Abstract A heat-treating apparatus comprises a heat portion which performs a required heat treating to a plural number of objects to be treated mounted on a heat-treating boat, a vacuum exhaust system which creates a vacuum inside the heat-treating portion, a load lock chamber which is connected so as to be freely openable and closable with respect to the heat-treating portion, which is filled therein with an inert gas and which is for transporting an object to be treated into and out of the heat-treating portion, and a residual treating gas exhaust system which is connected to the load lock chamber. Furthermore, in this heat-treating apparatus, there are also provided an oxygen concentration detector for detecting an oxygen concentration inside the load lock chamber, a door lock device provided in a vicinity of a maintenance door of the load lock chamber and which regulates opening and closing of the maintenance door, and a door lock control device which releases a lock of the door lock device when the oxygen concentration detector has detected a required oxygen concentration.
A heat-treating apparatus comprising: a heat-treating region for heat treating a plural number of objects to be treated mounted on a heat-treating boat; a vacuum exhaust system for creating a vacuum inside said heat-treating region; a load lock chamber fillable with an inert gas, for transporting objects to be treated into and out of said heat-treating region; an inert gas supply system for supplying an inert gas from an inert gas supply source to said load lock chamber; a residual treating gas exhaust system connected to said load lock chamber, for exhausting residual gas from said load lock chamber; an opening portion provided at a lower end of said heat-treating region; and a manifold connected to said opening portion and said vacuum exhaust system, said manifold being provided with cooling means to cool said manifold.
Claim 2
Dependent Claim
135 words
A heat-treating apparatus comprising: a heat-treating region for heat treating a plural number of objects to be treated mounted on a heat-treating boat; a vacuum exhaust system for creating a vacuum inside said heat-treating region; a load lock chamber fillable with an inert gas, for transporting objects to be treated into and out of said heat-treating region; an inert gas supply system for supplying an inert gas from an inert gas supply source to said load lock chamber; a residual treating gas exhaust system connected to said load lock chamber, for exhausting residual gas from said load lock chamber; an opening portion provided at a lower end of said heat-treating region; and a manifold connected to said opening portion and said vacuum exhaust system, said manifold being provided with cooling means to cool said manifold.
Claim 3
Dependent Claim
17 words
The heat-treating apparatus according to claim 1, wherein said objects to be treated is a semiconductor wafer.
Claim 4
Dependent Claim
25 words
The heat-treating apparatus according to claim 1, wherein said cooling means includes a double-walled structure forming a cooling water path for cooling water flow therein.
Claim 5
Dependent Claim
30 words
The heat-treating apparatus according to claim 1, further including a treating gas inlet pipe provided at an upper portion side wall of said manifold for leading a processing gas thereinto.