Matrix array using MIM device and α and β tantalum electrodes

Claim 1

A matrix array substrate for a liquid crystal display device comprising: a transparent substrate; a plurality of picture element electrodes formed on said transparent substrate and made of a transparent conductive material; and non-linear resistive devices formed on said transparent substrate, and each connected to each of the picture element electrodes; wherein each of said non-linear resistive devices includes a β- Ta first electrode formed on said transparent substrate, a second electrode, and an insulating layer located between the first and second electrodes, said first electrode being connected to another non-linear resistive device via a α- Ta interconnection layer formed on a transparent conductive layer, the α- Ta interconnection layer being formed by a structural change of β- Ta to α-Ta due to deposition of the β- Ta on the transparent conductive layer is formed between said transparent substrate and the α- Ta interconnection layer and is not formed between the transparent substrate and the first electrode.

Claim 8

A method of preparing a matrix array substrate for a liquid display device comprising the steps of: forming a transparent conductive layer on a transparent substrate; forming a plurality of picture element electrodes and transparent conductive interconnection layers by patterning said transparent conductive layer; forming a Ta film on the entire surface of the resultant structure, the Ta film on the transparent substrate being substantially β- type Ta, and the Ta film on the picture element electrodes and the transparent conductive interconnection layers being substantially α- type Ta, said α- type Ta being formed by a structural transformation of β- type Ta to α- type Ta due to the deposition of the Ta on the transparent conductive interconnection layer; patterning said Ta film to form a first electrode consisting of substantially the β- type Ta on regions of said transparent substrate where said non-linear resistive devices are to be formed, and interconnection layers consisting substantially of the α- type Ta on said transparent conductive interconnection layers; forming insulating layers on said first electrodes; and forming second electrodes connected to said picture element electrodes, on said insulating layer; wherein said first electrodes, insulating layers, and second electrodes constitute the non-linear resistive devices, and the non-linear resistive devices are connected with each other.

Claim 9

A method of preparing a matrix array substrate for a liquid display device comprising the steps of: forming a transparent conductive layer on a transparent substrate; forming a plurality of picture element electrodes and transparent conductive interconnection layers by patterning said transparent conductive layer; forming a Ta film on the entire surface of the resultant structure, the Ta film on the transparent substrate being substantially β- type Ta, and the Ta film on the picture element electrodes and the transparent conductive interconnection layers being substantially α- type Ta, said α- type Ta being formed by a structural transformation of β- type Ta to α- type Ta due to the deposition of the Ta on the transparent conductive interconnection layer; patterning said Ta film to form a first electrode consisting of substantially the β- type Ta on regions of said transparent substrate where said non-linear resistive devices are to be formed, and interconnection layers consisting substantially of the α- type Ta on said transparent conductive interconnection layers; forming insulating layers on said first electrodes; and forming second electrodes connected to said picture element electrodes, on said insulating layer; wherein said first electrodes, insulating layers, and second electrodes constitute the non-linear resistive devices, and the non-linear resistive devices are connected with each other.