US5268068A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High aspect ratio molybdenum composite mask method
Assignee: International Business Machines Corp
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Filing: 1992-12-08
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Granted: 1993-12-07
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Expires: 2012-12-08
Abstract
Abstract An improved metal mask-making process is disclosed which involves starting with a metal mask having etched apertures using existing processes and coating it conformably with a substantially thick layer, so as to reduce the minimum aperture size while increasing the metal mask thickness. The conformal layer is chosen for minimum stress, good adhesion and thermal compatibility to the original metal mask material. Additional thin conformal coatings can be provided for imparting mechanical and chemical resistance to the metal mask.
Inventors
- 👤 Donald R. Cowell
- 👤 Mark W. Jones
- 👤 Chang-Ching Kin
- 👤 John J. Nahlik
- 👤 John A. Trumpetto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 04:47
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/20; H; H05; H05K; H05K3/00; H05K3/10; H05K3/12; H05K3/1216
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
95 words
A process of making metal mask with very small apertures comprising the steps of: forming the apertures to a first predetermined size in said body of the metal mask by a process selected from a group consisting of wet etching, reactive ion etching and electroforming; and coating at least one of the top and bottom surfaces of said metal mask and the sidewall surfaces of said apertures, with a predetermined thickness of a conformal layer, thereby increasing the thickness of said metal mask and decreasing the size of said apertures to a second predetermined size.
Claim 2
Dependent Claim
95 words
A process of making metal mask with very small apertures comprising the steps of: forming the apertures to a first predetermined size in said body of the metal mask by a process selected from a group consisting of wet etching, reactive ion etching and electroforming; and coating at least one of the top and bottom surfaces of said metal mask and the sidewall surfaces of said apertures, with a predetermined thickness of a conformal layer, thereby increasing the thickness of said metal mask and decreasing the size of said apertures to a second predetermined size.
Claim 3
Dependent Claim
30 words
The metal mask-making process of claim 1, further comprising the steps of: coating the conformally coated layer with an additional thin conformal layer for imparting mechanical and chemical resistance properties.
Claim 4
Dependent Claim
37 words
The metal mask-making process of claim 1, wherein the coating of the conformal process is performed by one of the processes selected from the group consisting of plating, chemical vapor deposition, and plasma enhanced chemical vapor deposition.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-12-06 | 1997-06-07 | 1997-12-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-12-06 | 2001-06-07 | 2001-12-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-12-06 | 2005-06-07 | 2005-12-07 | $7700.00 | Window Closed / Lapsed |