words
A submicron resistor element for integrated circuit structures, comprising: a single crystal silicon substrate; a doped, electrically isolated, released single crystal silicon resistive beam secured to said substrate, said released beam being surrounded by air and spaced sufficiently far from said substrate to substantially eliminate parasitic capacitance between the beam and the adjacent substrate.
Claim 2
Dependent Claim
54 words
A submicron resistor element for integrated circuit structures, comprising: a single crystal silicon substrate; a doped, electrically isolated, released single crystal silicon resistive beam secured to said substrate, said released beam being surrounded by air and spaced sufficiently far from said substrate to substantially eliminate parasitic capacitance between the beam and the adjacent substrate.
Claim 3
Dependent Claim
14 words
The resistor of claim 1, wherein said released beam has a submicron cross-sectional area.
Claim 4
Dependent Claim
21 words
The resistor of claim wherein said released beam includes a dielectric coating which stiffens the beam against vibrational and bending motion.
Claim 5
Dependent Claim
23 words
The resistor of claim 1, wherein said released beam is folded to provide an extended beam length within the boundaries of said substrate.
Claim 6
Dependent Claim
19 words
The resistor of claim 4, wherein said released beam has cross-sectional dimension of about 0.1 micron by 0.1 micron.
Claim 7
Dependent Claim
19 words
The resistor of claim 1 wherein said resistor element further includes means supporting said released beam above said substrate.
Claim 8
Dependent Claim
22 words
The resistor of claim 6, wherein said means supporting said released beam comprises pedestal means extending between said beam and said substrate.
Claim 9
Dependent Claim
16 words
The resistor of claim 7, wherein said pedestal means is integral with said beam and substrate.
Claim 10
Dependent Claim
12 words
The resistor of claim 8, wherein said pedestal is an oxide material.
Claim 11
Dependent Claim
19 words
The resistor of claim 6, wherein said means supporting said released beam comprises cantilever means securing one end thereof.
Claim 12
Dependent Claim
35 words
The resistor of claim 1, wherein said substrate includes cavity means in an upper surface thereof, said cavity including side walls and a bottom wall, and wherein said resistive beam is located within said cavity.
Claim 13
Dependent Claim
17 words
The resistor of claim 11, wherein said resistor comprises an elongated beam having a submicron cross-sectional area.
Claim 14
Dependent Claim
29 words
The resistor of claim 12, wherein said resistor comprises a plurality of parallel elongated beams each having a submicron cross-sectional area, and conductor means electrically connected to said beams.
Claim 15
Dependent Claim
23 words
The resistor of claim 12, further including connector means electrically connected to said resistor for connecting said resistor to active electrical circuit components.
Claim 16
Dependent Claim
13 words
The resistor of claim 1, further including shield means surrounding said resistive beam.
Claim 17
Dependent Claim
25 words
The resistor of claim 15, wherein said shield means comprises an electrically insulative coating on said beam and a resistive coating surrounding said insulative coating.
Claim 18
Independent Claim
88 words
A method of fabricating submicron resistive elements, comprising: defining in a single-crystal substrate a region having a selected length, width, and shape; doping said region to produce in said single-crystal material a selected resistivity; etching said substrate to produce trenches defining an upstanding island incorporating said doped region; recess etching said substrate around said island; oxidizing said substrate to produce an oxide undercut of said island to thereby isolate said island from said substrate; and selectively removing said oxide to release said island to form a resistive beam.
Claim 19
Independent Claim
88 words
A method of fabricating submicron resistive elements, comprising: defining in a single-crystal substrate a region having a selected length, width, and shape; doping said region to produce in said single-crystal material a selected resistivity; etching said substrate to produce trenches defining an upstanding island incorporating said doped region; recess etching said substrate around said island; oxidizing said substrate to produce an oxide undercut of said island to thereby isolate said island from said substrate; and selectively removing said oxide to release said island to form a resistive beam.
Claim 20
Dependent Claim
27 words
The method of claim 17, further including further oxidizing said resistive beam to provide an insulative layer and thereafter covering said insulative layer with a resistive layer.
References Cited (Backward Citations)
US4437226A
Cited
US4668865A
Cited
US4648173A
Cited
US4764799A
Cited
US4685198A
Cited
US4670092A
Cited
US4845048A
Cited
US4776924A
Cited
US5043577A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-14 | 1997-08-16 | 1998-02-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-14 | 2001-08-16 | 2002-02-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-14 | 2005-08-16 | 2006-02-15 | $7700.00 | Window Closed / Lapsed |