Operating point trimming method for optical waveguide modulator and switch

Claim 2

An operating point trimming method for an optical waveguide modulator, said optical waveguide modulator including a waveguide substrate, a first and a second branch optical waveguide formed on said substrate, a buffer layer covering said first and second branch optical waveguides, and a first and a second electrode respectively mounted on said first and second branch optical waveguides, and adapted such that a voltage from a voltage source applied between said first and second electrodes is varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam, said operating point trimming method comprising the steps of: monitoring the waveform of said intensity modulated light beam; and removing, while monitoring the waveform, said buffer layer over a portion of either one of said first and second branch optical waveguides, with one of said first and second electrodes not mounted thereon, such that the waveform of said intensity modulated light beam takes on a desired waveform.

Claim 3

An operating point trimming method for an optical waveguide modulator, said optical waveguide modulator including a waveguide substrate, a first and a second branch optical waveguide formed on said substrate, a buffer layer covering said first and second branch optical waveguides, and a first and a second electrode respectively mounted on said first and second branch optical waveguides, and adapted such that a voltage from a voltage source applied between said first and second electrodes is varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam, said operating point trimming method comprising the steps of: monitoring the waveform of said intensity modulated light beam; and heating while monitoring the waveform, a portion of either one of said first and second branch optical waveguides, with one of said first and second electrodes not mounted thereon, through said buffer layer, thereby deforming said portion such that the waveform of said intensity modulated light beam takes on a desired waveform.

Claim 4

An operating point trimming method for an optical waveguide modulator, said optical waveguide modulator including a waveguide substrate, a first and a second branch optical waveguide formed on said substrate, a buffer layer covering said first and second branch optical waveguides, and a first and a second electrode respectively mounted on said first and second branch optical waveguides, and adapted such that a voltage from a voltage source applied between said first and second electrodes is varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam, said operating point trimming method comprising the steps of: monitoring the waveform of said intensity modulated light beam; and heating while monitoring the waveform, a portion of either one of said first and second branch optical waveguides, with one of said first and second electrodes not mounted thereon, through said buffer layer, thereby deforming said portion such that the waveform of said intensity modulated light beam takes on a desired waveform.

Claim 5

An operating point trimming method for an optical waveguide modulator, said optical waveguide modulator including a waveguide substrate, a first and a second branch optical waveguide formed on said substrate, a buffer layer covering said first and second branch optical waveguides, and a first and a second electrode respectively mounted on said first and second branch optical waveguides, and adapted such that a voltage from a voltage source applied between said first and second electrodes is varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam, said operating point trimming method comprising the steps of: attaching a stress applying block to a side face of said waveguide substrate; applying, while monitoring the waveform of said intensity modulated light beam, a mechanical stress to said block such that the waveform of said intensity modulated light beam takes on a desired waveform; and fixing up said block in a state maintaining the stress.

Claim 6

An operating point trimming method for an optical waveguide modulator, said optical waveguide modulator including a waveguide substrate, a first and a second branch optical waveguide formed on said substrate, a buffer layer covering said first and second branch optical waveguides, and a first and a second electrode respectively mounted on said first and second branch optical waveguides, and adapted such that a voltage from a voltage source applied between said first and second electrodes is varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam, said operating point trimming method comprising the steps of: attaching a stress applying block to a side face of said waveguide substrate; applying, while monitoring the waveform of said intensity modulated light beam, a mechanical stress to said block such that the waveform of said intensity modulated light beam takes on a desired waveform; and fixing up said block in a state maintaining the stress.

Claim 7

An operating point trimming method for an optical waveguide modulator, said optical waveguide modulator including a waveguide substrate, a first and a second branch optical waveguide formed on said substrate, a buffer layer covering said first and second branch optical waveguides, and a first and a second electrode respectively mounted on said first and second branch optical waveguides, and adapted such that the voltage from a voltage source applied between said first and second electrodes is varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam, said operating point trimming method comprising the steps of: monitoring the waveform of said intensity modulated light beam; and cutting off, while monitoring the waveform, a portion at a side of said waveguide substrate such that the waveform of said intensity modulated light beam takes on a desired waveform.

Claim 8

An operating point trimming method for an optical waveguide modulator, said optical waveguide modulator including a waveguide substrate, a first and a second branch optical waveguide formed on said substrate, a buffer layer covering said first and second branch optical waveguides, and a first and a second electrode respectively mounted on said first and second branch optical waveguides, and adapted such that the voltage from a voltage source applied between said first and second electrodes is varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam, said operating point trimming method comprising the steps of: monitoring the waveform of said intensity modulated light beam; and cutting off, while monitoring the waveform, a portion at a side of said waveguide substrate such that the waveform of said intensity modulated light beam takes on a desired waveform.

Claim 9

An operating point trimming method for an optical waveguide switch including a waveguide substrate, a first and a second optical waveguide formed on said substrate independently of each other, a buffer layer covering said first and second optical waveguides, and a first and a second electrode respectively mounted on said first and second optical waveguides, said operating point trimming method comprising the steps of: monitoring the waveforms of output light beams of said first and second optical waveguides; and removing, while monitoring the waveforms, said buffer layer over a portion of either one of said first and second optical waveguides, with one of said first and second electrodes not mounted thereon.

Claim 10

An operating point trimming method for an optical waveguide switch including a waveguide substrate, a first and a second optical waveguide formed on said substrate independently of each other, a buffer layer covering said first and second optical waveguides, and a first and a second electrode respectively mounted on said first and second optical waveguides, said operating point trimming method comprising the steps of: monitoring the waveforms of output light beams of said first and second optical waveguides; and removing, while monitoring the waveforms, said buffer layer over a portion of either one of said first and second optical waveguides, with one of said first and second electrodes not mounted thereon.

Claim 11

An operating point trimming method for an optical waveguide switch including a waveguide substrate, a first and a second optical waveguide formed on said substrate independently of each other, a buffer layer covering said first and second optical waveguides, and a first and a second electrode respectively mounted on said first and second optical waveguides, said operating point trimming method comprising the steps of: monitoring the waveforms of output light beams of said first and second optical waveguides; and heating, while monitoring the waveforms, a portion of either one of said first and second optical waveguides, with one of said first and second electrodes not mounted thereon, through said buffer layer, thereby deforming said portion.

Claim 12

An operating point trimming method for an optical waveguide switch including a waveguide substrate, a first and a second optical waveguide formed on said substrate independently of each other, a buffer layer covering said first and second optical waveguides, and a first and a second electrode respectively mounted on said first and second optical waveguides, said operating point trimming method comprising the steps of: monitoring the waveforms of output light beams of said first and second optical waveguides; and heating, while monitoring the waveforms, a portion of either one of said first and second optical waveguides, with one of said first and second electrodes not mounted thereon, through said buffer layer, thereby deforming said portion.

Claim 13

An operating point trimming method for an optical waveguide switch including a waveguide substrate, a first and a second optical waveguide formed on said substrate independently of each other, a buffer layer covering said first and second optical waveguides, and a first and a second electrode respectively mounted on said first and second optical waveguides, said operating point trimming method comprising the steps of: attaching a stress applying block to a side face of said waveguide substrate; applying, while monitoring the waveforms of output light beams of said first and second optical waveguides, a mechanical stress to said block; and fixing up said block in a state maintaining the stress.

Claim 14

An operating point trimming method for an optical waveguide switch including a waveguide substrate, a first and a second optical waveguide formed on said substrate independently of each other, a buffer layer covering said first and second optical waveguides, and a first and a second electrode respectively mounted on said first and second optical waveguides, said operating point trimming method comprising the steps of: attaching a stress applying block to a side face of said waveguide substrate; applying, while monitoring the waveforms of output light beams of said first and second optical waveguides, a mechanical stress to said block; and fixing up said block in a state maintaining the stress.

Claim 15

An operating point trimming method for an optical waveguide switch including a waveguide substrate, a first and a second optical waveguide formed on said substrate independently of each other, a buffer layer covering said first and second optical waveguides, and a first and a second electrode respectively mounted on said first and second optical waveguides, said operating point trimming method comprising the steps of: monitoring the waveforms of output light beams of said first and second optical waveguides; and cutting off, while monitoring the waveforms, a portion at a side of said waveguide substrate.

Claim 16

An operating point trimming method for an optical waveguide switch including a waveguide substrate, a first and a second optical waveguide formed on said substrate independently of each other, a buffer layer covering said first and second optical waveguides, and a first and a second electrode respectively mounted on said first and second optical waveguides, said operating point trimming method comprising the steps of: monitoring the waveforms of output light beams of said first and second optical waveguides; and cutting off, while monitoring the waveforms, a portion at a side of said waveguide substrate.

Claim 17

An optical waveguide modulator, comprising: a waveguide substrate; a first and a second branch optical waveguide formed on said substrate; a buffer layer covering said first and second branch optical waveguides; first and second electrode means respectively mounted on said first and second branch optical waveguides for receiving a voltage from a voltage source between said first and second electrode means, said voltage being varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam; and said buffer layer having an exposure hole in which a portion of said buffer layer which is over a portion of either one of said first and second branch optical waveguides, with one of said first and second electrode means not mounted thereon, is removed such that the waveform of said intensity modulated light beam takes on a desired waveform.

Claim 18

An optical waveguide modulator, comprising: a waveguide substrate; a first and a second branch optical waveguide formed on said substrate; a buffer layer covering said first and second branch optical waveguides; first and second electrode means respectively mounted on said first and second branch optical waveguides for receiving a voltage from a voltage source between said first and second electrode means, said voltage being varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam; and said buffer layer having an exposure hole in which a portion of said buffer layer which is over a portion of either one of said first and second branch optical waveguides, with one of said first and second electrode means not mounted thereon, is removed such that the waveform of said intensity modulated light beam takes on a desired waveform.

Claim 19

An optical waveguide modulator, comprising: a waveguide substrate; a first and a second branch optical waveguide formed on said substrate; a buffer layer covering said first and second branch optical waveguides; first and second electrode means respectively mounted on said first and second branch optical waveguides for receiving a voltage from a voltage source between said first and second electrode means, said voltage being varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam; and said waveguide substrate having a removed portion in which a portion at one side of said waveguide substrate is cut off.

Claim 20

An optical waveguide modulator, comprising: a waveguide substrate; a first and a second branch optical waveguide formed on said substrate; a buffer layer covering said first and second branch optical waveguides; first and second electrode means respectively mounted on said first and second branch optical waveguides for receiving a voltage from a voltage source between said first and second electrode means, said voltage being varied so that a phase difference is produced between light beams propagating through said first and second branch optical waveguides and the light beams having the phase difference therebetween are combined to be output as an intensity modulated light beam; and said waveguide substrate having a removed portion in which a portion at one side of said waveguide substrate is cut off.

Claim 21

An optical waveguide switch, comprising: a waveguide substrate; a first and a second optical waveguide formed on said substrate; a buffer layer covering said first and second optical waveguides; a first and a second electrode respectively mounted on said first and second optical waveguides; and said buffer layer having an exposure hole in which a portion of said buffer layer which is over a portion of either one of said first and second optical waveguides, with one of said first and second electrode means not mounted thereon, is removed so as to trim an operating point of the switch.

Claim 22

An optical waveguide switch, comprising: a waveguide substrate; a first and a second optical waveguide formed on said substrate; a buffer layer covering said first and second optical waveguides; a first and a second electrode respectively mounted on said first and second optical waveguides; and said buffer layer having an exposure hole in which a portion of said buffer layer which is over a portion of either one of said first and second optical waveguides, with one of said first and second electrode means not mounted thereon, is removed so as to trim an operating point of the switch.

Claim 23

An optical waveguide switch, comprising: a waveguide substrate; a first and a second optical waveguide formed on said substrate; a buffer layer covering said first and second optical waveguides; a first and a second electrode respectively mounted on said first and second optical waveguides; and said waveguide substrate having a removed portion in which a portion at one side of said waveguide substrate is cut off.

Claim 24

An optical waveguide switch, comprising: a waveguide substrate; a first and a second optical waveguide formed on said substrate; a buffer layer covering said first and second optical waveguides; a first and a second electrode respectively mounted on said first and second optical waveguides; and said waveguide substrate having a removed portion in which a portion at one side of said waveguide substrate is cut off.