US4943235A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Heat-treating apparatus
Assignee: Tokyo Electron Ltd
•
Filing: 1988-11-25
•
Granted: 1990-07-24
•
Expires: 2008-11-25
Abstract
Abstract A heat-treating apparatus comprises a heat-treating furnace which include a process tube arranged so as to set its longitudinal direction vertically and having inlet and exhaust ports for a reaction gas, a heater arranged around the process tube, a capping member for capping an opening for allowing an heat-treating object to be loaded therethrough, which is formed in the lower end of the process tube, a case for covering a portion between the process tube and the capping member, and an exhaust nozzle, coupled to the the exhaust port formed in the process tube, for introducing the exhaust waste gas to the outside of the heat-treating apparatus. An exhaust nozzle is arranged in the case so as to introduce the waste gas leaking from between the process tube and the capping member to the outside of the heat-treating apparatus, thereby preventing the leaked gas from being diffused around the heat-treating apparatus.
Inventors
- 👤 Ken Nakao
- 👤 Seishiro Sato
- 👤 Wataru Ohkase
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:06
CPC Classifications
F; F27; F27B; F27B17/00; F27B17/0016; F27B17/0025; C; C30; C30B; C30B31/00; C30B33/00; C30B33/005; F27D; F27D17/00; F27D17/30; F27D17/302; F27D7/00; F27D7/06; H; H10; H10P; H10P95/00; H10P95/90
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
151 words
A heat-treating apparatus comprising: a furnace, which includes a furnace body, for storing an object to be heat-treated, having an opening for allowing the object to be loaded therethrough, an inlet port for feeding a reaction gas, and an exhaust port for exhausting a waste gas, and heating means for heating the object; capping means positionable for making tight contact with said furnace body at an area of contact for capping said opening, said capping means being separable from said opening for allowing the object to be loaded therethrough before heat treating; sealing means forming an enclosed volume around said area of contact for preventing the waste gas leaking from between said furnace body and said capping means from being diffused around said furnace; and gas exhaust means, coupled to said exhaust port, for introducing the waste gas including the waste gas leaked into said enclosed volume, outside said heat-treating apparatus.
Claim 2
Dependent Claim
151 words
A heat-treating apparatus comprising: a furnace, which includes a furnace body, for storing an object to be heat-treated, having an opening for allowing the object to be loaded therethrough, an inlet port for feeding a reaction gas, and an exhaust port for exhausting a waste gas, and heating means for heating the object; capping means positionable for making tight contact with said furnace body at an area of contact for capping said opening, said capping means being separable from said opening for allowing the object to be loaded therethrough before heat treating; sealing means forming an enclosed volume around said area of contact for preventing the waste gas leaking from between said furnace body and said capping means from being diffused around said furnace; and gas exhaust means, coupled to said exhaust port, for introducing the waste gas including the waste gas leaked into said enclosed volume, outside said heat-treating apparatus.
Claim 3
Dependent Claim
58 words
An apparatus according to claim 1, wherein said sealing means includes a casing member for covering a portion between said furnace body and said capping means, and leaking gas exhaust means, connected to said casing member, for introducing the waste gas leaking from between said furnace body and said capping means to the outside of said heat-treating apparatus.
Claim 4
Dependent Claim
25 words
An apparatus according to claim 2 wherein said leaking gas exhaust means includes a leaking gas exhaust nozzle allowing the leaked gas to flow therethrough.
Claim 5
Dependent Claim
28 words
An apparatus according to claim 1, wherein said gas exhaust means includes a waste gas exhaust nozzle for allowing the gas from said exhaust port to flow therethrough.
Claim 6
Dependent Claim
85 words
An apparatus according to claim 4, wherein a gap is formed between said exhaust port and said waste gas exhaust nozzle, said sealing means includes a casing member which covers a portion between said furnace body and said capping means and is coupled to said waste gas exhaust nozzle, and the gas leaking from between said furnace body and said capping means is drawn by suction to said waste gas exhaust nozzle from said gap between said exhaust port and said waste gas exhaust nozzle.
Claim 7
Dependent Claim
42 words
An apparatus according to claim 1, wherein said furnace body is arranged so as to set a longitudinal direction thereof vertically, and said opening for allowing the object to be loaded therethrough is formed in a lower end of said furnace body.
Claim 8
Dependent Claim
39 words
An apparatus according to claim 1, including gas collecting means for collecting waste gas exhausted from said exhaust port and waste gas from said enclosed volume, so as to prevent the waste gas from being diffused around said furnace.
Claim 9
Dependent Claim
40 words
An apparatus according to claim 7, wherein said gas collecting means includes a gas collecting member for collecting the waste gas exhausted from said exhaust port, and a coupling pipe for coupling said enclosed volume to said gas collecting member.
Claim 10
Dependent Claim
27 words
An apparatus according to claim 8, wherein said gas collecting member includes an exhaust pipe for introducing the collected gas to the outside of said heat-treating apparatus.
Claim 11
Dependent Claim
42 words
An apparatus according to claim 7, wherein said furnace body is arranged so as to set a longitudinal direction thereof vertically, and said opening for allowing the object to be loaded therethrough is formed in a lower end of said furnace body.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-07-23 | 1994-01-22 | 1994-07-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-07-23 | 1998-01-22 | 1998-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-07-23 | 2002-01-22 | 2002-07-24 | $7700.00 | Window Closed / Lapsed |