Process for forming anti-reflective coatings comprising light metal fluorides

Claim 2

A process for forming an anti-reflective coating comprising light metal fluorides on a substrate, said process comprising: providing a coating of a reactive composition comprising: (i) light metal oxide precursor, (ii) non-aqueous solvent, and (iii) water on said substrate; heating the coated substrate for a time sufficient to densify the coating material to form a densified coating comprising light metal oxide; and exposing said densified coating at an elevated temperature to an atmosphere comprising fluorine gas or a fluorine producing gaseous compound for a time sufficient to replace only a portion of the oxygen atoms of said light metal oxide of said densified coating with fluoride atoms so that said densified coating comprises a concentration gradient of light metal fluoride to thereby form said anti-reflective coating.

Claim 3

The process according to claim 1, wherein said light metal oxide precursor is selected from the group consisting essentially of light metal alkoxides, light metal nitrates, light metal acid tartrates, and light metal acetates.

Claim 4

The process according to claim 1, wherein said light metal oxide precursor comprises a magnesium oxide precursor.

Claim 5

The process according to claim 1, wherein said composition further comprises other oxide precursors selected from silicon oxide precursors, zirconium oxide precursors, titanium oxide precursors, cerium oxide precursors, or aluminum oxide precursors.

Claim 6

The process according to claim 4, wherein said other oxide precursors are selected from alkoxides, nitrates, acid tartrates, or acetates.

Claim 7

The process according to claim 1, wherein said pH of said reactive composition is adjusted to less than about 6.0 by means of acid.

Claim 8

The process according to claim 1, wherein said water is provided in said reactive composition coating by exposing a coating comprising said light metal oxide (i) and said non-aqueous solvent (ii) to water vapor.

Claim 9

The process according to claim 1, wherein said process further comprised causing said reactive composition to become viscous prior to Providing it on said substrate.

Claim 10

The process according to claim 1, wherein said concentration gradient being such that said densified coating comprises a greater concentration of light metal fluoride in a region of said densified coating distant from said substrate surface and a lesser concentration of light metal fluoride in a region of said densified coating nearer said substrate surface.

Claim 11

A process for forming a ceramic coating, comprising a concentration gradient of light metal fluorides, on a substrate, said process comprising: providing a coating of a reactive composition comprising: (i) light metal oxide precursor, (ii) non-aqueous solvent, and (iii) water on said substrate; heating the coated substrate for a time sufficient to densify the coating material to form a densified coating comprising light metal oxide; and exposing said densified coating at an elevated temperature to an atmosphere comprising fluorine gas or a gaseous fluorine producing compound for a time sufficient to replace only a portion of the oxygen atoms of said light metal oxide with fluoride atoms so that said densified, coating comprises a concentration gradient of light metal fluoride, said concentration gradient being such that said densified coating comprises a greater concentration of light metal fluoride in a region of said ceramic coating distant from said substrate surface and a lesser concentration of light metal fluoride in a region of said densified coating nearer said substrate surface.

Claim 12

A process for forming a ceramic coating, comprising a concentration gradient of light metal fluorides, on a substrate, said process comprising: providing a coating of a reactive composition comprising: (i) light metal oxide precursor, (ii) non-aqueous solvent, and (iii) water on said substrate; heating the coated substrate for a time sufficient to densify the coating material to form a densified coating comprising light metal oxide; and exposing said densified coating at an elevated temperature to an atmosphere comprising fluorine gas or a gaseous fluorine producing compound for a time sufficient to replace only a portion of the oxygen atoms of said light metal oxide with fluoride atoms so that said densified, coating comprises a concentration gradient of light metal fluoride, said concentration gradient being such that said densified coating comprises a greater concentration of light metal fluoride in a region of said ceramic coating distant from said substrate surface and a lesser concentration of light metal fluoride in a region of said densified coating nearer said substrate surface.

Claim 13

The process according to claim 10, wherein said light metal oxide precursor is selected from the group consisting essentially of light metal alkoxides, light metal nitrates, light metal acid tartrates, and light metal acetates.

Claim 14

The process according to claim 10, wherein said light metal oxide precursor comprises magnesium oxide precursor.

Claim 15

The process according to claim 10, wherein said composition further comprises other oxide precursors selected from silicon oxide precursors, zirconium oxide precursors, titanium oxide precursors, cerium oxide precursors, or aluminum oxide precursors.

Claim 16

The process according to claim 13, wherein said other oxide precursors are selected from alkoxides, nitrates, acid tartrates, or acetates.

Claim 17

The process according to claim 10, wherein said pH of said reactive composition is adjusted to less than about 6.0 by means of an acid.

Claim 18

The process according to claim 10, wherein said water is provided in said reactive composition coating by exposing a coating comprising said light metal oxide (i) and said non-aqueous solvent (ii) to water vapor.

Claim 19

The process according to claim 10, wherein said process further comprises causing said reactive composition to become viscous prior to providing it on said substrate.