US5270243A
Expired / Lapsed
US
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Dram peripheral circuit contact aspect ratio improvement process
Assignee: BLU TECHNOLOGY 2 LLC
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Filing: 1993-03-22
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Granted: 1993-12-14
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Expires: 2013-03-22
Abstract
Abstract A method and resulting structure for defining a dielectric layer thickness and etching openings having a desired aspect ratio through said dielectric layer covering regions in the peripheral circuits of a DRAM integrated circuit to be electrically contacted in a semiconductor wafer is described. The DRAM integrated circuit including the peripheral circuits to be electrically contacted is provide in the semiconductor wafer. A first conductive polysilicon layer is formed over said DRAM integrated circuit and the layer is patterned to leave the layer over the peripheral circuits. A first interlevel dielectric layer is formed over the polysilicon layer which has been patterned. A second conductive polysilicon layer is formed over the first interlevel dielectric layer and patterned to leave the layer over areas other than the peripheral circuits. The first interlevel dielectric layer and first polysilicon layer thereunder are masked and etched to remove the first interlevel dielectric layer and first polysilicon layer from all the peripheral circuits. A second interlevel dielectric layer is formed over the exposed second conductive polysilicon layer, first interlevel dielectric and semiconductor wafer. The openings having a desired aspect ratio are etched through said second interlevel dielectric layer.
Inventors
- 👤 Hsiao-Chin Tuan
- 👤 Yih-Fang Liu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 06:13
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
184 words
The method for defining a dielectric layer thickness and etching openings through said dielectric layer covering regions in the peripheral circuits of a DRAM integrated circuit to be electrically contacted in a semiconductor wafer comprising: providing within and over said semiconductor wafer said DRAM integrated circuit including said peripheral circuits to be electrically contacted; forming a first conductive polysilicon layer over said DRAM integrated circuit and patterning said layer to leave the layer over said peripheral circuits; forming a first interlevel dielectric layer over said polysilicon layer which has been patterned; forming a second conductive layer over said first interlevel dielectric layer and patterning said second conductive layer to leave exposed second conductive layer over areas other than said peripheral circuits; masking and etching said first interlevel dielectric layer and said first polysilicon layer thereunder to remove said first interlevel dielectric layer and first polysilicon layer from all said peripheral circuits; forming a second interlevel dielectric layer over said exposed second conductive layer, first interlevel dielectric and semiconductor wafer; and etching said openings having a desired aspect ratio through said second interlevel dielectric layer.
Claim 2
Independent Claim
184 words
The method for defining a dielectric layer thickness and etching openings through said dielectric layer covering regions in the peripheral circuits of a DRAM integrated circuit to be electrically contacted in a semiconductor wafer comprising: providing within and over said semiconductor wafer said DRAM integrated circuit including said peripheral circuits to be electrically contacted; forming a first conductive polysilicon layer over said DRAM integrated circuit and patterning said layer to leave the layer over said peripheral circuits; forming a first interlevel dielectric layer over said polysilicon layer which has been patterned; forming a second conductive layer over said first interlevel dielectric layer and patterning said second conductive layer to leave exposed second conductive layer over areas other than said peripheral circuits; masking and etching said first interlevel dielectric layer and said first polysilicon layer thereunder to remove said first interlevel dielectric layer and first polysilicon layer from all said peripheral circuits; forming a second interlevel dielectric layer over said exposed second conductive layer, first interlevel dielectric and semiconductor wafer; and etching said openings having a desired aspect ratio through said second interlevel dielectric layer.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein said first conductive layer acts as an etchstop for said etching of said first interlevel dielectric layer.
Claim 4
Dependent Claim
23 words
The method of claim 1 and further comprising filling said openings with aluminum metal to electrically contact said regions in said semiconductor wafer.
Claim 5
Dependent Claim
15 words
The method of claim 3 wherein said aluminum metal is deposited by a sputtering process.
Claim 6
Dependent Claim
37 words
The method of claim 1 wherein said first interlevel dielectric layer has a thickness of between about 3000 to 12000 Angstroms and said second interlevel dielectric layer has a thickness of between about 3000 to 8000 Angstroms.
Claim 7
Dependent Claim
33 words
The method of claim 5 wherein said desired aspect ratio is less than about 0.7 and the feature size of said openings to said peripheral circuit regions is less than about 0.8 micrometers.
Claim 8
Dependent Claim
15 words
The method of claim 1 wherein said second conductive layer is exposed of doped polysilicon.
Claim 9
Dependent Claim
16 words
The method of claim 1 wherein said second conductive layer is composed of phosphorus doped polysilicon.
Claim 10
Independent Claim
209 words
The method for making a DRAM integrated circuit having a cell array composed of MOSFET devices and associated capacitors, and peripheral circuits wherein there is defined a dielectric layer thickness and etching openings through said dielectric layer covering regions in the peripheral circuits to be electrically contacted comprising: forming in one portion of a semiconductor wafer said cell array of MOSFET devices and associated capacitors; forming in a second portion of said semiconductor wafer said peripheral circuits; forming a first conductive polysilicon layer over said cell array and said peripheral circuits, and patterning said layer to leave the layer over said peripheral circuits; forming a first interlevel dielectric layer over said polysilicon layer which has been patterned; forming a second conductive layer over said first interlevel dielectric layer and patterning said second layer to leave exposed second conductive layer over areas other than said peripheral circuits; masking and etching said first interlevel dielectric layer and said first polysilicon layer thereunder to remove said first interlevel dielectric layer and first polysilicon layer from all said peripheral circuits; forming a second interlevel dielectric layer over said exposed second conductive layer, first interlevel dielectric and semiconductor wafer; and etching said openings having a desired aspect ratio through said second interlevel dielectric layer.
Claim 11
Independent Claim
209 words
The method for making a DRAM integrated circuit having a cell array composed of MOSFET devices and associated capacitors, and peripheral circuits wherein there is defined a dielectric layer thickness and etching openings through said dielectric layer covering regions in the peripheral circuits to be electrically contacted comprising: forming in one portion of a semiconductor wafer said cell array of MOSFET devices and associated capacitors; forming in a second portion of said semiconductor wafer said peripheral circuits; forming a first conductive polysilicon layer over said cell array and said peripheral circuits, and patterning said layer to leave the layer over said peripheral circuits; forming a first interlevel dielectric layer over said polysilicon layer which has been patterned; forming a second conductive layer over said first interlevel dielectric layer and patterning said second layer to leave exposed second conductive layer over areas other than said peripheral circuits; masking and etching said first interlevel dielectric layer and said first polysilicon layer thereunder to remove said first interlevel dielectric layer and first polysilicon layer from all said peripheral circuits; forming a second interlevel dielectric layer over said exposed second conductive layer, first interlevel dielectric and semiconductor wafer; and etching said openings having a desired aspect ratio through said second interlevel dielectric layer.
Claim 12
Dependent Claim
23 words
The method of claim 9 wherein said first conductive layer acts as an etchstop for said etching of said first interlevel dielectric layer.
Claim 13
Dependent Claim
23 words
The method of claim 9 and further comprising filling said openings with aluminum metal to electrically contact said regions in said semiconductor wafer.
Claim 14
Dependent Claim
15 words
The method of claim 11 wherein said aluminum metal is deposited by a sputtering process.
Claim 15
Dependent Claim
37 words
The method of claim 9 wherein said first interlevel dielectric layer has a thickness of between about 3000 to 12000 Angstroms and said second interlevel dielectric layer has a thickness of between about 3000 to 8000 Angstroms.
Claim 16
Dependent Claim
33 words
The method of claim 13 wherein said desired aspect ratio is less than about 0.7 and the feature size of said openings to said peripheral circuit regions is less than about 0.8 micrometers.
Claim 17
Dependent Claim
15 words
The method of claim 9 wherein said second conductive layer is composed of doped polysilicon
Claim 18
Dependent Claim
16 words
The method of claim 9 wherein said second conductive layer is composed of arsenic doped polysilicon.
References Cited (Backward Citations)
EP0398569A2
Cited
US5135881A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-12-13 | 1997-06-14 | 1997-12-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-12-13 | 2001-06-14 | 2001-12-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-12-13 | 2005-06-14 | 2005-12-14 | $7700.00 | Window Closed / Lapsed |