US5279671A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thermal vapor deposition apparatus
Assignee: Individual
•
Filing: 1992-06-16
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Granted: 1994-01-18
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Expires: 2012-06-16
Abstract
Abstract An improvement in a thermal vapor disposition apparatus having an enclosure with a gas inlet, a gas outlet, side walls, a susceptor, gas flow means for causing a flow of gas from the inlet to the outlet and heating means for heating the susceptor, where a temperature gradient is imposed on the susceptor and/or a temperature control means controls the temperature profile of the side walls.
Inventors
- 👤 Iwao Hosokawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 06:56
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/46
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
89 words
In a thermal vapor deposition apparatus comprising an enclosure having a gas inlet, a gas outlet, side walls, a susceptor, gas flow means for causing a flow of gas from said inlet to said outlet, and heating means for heating the susceptor, the improvement comprising temperature control means in the form of a discontinuity or spacer for controlling the temperature profile of the side walls wherein the temperature control means is in the side walls and has a heat conductivity lower than the heat conductivity of the side walls.
Claim 2
Dependent Claim
89 words
In a thermal vapor deposition apparatus comprising an enclosure having a gas inlet, a gas outlet, side walls, a susceptor, gas flow means for causing a flow of gas from said inlet to said outlet, and heating means for heating the susceptor, the improvement comprising temperature control means in the form of a discontinuity or spacer for controlling the temperature profile of the side walls wherein the temperature control means is in the side walls and has a heat conductivity lower than the heat conductivity of the side walls.
Claim 3
Dependent Claim
20 words
The apparatus of claim 1 wherein a temperature gradient is produced at least in the direction of the gas flow.
Claim 4
Dependent Claim
20 words
The apparatus of claim 2 wherein the temperature of the susceptor is higher near said outlet than near said inlet.
Claim 5
Dependent Claim
20 words
The apparatus of claim 1 wherein a temperature gradient is produced also in a direction transverse to the gas flow.
Claim 6
Dependent Claim
24 words
The apparatus of claim 4 wherein the temperature of the susceptor is lower or higher near the side walls than toward the middle thereof.
Claim 7
Dependent Claim
19 words
The apparatus of claim 1 wherein a temperature gradient means is a series of heaters disposed near the susceptor.
Claim 8
Dependent Claim
14 words
The apparatus of claim 6 wherein the heaters are electric heaters or magnetic heaters.
Claim 9
Dependent Claim
21 words
The apparatus of claim 7 wherein the heaters are separate heaters and a variable power supply is provided for each heater.
Claim 10
Dependent Claim
28 words
The apparatus of claim 2 wherein the temperature gradient is such that a mass flux at the susceptor is substantially uniform at least in the gas flow direction.
Claim 11
Dependent Claim
19 words
The apparatus of claim 1 wherein the temperature control means causes a non-linear temperature profile in the side walls.
Claim 12
Dependent Claim
18 words
The apparatus of claim 10 wherein the non-linear temperature profile is sufficient to cause unsteady state gas flow.
Claim 13
Dependent Claim
13 words
The apparatus of claim 11 wherein the gas flow is quasi-periodic or chaotic.
Claim 14
Dependent Claim
25 words
The apparatus of claim 1 wherein the spacer has a thickness of about 0.01 times to about 0.4 times the length of a side wall.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-17 | 1997-07-19 | 1998-01-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-17 | 2001-07-19 | 2002-01-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-17 | 2005-07-19 | 2006-01-18 | $7700.00 | Window Closed / Lapsed |