US4603056A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface treatment of a molybdenum screening mask
Assignee: International Business Machines Corp
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Filing: 1985-04-25
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Granted: 1986-07-29
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Expires: 2005-04-25
Abstract
Abstract Disclosed is a method of treating the surface of a molybdenum mask used for screening a metallized paste pattern to render it smooth and preserve the mask's hardness. The treatment consists of subjecting the mask to a nitridation step by which an ultrathin layer of molybdenum layer is first formed, followed by deposition of a comparatively thick silicon nitride layer thereon. The nitridation step may be accomplished in a plasma deposition system using either forming gas, ammonia or gas mixture of nitrogen and ammonia at a predetermined low temperature and pressure. The silicon nitride deposition may be accomplished in the same system at the same temperature and pressure by substituting the gas utilized to form the molybdenum nitride with a gaseous mixture of silane and one of nitrogen and ammonia.
Inventors
- 👤 Donald A. MacKinnon
- 👤 Pei-Ching Li
- 👤 Henry C. Schick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 00:41
CPC Classifications
C; C23; C23C; C23C28/00; C23C28/04; C23C28/044; C23C16/00; C23C16/02; C23C16/0272
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
42 words
A method of coating a molybdenum surface to preserve its surface hardness, said method comprising: forming by plasma deposition a layer of molybdenum nitride on said surface; and forming by plasma deposition a layer of silicon nitride on said molybdenum nitride layer.
Claim 2
Independent Claim
42 words
A method of coating a molybdenum surface to preserve its surface hardness, said method comprising: forming by plasma deposition a layer of molybdenum nitride on said surface; and forming by plasma deposition a layer of silicon nitride on said molybdenum nitride layer.
Claim 3
Dependent Claim
15 words
The method as recited in claim 1 wherein said molybdenum nitride layer is relatively thin.
Claim 4
Dependent Claim
15 words
The method as recited in claim 2 wherein said silicon nitride layer is relatively thick.
Claim 5
Dependent Claim
39 words
The method as recited in claim 2 wherein said molybdenum nitride forming is accomplished by plasma deposition using a gas selected from the group consisting of (a) forming gas, (b) a mixture of nitrogen and ammonia and (c) ammonia.
Claim 6
Dependent Claim
35 words
The method as recited in claim 3 wherein said silicon nitride forming is accomplished by plasma deposition using a gaseous mixture of silane and a gas selected from the group consisting of nitrogen and ammonia.
Claim 7
Independent Claim
46 words
A method of treating a molybdenum mask to render its surfaces smooth and preserve the hardness thereof, said method comprising: forming by plasma deposition a monolayer of molybdenum nitride on said surface; and forming by plasma deposition a silicon nitride layer on said molybdenum nitride monolayer.
Claim 8
Independent Claim
46 words
A method of treating a molybdenum mask to render its surfaces smooth and preserve the hardness thereof, said method comprising: forming by plasma deposition a monolayer of molybdenum nitride on said surface; and forming by plasma deposition a silicon nitride layer on said molybdenum nitride monolayer.
Claim 9
Dependent Claim
23 words
The method as recited in claim 6 wherein said silicon nitride is relatively thick compared to the thickness of the molybdenum nitride layer.
Claim 10
Dependent Claim
26 words
The method as recited in claim 7 wherein the ratio of the thickness of silicon nitride to molybdenum layers is in the range of approximately 6-40.
Claim 11
Dependent Claim
21 words
The method as recited in claim 6 wherein said molybdenum nitride forming step is accomplished by plasma deposition using forming gas.
Claim 12
Dependent Claim
24 words
The method as recited in claim 6 wherein said molybdenum nitride forming step is accomplished by plasma deposition using nitrogen and ammonia gas mixture.
Claim 13
Dependent Claim
20 words
The method as recited in claim 6 wherein said molybdenum forming step is accomplished by plasma deposition using ammonia gas.
Claim 14
Dependent Claim
26 words
The method as recited in claim 6 wherein said silicon nitride forming step is accomplished by plasma deposition using a gaseous mixture of silane and nitrogen.
Claim 15
Independent Claim
108 words
A method of treating a molybdenum substrate surface comprising: (a) mounting said substrate in a plasma deposition system; (b) forming a relatively thin adherent layer of molybdenum nitride on said surface by introducing forming gas into said system at a predetermined low temperature and pressure; and (c) forming a relatively thick silicon nitride layer on said molybdenum nitride layer by substituting a mixture of silane and a gas selected from the group consisting of nitrogen and ammonia in place of said forming gas at the same temperature and pressure as in step (b), whereby said substrate surface hardness is preserved and the coefficient of friction thereof is reduced.
Claim 16
Independent Claim
108 words
A method of treating a molybdenum substrate surface comprising: (a) mounting said substrate in a plasma deposition system; (b) forming a relatively thin adherent layer of molybdenum nitride on said surface by introducing forming gas into said system at a predetermined low temperature and pressure; and (c) forming a relatively thick silicon nitride layer on said molybdenum nitride layer by substituting a mixture of silane and a gas selected from the group consisting of nitrogen and ammonia in place of said forming gas at the same temperature and pressure as in step (b), whereby said substrate surface hardness is preserved and the coefficient of friction thereof is reduced.
Claim 17
Dependent Claim
20 words
The method as recited in claim 13 wherein said molybdenum nitride is formed by using nitrogen and ammonia gas mixture.
Claim 18
Dependent Claim
20 words
The method as recited in claim 14 wherein said gas mixture consists of 2% silane and 98% of nitrogen gas.
Claim 19
Dependent Claim
19 words
The method as recited in claim 13 wherein the thickness range of said molybdenum nitride is approximately 25-250 Å.
Claim 20
Dependent Claim
19 words
The method as recited in claim 16 wherein the thickness range of said silicon nitride is approximately 1500-4000 Å.
Claim 21
Dependent Claim
19 words
The method as recited in claim 17 wherein said low temperature is in the range of approximately 250-300° C.
Claim 22
Dependent Claim
19 words
The method as recited in claim 18 wherein said low pressure is in the range of approximately 0.2-1 torr.
Claim 23
Dependent Claim
21 words
The method as recited in claim 18 further including removing contaminants from said surface prior to said molybdenum nitride forming step.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-07-28 | 1990-01-27 | 1990-07-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-07-28 | 1994-01-27 | 1994-07-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-07-28 | 1998-01-27 | 1998-07-29 | $7700.00 | Window Closed / Lapsed |