Vertical-cavity surface emitting laser optical interconnect technology

Claim 2

A three dimensional optoelectronic interconnection comprising: a first semiconductor substrate having at least a first planar surface; a first array of vertical-cavity surface emitting lasers monolithically integrated in a first pattern on said first surface, each for generating radiation at a desired wavelength of operation, said radiation being emitted perpendicular to said first planar surface; means for generating a first set of electrical signals bearing information; for each laser, means responsive to said electrical signal for modulating said radiation to superimpose said information thereon; a second semiconductor substrate having at least a second planar surface, said first and second planar surfaces being non-coplanar; a first array of photoreceivers monolithically integrated in said first pattern on said second surface for receiving radiation from a corresponding laser and then converting said radiation to a second set of electrical signals; and means for processing said second set of electrical signals, at least one of said first and second semiconductor substrates being substantially transparent at said desired wavelength of operation, whereby the transmission and reception of said radiation between said lasers and photoreceivers establish an optoelectronic interconnection between said means for generating and said means for processing.

Claim 3

The three dimensional optoelectronic interconnection of claim 1 wherein said means for generating includes GaAs logic.

Claim 4

The three dimensional optoelectronic interconnection of claim 2 wherein said GaAs logic is monolithically integrated on said first surface.

Claim 5

The three dimensional optoelectronic interconnection of claim 1 wherein said means for modulating includes heterojunction bipolar transistors, each monolithically integrated with a corresponding laser.

Claim 6

The three dimensional optoelectronic interconnection of claim 1 wherein said first array of photoreceivers includes heterojunction photo transistors, each monolithically integrated on said second semiconductor substrate.

Claim 7

The three dimensional optoelectronic interconnection of claim 1 wherein said means for processing includes GaAs logic devices.

Claim 8

The three dimensional optoelectronic interconnection of claim 6 wherein said GaAs logic devices are monolithically integrated on said second surface.

Claim 9

The three dimensional optoelectronic interconnection of claim 1 wherein said first semiconductor substrate is GaAs.

Claim 10

The three dimensional optoelectronic interconnection of claim 1 wherein said second semiconductor substrate is GaAs.

Claim 11

The three dimensional optoelectronic interconnection of claim 1 wherein said vertical-cavity surface emitting lasers include an active region having at least one quantum well region.

Claim 12

The three dimensional optoelectronic interconnection of claim 10 wherein said quantum well region includes first and second layers, said first layers comprising a wide bandgap semiconductor material, said second layers comprising a narrow bandgap semiconductor material, and said first layers interleaved with said second layers.

Claim 13

The three dimensional optoelectronic interconnection of claim 11 wherein said quantum well region includes a compound selected from the group consisting of GaAs/AlGaAs, GaAs/InGaAs, AlGaAs/GaInP, InP/InGaAsP, or InAlAs/InGaAsP.

Claim 14

The three dimension optoelectronic interconnection of claim 1 wherein the wavelength of radiation is greater than 0.88 μm.

Claim 15

A three dimensional optoelectronic interconnection comprising a plurality of optoelectronic integrated circuit (OEIC) modules arranged in a vertical configuration such that each of said OEIC modules defines a planar surface substantially parallel with each other, each of said OEIC modules having at least a transmitter and a receiver, said transmitter including a heterojunction bipolar transistor (HBT) having collector, base and emitter semiconductor layers formed on said planar surface, and a vertical cavity surface emitting laser (VCSEL) for generating optical radiation at a desired wavelength of operation so that the transmission of the optical radiation from one OEIC module to a receiver on another OEIC module establishes an optoelectronic interconnection therebetween, at least one of said OEIC modules being substantially transmissive at said desired wavelength of operation, said VCSEL including, first and second mirrors, said first mirror disposed on said HBT, and an active quantum well region disposed between said first and second mirrors, said receiver including a heterojunction photo-transistor (HPT) having collector and emitter semiconductor layers and a floating base semiconductor layer for receiving said optical radiation, wherein said collector, emitter and floating base semiconductor layers, respectively, have the same epitaxial structure as said collector, emitter, and base semiconductor layers of said HBT.

Claim 16

A three dimensional optoelectronic interconnection comprising a plurality of optoelectronic integrated circuit (OEIC) modules arranged in a vertical configuration such that each of said OEIC modules defines a planar surface substantially parallel with each other, each of said OEIC modules having at least a transmitter and a receiver, said transmitter including a heterojunction bipolar transistor (HBT) having collector, base and emitter semiconductor layers formed on said planar surface, and a vertical cavity surface emitting laser (VCSEL) for generating optical radiation at a desired wavelength of operation so that the transmission of the optical radiation from one OEIC module to a receiver on another OEIC module establishes an optoelectronic interconnection therebetween, at least one of said OEIC modules being substantially transmissive at said desired wavelength of operation, said VCSEL including, first and second mirrors, said first mirror disposed on said HBT, and an active quantum well region disposed between said first and second mirrors, said receiver including a heterojunction photo-transistor (HPT) having collector and emitter semiconductor layers and a floating base semiconductor layer for receiving said optical radiation, wherein said collector, emitter and floating base semiconductor layers, respectively, have the same epitaxial structure as said collector, emitter, and base semiconductor layers of said HBT.

Claim 17

The three dimensional optoelectronic interconnection of claim 14 wherein said OEIC module further includes a semiconductor substrate, said transmitter and receiver monolithically integrated on said substrate.

Claim 18

The three dimensional optoelectronic interconnection of claim 15 wherein said OEIC module further includes a lens monolithically integrated on said substrate for directing the propagation of the optical radiation from said laser.

Claim 19

The three dimensional optoelectronic interconnection of claim 14 wherein the OEIC module further includes means for modulating the optical radiation from said laser.

Claim 20

A three dimensional optoelectronic interconnection comprising: first and second planar semiconductor substrates substantially parallel with each other; an array of transmitters including vertical cavity surface emitting lasers (VCSELs) and transistors disposed on said first semiconductor substrate for generating optical radiation at a desired wavelength of operation, said radiation being emitted perpendicular to said first semiconductor substrate; and an array of photoreceivers disposed on said second semiconductor substrate for receiving the optical radiation from said lasers so that the transmission and reception of the optical radiation establish an optical interconnection, at least one of said first and second semiconductor substrates being substantially transparent at said desired wavelength of operation, wherein the photoreceivers and transistors each have three semiconductor layers, the respective layers of said photoreceivers and transistors having the same epitaxial structure.

Claim 21

A three dimensional optoelectronic interconnection comprising: first and second planar semiconductor substrates substantially parallel with each other; an array of transmitters including vertical cavity surface emitting lasers (VCSELs) and transistors disposed on said first semiconductor substrate for generating optical radiation at a desired wavelength of operation, said radiation being emitted perpendicular to said first semiconductor substrate; and an array of photoreceivers disposed on said second semiconductor substrate for receiving the optical radiation from said lasers so that the transmission and reception of the optical radiation establish an optical interconnection, at least one of said first and second semiconductor substrates being substantially transparent at said desired wavelength of operation, wherein the photoreceivers and transistors each have three semiconductor layers, the respective layers of said photoreceivers and transistors having the same epitaxial structure.

Claim 22

The three dimensional optoelectronic interconnection of claim 18 wherein said vertical cavity surface emitting laser is monolithically integrated on said first substrate and said means for receiving is monolithically integrated on said second semiconductor substrate.

Claim 23

The three dimensional optoelectronic interconnection of claim 18 further comprising means disposed on said first substrate for modulating the optical radiation from said laser, and a lens disposed on said second substrate for focusing the optical radiation from said laser to said means for receiving.

Claim 24

The three dimensional optoelectronic interconnection of claim 20 wherein said means for modulating is monolithically integrated on said first substrate and said lens is monolithically integrated on said second substrate.

Claim 25

The three dimensional optoelectronic interconnection of claim 21 further comprising a lens monolithically integrated on said first substrate for directing said optical radiation from said laser to said means for receiving.