Integrated optical device and its manufacture

Abstract

Abstract PURPOSE:To execute an exact double refraction control of an optical waveguide by providing a stress providing film on an optical waveguide clad layer so that a stress exerted on an optical waveguide core part is varied non-reversibly by an external stimulus. CONSTITUTION:A clad layer 12 is formed on a substrate, and a single mode optical waveguide containing a core part which is buried in this clad layer 12 and has a light propagating action is formed. Subsequently, a stress providing film 31 for providing a stress to this single mode optical waveguide, and also, varying non-reversibly the stress by trimming is formed on the clad layer 12. It will suffice that this stress providing film 31 is brought to trimming so that a desired double refraction characteristic can be obtained. At the time of bringing the stress providing film 31 to trimming, a diagnostic light is made incident on an integrated optical device, and while monitoring a prescribed device characteristic such as a polarized wave characteristic of the device, etc., trimming can be executed. In such a way, a precise double refraction control, and also, a polarized wave characteristic control of the optical device can be executed.

Inventors

• 👤 Masao Kawachi
• 👤 Norio Takato
• 👤 Kaname Jinguji
• 👤 Akio Sugita
• 👤 Makoto Sumita

Bibliographic Details