US5281557A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Soluble oxides for integrated circuit fabrication formed by the incomplete dissociation of the precursor gas
Assignee: Nokia Bell Labs
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Filing: 1993-04-22
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Granted: 1994-01-25
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Expires: 2013-04-22
Abstract
Abstract In the manufacture of integrated circuits, a process for forming a dielectric layer such as silicon dioxide which has a high wet etch rate is disclosed. Illustratively, the process is performed with a precursor gas in a plasma reactor with a shower head and a susceptor which supports a wafer. The power density, pressure, susceptor-shower head spacing, and (optionally) temperature are respectively decreased, decreased, increased and decreased to reduce the effectiveness of dissociation of the precursor gas. The resulting film contains impurities which enhance its wet etch rate.
Inventors
- 👤 Chen-Hua D. Yu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 05:27
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/66; H10P14/662; H10P14/6924; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/668; H10P14/6681; H10P14/6682; H10P14/69215; H10P14/6923; Y; Y10; Y10S; Y10S148/00; Y10S148/118
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
248 words
A method of semiconductor fabrication comprising: forming a first layer of silicon oxide upon a substrate having a raised topographic feature, said formation process being accomplished in a reactor having a susceptor supporting said substrate and having a shower head spaced a predetermined distance from said susceptor, said shower head dispensing a mixture of TEOS and oxygen together with an inert gas, said reactor further having confinement means for maintaining a desired pressure and having means for heating said wafer to a predetermined temperature and having means for striking a plasma between said susceptor and said shower head, said plasma having a power density, said first layer being formed by maintaining said power density at approximately 2.8 watts/centimeter 2 ; said distance between said shower head and said susceptor being approximately 180 mils; said pressure being maintained at 10 Torr; and the flow rate of said TEOS to said oxygen being approximately 0.89; forming a second layer rich in silicon oxide upon said first layer, said second layer being formed in the same or similar reactor but having a power density maintained at approximately 2.2 watts/centimeter 2 ; a distance between said shower head and said susceptor of approximately 500 mils; a pressure of approximately 3 Torr; and a flow rate of TEOS to said oxygen of approximately 0.56; anisotropically etching said second layer in the vicinity of said raised topographic feature to create a spacer with curved side; subsequently etching said spacer in a solution containing HF.
Claim 2
Independent Claim
248 words
A method of semiconductor fabrication comprising: forming a first layer of silicon oxide upon a substrate having a raised topographic feature, said formation process being accomplished in a reactor having a susceptor supporting said substrate and having a shower head spaced a predetermined distance from said susceptor, said shower head dispensing a mixture of TEOS and oxygen together with an inert gas, said reactor further having confinement means for maintaining a desired pressure and having means for heating said wafer to a predetermined temperature and having means for striking a plasma between said susceptor and said shower head, said plasma having a power density, said first layer being formed by maintaining said power density at approximately 2.8 watts/centimeter 2 ; said distance between said shower head and said susceptor being approximately 180 mils; said pressure being maintained at 10 Torr; and the flow rate of said TEOS to said oxygen being approximately 0.89; forming a second layer rich in silicon oxide upon said first layer, said second layer being formed in the same or similar reactor but having a power density maintained at approximately 2.2 watts/centimeter 2 ; a distance between said shower head and said susceptor of approximately 500 mils; a pressure of approximately 3 Torr; and a flow rate of TEOS to said oxygen of approximately 0.56; anisotropically etching said second layer in the vicinity of said raised topographic feature to create a spacer with curved side; subsequently etching said spacer in a solution containing HF.
Claim 3
Dependent Claim
31 words
The method of claim 1 further including the step of anisotropically etching said first layer to create a second spacer with a curved side prior to deposition of said second layer.
Claim 4
Independent Claim
99 words
A method if semiconductor integrated circuit formation, comprising: forming a first material layer; and forming a second material layer upon said first material layer, the second material layer being formed by a vapor deposition process using reaction chamber pressure, power density and precursor gas-to-oxygen flow rate values selected to result in incomplete dissociation of the precursor gas using values for at least two of the three above parameters selected to produce impurities which are incorporated in said second material layer in sufficient number that said second material layer exhibits a substantially higher etch rate than said first material layer.
Claim 5
Independent Claim
99 words
A method if semiconductor integrated circuit formation, comprising: forming a first material layer; and forming a second material layer upon said first material layer, the second material layer being formed by a vapor deposition process using reaction chamber pressure, power density and precursor gas-to-oxygen flow rate values selected to result in incomplete dissociation of the precursor gas using values for at least two of the three above parameters selected to produce impurities which are incorporated in said second material layer in sufficient number that said second material layer exhibits a substantially higher etch rate than said first material layer.
Claim 6
Dependent Claim
22 words
The method of claim 3, further comprising the steps of selectively etching the second material layer relative to the first material layer.
Claim 7
Dependent Claim
13 words
The method of claim 3, wherein the pressure is maintained at 3±2 Torr.
Claim 8
Dependent Claim
19 words
The method of claim 3, wherein the power density is between 0.4 and about 2.2 watts per square centimeter.
Claim 9
Dependent Claim
14 words
The method of claim 3, wherein the precursor gas-to-oxygen flow rate ratio is 0.56±0.2.
Claim 10
Dependent Claim
26 words
The method of claim 3, in which a dopant chosen from the group consisting of phosphorous, boron, and fluorine is added to said second material layer.
Claim 11
Dependent Claim
15 words
The method of claim 3, wherein the first material layer is an oxide of silicon.
Claim 12
Dependent Claim
21 words
The method of claim 3, in which the precursor gas is chosen from the group consisting of TEOS, TMOS, DADBS, TMCTS.
Claim 13
Dependent Claim
20 words
The method of claim 3, further comprising the step of maintaining reaction chamber temperature between 200° C. and 390° C.
Claim 14
Dependent Claim
22 words
The method of claim 3 in which said second material layer is anisotropically etched to create a spacer with a curved side.
Claim 15
Dependent Claim
17 words
The method of claim 12 in which said spacer is subsequently etched in a solution containing HF.
Claim 16
Dependent Claim
33 words
The method of claim 12 further including the step of anisotropically etching said first material layer to create a second spacer with a curved side prior to deposition of said second material layer.
Claim 17
Dependent Claim
132 words
The method of claim 3 in which said second material is formed upon a wafer in a reactor, said reactor having a susceptor supporting said wafer and having a shower head being spaced a predetermined distance from said susceptor, between 300 and 500 mils, and having means for heating said wafer to a predetermined temperature and having confinement means for maintaining a desired pressure, and having means for creating a plasma between said susceptor and said shower head, said plasma having a power density, said power density being maintained so that there is significant incomplete dissociation of said precursor gas within said plasma, thus producing impurities, and so that second material layer contains sufficient impurities to have a wet etch rate at least ten times higher than a layer without said impurities.
Claim 18
Dependent Claim
24 words
The method of claim 15, further comprising the step of anisotropically etching said second material layer to form a spacer with a curved side.
Claim 19
Independent Claim
104 words
A method of semiconductor integrated circuit formation, comprising: forming a first material layer upon a substrate; and forming a second material layer upon said first material layer, the second material layer being formed by a vapor deposition process using reaction chamber pressure, power density and organometallic precursor-to-oxygen gas flow rate values selected to result in incomplete dissociation of the precursor gas by using values for at least two of the three above parameters selected to produce impurities which are incorporated in said second material layer in sufficient number that said second material layer exhibits a substantially higher etch rate than said first material layer.
Claim 20
Independent Claim
104 words
A method of semiconductor integrated circuit formation, comprising: forming a first material layer upon a substrate; and forming a second material layer upon said first material layer, the second material layer being formed by a vapor deposition process using reaction chamber pressure, power density and organometallic precursor-to-oxygen gas flow rate values selected to result in incomplete dissociation of the precursor gas by using values for at least two of the three above parameters selected to produce impurities which are incorporated in said second material layer in sufficient number that said second material layer exhibits a substantially higher etch rate than said first material layer.
Claim 21
Dependent Claim
26 words
The method of claim 17, in which a dopant chosen from the group consisting of phosphorus, boron, and fluorine is added to said second material layer.
Claim 22
Dependent Claim
22 words
The method of claim 17, in which the organometallic precursor gas is chosen from the group consisting of TEOS, TMOS, DADBS, TMCTS.
Claim 23
Dependent Claim
13 words
The method of claim 17, wherein the pressure is maintained at 3±2 Torr.
Claim 24
Dependent Claim
19 words
The method of claim 17, wherein the power density is between 0.4 and about 2.2 watts per square centimeter.
Claim 25
Dependent Claim
14 words
The method of claim 17, wherein the precursor gas-to-oxygen flow rate ratio is 0.56±0.2.
Claim 26
Dependent Claim
20 words
The method of claim 17, further comprising the step of maintaining reaction chamber temperature between 200° C. and 390° C.
Claim 27
Dependent Claim
22 words
The method of claim 17 in which said second material layer is anisotropically etched to create a spacer with a curved side.
Claim 28
Dependent Claim
17 words
The method of claim 24 in which said spacer is subsequently etched in a solution containing HF.
Claim 29
Dependent Claim
33 words
The method of claim 17 further including the step of anisotropically etching said first material layer to create a second spacer with a curved side prior to deposition of said second material layer.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-01-24 | 1997-07-26 | 1998-01-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-24 | 2001-07-26 | 2002-01-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-24 | 2005-07-26 | 2006-01-25 | $7700.00 | Window Closed / Lapsed |