US5276761A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Hollow waveguide for ultraviolet wavelength region laser beams
Assignee: Ebara Corp
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Filing: 1991-09-16
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Granted: 1994-01-04
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Expires: 2011-09-16
Abstract
Abstract A hollow waveguide for ultraviolet wavelength region laser beams incorporates a glass tube composed of a glass material exhibiting a high transmissivity with respect to ultraviolet rays and an excellent environment resistant property, and a metal film exhibiting a high reflectivity with respect to the ultraviolet rays and formed outside the glass tube. The glass tube serves as an inner surface of the waveguide. The ultraviolet wavelength region laser beams are transmitted while being reflected by the inner surface of the glass tube and by an interface between the glass tube and the metal film.
Inventors
- 👤 Masashi Shimoyama
- 👤 Kazuo Kinoshita
- 👤 Naoki Tsuchiya
- 👤 Tohru Fukatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 02:36
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/02; G02B6/032; G02B6/10; G02B6/102; G02B6/24; G02B6/42; G02B6/4296
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
128 words
A hollow waveguide for ultraviolet wavelength region laser beams, comprising: a glass tube composed of a glass material exhibiting a high transmissivity with respect to ultraviolet rays and an excellent environment resistant property, said glass tube serving as an inner surface of said waveguide said glass tube being formed from quartz; and a metal film exhibiting a high reflectivity with respect to the ultraviolet rays and formed outside said glass tube, a refractive index of said glass tube being formed higher than a refractive index of said metal film whereby said ultraviolet wavelength region laser beams are transmitted while being reflected by the inner surface of said glass tube and by an interface between said glass tube and said metal film, said metal film being formed from aluminum.
Claim 2
Dependent Claim
128 words
A hollow waveguide for ultraviolet wavelength region laser beams, comprising: a glass tube composed of a glass material exhibiting a high transmissivity with respect to ultraviolet rays and an excellent environment resistant property, said glass tube serving as an inner surface of said waveguide said glass tube being formed from quartz; and a metal film exhibiting a high reflectivity with respect to the ultraviolet rays and formed outside said glass tube, a refractive index of said glass tube being formed higher than a refractive index of said metal film whereby said ultraviolet wavelength region laser beams are transmitted while being reflected by the inner surface of said glass tube and by an interface between said glass tube and said metal film, said metal film being formed from aluminum.
Claim 3
Dependent Claim
20 words
The waveguide as set forth in claim 1, wherein said aluminum film is formed by CVD, PVD or vacuum evaporation.
Claim 4
Dependent Claim
31 words
The waveguide as set forth in claim 1, wherein the surface roughness depth of said metal film which is in contact with said glass tube is several tenths of a micron.
Claim 5
Dependent Claim
26 words
The waveguide as set forth in claim 1, further comprising: a gas having a high ultraviolet ray transmissivity flowing through a space within said glass tube.
Claim 6
Dependent Claim
45 words
The waveguide as set forth in claim 4, further comprising: a housing mounted on an incident end portion of said waveguide for communicating therewith; a gas inflow port is formed in said housing and a condenser lens is mounted on incident side of said housing.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-03 | 1997-07-05 | 1998-01-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-03 | 2001-07-05 | 2002-01-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-03 | 2005-07-05 | 2006-01-04 | $7700.00 | Window Closed / Lapsed |